EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`References cited herein:
`
`. U.S. Patent No. 7,808,184 (‘“ 184 Patent”)
`
`Dischar e in a
`-Current Low-Pressure uasi-Station
`0 D.V. Mozgrin, et a], Hi
`Magnetic Field: Experimental Research, Plasma Physics Reports, Vol. 21, No. 5, 1995
`(“Mozgrin”)
`
`o A. A. Kudryavtsev, et al, Ionization relaxation in a plasma produced by a pulsed inert-gas
`discharge, Sov. Phys. Tech. Phys. 28(1), January 1983 (“Kudryavtsev”)
`
`o Leipold et al., High-electron density, atmospheric pressure air glow discharges, Power
`Modulator Symposium, 2002 and 2002 High-Voltage Workshop. Conference Record of
`the Twenty-Fifth International, June 2002 (“Leipold”)
`
`0 Dennis M. Manos & Daniel L. Flamm, Plasma Etching: An Introduction, Academic Press
`1989 (“Manos”)
`
`o Thornton, J.A., Magnetron sputtering: basic physics and application to cylindrical
`magnetrons, J. Vac. Sci. Technol. 15(2) 1978 (“Thornton”)
`
`o Gudmundsson et al., Evolution of the electron energy distribution and plasma parameters
`in a pulsed magnetron discharge, Applied Physics Letters, 78(22) May 2001
`(“Gudmundsson”)
`
`Claims Liz-(1)2, and
`
`1. A method of
`generating a strongly-
`ionized plasma, the
`method comprising:
`
`Mozgrin in View of Kudryavtsev
`
`The combination of Mozgrin with Kudryavtsev discloses a method of
`generating a strongly-ionized plasma.
`
`‘ 184 Patent at 7: 14-17 (“[S]trongly-ionized plasmas are generally
`plas3mas having plasma densities that are greater than about 1012-1013
`cm' .”)
`
`
`
`Mozgrin at 401, right col, 112 (“For pre-ionization
`density in the 109 — 1011 cm'3 range”)
`
`the initial plasma
`
`Mozgrin at 409, left col, 1] 4 (“The implementation of the high-current
`magnetron discharge (regime 2) in sputtering
`plasma density
`(exceeding 2x10” cm'3).”).
`
`Mozgrin at 409, left col, 115 (“The high-current diffuse discharge
`(regime 3) is useful for producing large-volume uniform dense plasmas
`11,-; 1.5x1015cm'3...”.
`
`The combination of Mozgrin with Kudryavtsev discloses supplying feed
`a) supplying feed gas
`roximate to an anode as roximate to an anode and a cathode assembl
`.
`
`ActiveUS 122213 8 84V. 1
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`1
`
`INTEL 1119
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`INTEL 1119
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`

`

`EXHIBIT G.01
`
`US. Patent No. 7,808,184
`
`Claims Liza-32’ and
`
`and a cathode
`
`Mozgrin in view of Kudryavtsev
`
`assembly; and
`
`Mozgrin at Fig. 1
`
`
`
`Fig. 1. Discharge device configurations: (a) planar magne-
`tron;
`(h)
`shaped—electrode configuration.
`(1) Cathode;
`(2) anode; (3) magnetic system.
`
`Mozgrin at 401, left col, 1] 4 (“. . .the discharge gap which was filled up
`with either neutral or pre-ionized gas.”).
`
`Mozgrin at 400, right col, 1] 3 (“We investigated the discharge regimes
`in various gas mixtures at 10'3 — 10 torr. . .”).
`
`
`
`Mozgrin at 402, 1] spanning left and right cols (“We studied the high-
`current discharge in wide ranges of discharge current. . .and operating
`pressure. . .using various gases (Ar, N2, SF6, and H2) or their mixtures of
`various composition. . .”).
`
`Mozgrin at 401, left col, 1] l (“The [plasma] discharge. . .was adjacent to
`the cathode”)
`
`b) generating a
`voltage pulse between
`the anode and the
`
`See also Mozrin at Fi. l.
`
`The combination of Mozgrin with Kudryavtsev discloses generating a
`voltage pulse between the anode and the cathode assembly.
`
`cathode assembly,
`
`Mozgrin at Fig. 3(b):
`
`ActiveUS 122213 884V.l
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`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Claims 1-2, 4-12, and
`14_20
`
`Mozgrin in View of Kudryavtsev
`
`1
`
`2a 2b
`
`3
`
`Mozgrin at 402, Fig. 3 caption (“Fig. 3. Oscillograms of (a) current and
`(b) voltage. . .”).
