`
`Docket No.: 107131—274
`
`(PATENT)
`
`Inventors: Roman CHISTYAKOV
`
`Inter Partes Review of Patent N0.:
`
`7,81 1,421
`
`Filed:
`
`Title:
`
`July 18, 2005
`
`Issued: October 12, 2010
`
`HIGH DEPOSITION RATE SPUTTERING
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`
`PO. Box 1450
`
`Alexandria, VA 22313—1450
`
`Dear Sir/Madam:
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US Patent and Trademark
`
`Office connected herewith:
`
`All practitioners at Customer Number 23483.
`
`Address all communications to:
`
`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
`
`Boston, Massachusetts 02109
`617-526—6000
`
`Address all e—mails and telephone calls to lead and back-up counsel (each associated with the
`
`above Customer Number), listed below:
`
`124549267V.1
`
`
`
`Patent No.: 7,811,421
`
`Docket No.: 107131-274
`
`Richard A. Goldenberg (Lead Counsel, PTO Reg. No. 38,895)
`Richard.Goldenberg@wilmerhale.com
`Direct: 617-526-6548
`
`Yung-Hoon Ha (Back-up Counsel, PTO Reg. No. 56,368)
`Yung-Hoon.Ha@wilmerhale.com
`Direct: 212-295-6404
`
`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
`
`Boston, Massachusetts 02109
`617-526-6000
`
`For:
`
`Intel Corporation
`
`/W Dated:
`
`
`
`Z/Z'7/ [Ll
`
`Name: Kimberly A. Schmitt, Reg. No. 47065
`Title: Senior Litigation Attorney
`
`124549267v.1
`
`