`
`Mozgrin at 401, left col, 1] 4 (“It was possible to form the high-current
`quasi-stationary regime by applying a square voltage pulse to the
`discharge gap which was filled up with either neutral or pre-ionized
`
`the voltage pulse
`having at least one of
`a controlled amplitude
`and a controlled rise
`
`pulse having at least one of a controlled amplitude and a controlled rise
`time.
`
`time
`
`Mozgrin at Fig. 3:
`
`(b)
`
`
`
`1
`
`2a 2b
`
`3
`
`Mozgrin at 401, right col, 1] l (“[t]he power supply was able to deliver
`square voltage and current pulses with [rise] times (leading edge) of 5 —
`60 us ....”).
`
`Mozgrin at 406, right col, 1] 2 (“Table 1 presents parameter ranges
`corresponding to regime 2.”).
`
`Mozrin at 406, Table 1.
`
`that increases an
`ionization rate so that
`
`The combination of Mozgrin with Kudryavtsev discloses [at least one of
`a controlled amlitude and a controlled rise time] that increases an
`
`ActiveUS 122213 884v.l
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`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Claims 1-3:}? and
`a rapid increase in
`electron density and a
`formation of a
`strongly-ionized
`plasma occurs
`
`Mozgrin in view of Kudryavtsev
`ionization rate so that a rapid increase in electron density and a
`formation of a strongly-ionized plasma occurs without forming an arc
`between the anode and the cathode assembly.
`
`Mozgrin at Fig. 3
`
`
`
`Mozgrin at 401, 1] spanning left and right columns (“The frequency
`parameters of the pulsed supply unit were chosen... Designing the
`[pulsed supply] unit, we took into account the dependencies which had
`been obtained in [Kudryavtsev] of ionization relaxation on pre-
`ionization parameters, pressure, and pulse voltage amplitude”).
`
`Mozgrin at 401, right col, 1]2 (“For pre-ionization
`density in the 109 — 1011 cm'3 range”).
`
`the initial plasma
`
`Mozgrin at 409, left col, 1] 4 (“The implementation of the high-current
`magnetron discharge (regime 2) in sputtering
`plasma density
`(exceeding 2x10” cm'3).”).
`
`Mozgrin at 409, left col, 1]5 (“The high-current diffuse discharge
`(regime 3) is useful for producing large-volume uniform dense plasmas
`11,-; 1.5x1015cm'3...”).
`
`Mozgrin at Fig. 3
`
`Kudryavtsev at 32, right col, 1]1] 5-6 (“The discharge occurred inside a
`cylindrical tube... The gas was preionized by applying a dc current. . .A
`voltage pulse. . .was applied to the tube.”).
`
`Kudryavtsev at 3 1, right col, 1] 6 (“. .. an explosive increase in ne
`[electron density]. The subsequent increase in ne then reaches its
`maximum value, equal to the rate of excitation [equation omitted],
`which is several orders of magnitude greater than the ionization rate
`during the initial stage.”)
`
`Kudryavtsev at Abstract (“. .. electron density increases explosively in
`time due to accumulation of atoms in the lowest excited states.”)
`
`It would have been obvious to adjust the operating parameters, e.g.,
`increase the pulse length and/or pressure, so as to trigger Kudryavtsev’s
`fast stage of ionization. One of ordinary skill would have been
`motivated to use Kudryavtsev’s fast stage of ionization in Mozgrin so as
`to increase plasma density and thereby increase the sputtering rate.
`Kudravtsev’s fast sta e would also reduce the time reuired to reach a
`
`ActiveUS 122213 8 84V. 1
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`

`Claims 1-3:}? and
`
`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Mozgrin in view of Kudryavtsev
`given plasma density in Mozgrin, thus reducing the time required for a
`sputtering process. Further, use of Kudryavtsev’s fast stage in Mozgrin
`would have been a combination of old elements in which each element
`
`performed as expected to yield predictable results. Finally, because
`Mozgrin’s pulse, or the pulse used in the combination of Mozgrin and
`Kudryavtsev, produced Kudryavtsev’s “explosive increase” in plasma
`density, the rise time and amplitude of the pulse result in increasing the
`ionization rate so that a rapid increase in electron density and formation
`of a strongly-ionized plasma occurs.
`
`It would have been obvious to one of ordinary skill to combine Mozgrin
`with Kudryavtsev at least because Mozgrin cites Kudryavtsev and
`because Mozgrin explicitly notes that it was designed in accordance
`with Kudryavtsev. Mozgrin at 401, 1] spanning left and right columns
`(“Designing the [pulsed supply] unit, we took into account the
`dependences which had been obtained in [Kudryavtsev].”). Also,
`Kudryavtsev states, “Since the effects studied in this work are
`characteristic of ionization whenever a field is suddenly applied to a
`weakly ionized gas, they must be allowed for when studying emission
`mechanisms in pulsed gas lasers, gas breakdown, laser sparks, etc.”
`Kudryavtsev at 34, right col, 1] 4. Because Mozgrin applies voltage
`pulses that “suddenly generate an electric field,” one of ordinary skill
`reading Mozgrin would have been motivated to consider Kudryavtsev
`to better understand the effects of applying Mozgrin’s pulse and to
`confirm that Mozgrin’s system used Kudryavtsev’s fast stage of
`ionization. Further, use of Kudryavtsev’s fast stage in Mozgrin would
`have been a combination of old elements in which each element
`
`performed as expected.
`
`Background:
`
`
`
`Leipold at Abstract (“Application of a high voltage pulse causes a shift
`in the electron energy distribution function to higher energies. This
`causes a temporary increase of the ionization rate and consequently an
`increase of the electron densi
`.
`
`The combination of Mozgrin with Kudryavtsev discloses without
`forming an arc between the anode and the cathode assembly.
`
`without forming an
`arc between the anode
`and the cathode
`
`assembly.
`
`Mozgrin at Fig. 7.
`
`Mozgrin at 400, left col, 1] 3 (“Some experiments on magnetron systems
`of various geometry showed that discharge regimes which do not transit
`to arcs can be obtained even at high currents.”)
`
`ActiveUS 122213 8 84V. 1
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`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Claims Liza-32’ and
`
`Mozgrin in view of Kudryavtsev
`Mozgrin at 400, right col, 1] 1 (“A flirther increase in the discharge
`currents caused the discharges to transit to the arc regimes. . .”).
`
`Mozgrin at 404, left col, 1] 4 (“The parameters of the shaped-electrode
`discharge transit to regime 3, as well as the condition of its transit to arc
`regime 4, could be well determined for every given set of the discharge
`parameters”).
`
`737//%/
`
`Mozgrin at 406, right col. 1] 3 (“Moreover, pre-ionization was not
`necessary; however, in this case, the probability of discharge
`transferring to the arc mode increased.”).
`
`Mozgrin at 403, left col, 1] 2 (“Then, we studied regimes 2 and 3
`separately to determine the boundary parameters of their occurrence,
`such as current, voltage. . .”).
`
`Mozgrin at 400, right col, 1] 1 (“A flirther increase in the discharge
`currents caused the discharges to transit to the arc regimes. . .”).
`
`Mozgrin at 404, left col, 1] 4 (“If the current was raised above 1.8 kA or
`the pulse duration was increase to 2 — 10 ms, an instability development
`and discharge contraction was observed”).
`
`Mozgrin at Figs. 4 and 7.
`
`Background:
`
`Manos at 231 (“arcs. . .are a problem. . .”)
`
`2. The method of
`claim 1 further
`comprising applying a
`magnetic field
`proximate to the
`cathode assembly.
`
`The combination of Mozgrin with Kudryavtsev discloses applying a
`magnetic field proximate to the cathode assembly.
`
`See evidence cited for claim 1.
`
`Mozgrin at Fig. 1:
`1d)
`
`ActiveUS 122213 884v.l
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`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Claims 1-2, 4-12, and
`14-20
`
`Mozgrin in view of Kudryavtsev
`
`
`
`Fig. 1. Discharge dcvucc configurations: (a) planar magne—
`tron;
`(b)
`shapcd‘clcctrodc
`configuration.
`(I) Cathode;
`(2) anode". (3) magnetic system
`
`Mozgrin at 401, left col, 1] l (“The electrodes were immersed in a
`ma netic field of annular ermanent ma nets.” .
`
`4. The method of
`
`claim 1 further
`
`comprising generating
`an electron Hall
`
`current fiom an
`
`electric field
`
`The combination of Mozgrin with Kudryavtsev discloses generating an
`electron Hall current fiom an electric field generated by the voltage
`pulse and fiom the magnetic field, the electron Hall current raising the
`temperature of the electrons in the weakly-ionized plasma to a
`temperature that enhances the increase in electron density and the
`formation of the strongly-ionized plasma.
`
`
`
`generated by the
`voltage pulse and
`fiom the magnetic
`field, the electron Hall
`current raising the
`temperature of the
`electrons in the
`
`weakly-ionized
`plasma to a
`temperature that
`enhances the increase
`
`in electron density and
`the formation of the
`
`strongly-ionized
`plasma.
`
`ActiveUS 122213 884v.1
`
`See evidence cited for claim 1.
`
`‘ 184 Patent at 3:21-23 (“The magnetic field 132 can also induce an
`electron Hall current 135 that is formed by the crossed electric and
`magnetic fields.”) .
`
`‘ 184 Patent at 7: 14-17 (“Weakly-ionized plasmas are generally plasmas
`having plasma densities that are less than about 1012 — 1013 cm'3 ....”)
`
`‘ 184 Patent at 10:2-5 (“. . .increasing electron temperature caused by
`ExB Hall currents.”)
`
`‘ 184 Patent at 11:5-10 (“An electron ExB Hall current 135 is generated
`when the voltage pulse 252 applied between the target 118 and the
`anode 124 generates primary electrons and secondary electrons that
`move in a substantially circular motion proximate to the target 118
`according to crossed electric and ma netic fields.” .
`
`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Claims 1-2, 4-12, and
`14-20
`
`Mozgrin in view of Kudryavtsev
`
`‘ 184 Patent at 20:5-7 (“The magnetic field 526 increases the density of
`electrons and therefore, increases the plasma density in the region
`527.”).
`
`Mozgrin at Abstract (“[t]wo noncontracted discharge regimes in
`crossed E [electric] and H [magnetic] fields were studied.”)
`
`Mozgrin at Fig. l.
`
`Mozgrin at 401, right col, 112 (“For pre-ionization,
`density in the 109 — 1011 cm'3 range.”)
`
`initial plasma
`
`Background:
`
`Thornton at 173, left col, 111. (“When an electric field Er is applied
`perpendicular to a magnetic field of sufficient strength to affect the
`electrons but not the ions
`an electron Hall current
`will flow in the
`
`E x B direction.” .
`
`The combination of Mozgrin with Kudryavtsev discloses the voltage
`pulse comprise[s] a multi-stage voltage pulse.
`
`See evidence cited for claim 1.
`
`Mozgrin at Fig. 3(b).
`
`‘ 184 Patent at Fig. 4 (252).
`
`5. The method of
`
`claim 1 wherein the
`
`voltage pulse
`comprise a multi-
`stage voltage pulse.
`
`
`
`‘ 184 Patent at 7:22-23 (“The multi-stage voltage pulse 252 is a single
`voltage pulse having multiple stages as illustrated by the dotted line
`253.”).
`
`‘ 184 Patent at 7: 19-21 (“One skilled in the art will appreciate that there
`are numerous variations of the exact shape of the multi-stage pulse
`accordin
`resent invention.” .
`
`The combination of Mozgrin with Kudryavtsev discloses applying a
`voltage between the anode and the cathode assembly that sustains the
`strongly-ionized plasma.
`
`See evidence cited for claim 1.
`
`Mozgrin at Fig. 3(b).
`
`6. The method of
`
`claim 1 further
`
`comprising applying a
`voltage between the
`anode and the cathode
`
`assembly that sustains
`the strongly-ionized
`. lasma.
`
`7. The method of
`
`The combination of Moz rin with Ku avtsev discloses a lifetime of
`
`ActiveUS 122213 8 84V. 1
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`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Mozgrin in view of Kudryavtsev
`the strongly-ionized plasma is greater than 200 usec.
`
`See evidence cited for claim 1.
`
`Mozgrin at Fig. 3.
`
`Claims Liza-32’ and
`claim 1 wherein a
`lifetime of the
`
`strongly-ionized
`plasma is greater than
`200 usec.
`
`Mozgrin at 403, right col, 1] 4 (“the current pulse duration was 25
`ms....” .
`
`The combination of Mozgrin with Kudryavtsev discloses discharging
`energy fiom an energy storage device into the plasma to enhance the
`rapid increase in electron density and the formation of the strongly-
`ionized plasma.
`
`8. The method of
`claim 1 further
`comprising
`discharging energy
`from an energy
`storage device into the See evidence cited for claim 1.
`plasma to enhance the
`rapid increase in
`electron density and
`the formation of the
`strongly-ionized
`plasma.
`
`according to crossed electric and magnetic fields”).
`
`Mozgrin at 401, left col, 1] 4 (“It was possible to form the high-current
`quasi-stationary regime by applying a square voltage pulse to the
`discharge gap which was filled up with either neutral or pre-ionized
`gas.”).
`
`of the voltage pulse is sufficient to generate ionizational instabilities
`that enhance the ionization rate so as to cause a rapid increase in
`electron density and the formation of the strongly-ionized plasma.
`
`See evidence cited for claim 1.
`
`‘ 184 Patent at 3:21-23 (“The magnetic field 132 can also induce an
`electron Hall current 135 that is formed by the crossed electric and
`magnetic fields”) .
`
`‘ 184 Patent at 7: 14-17 (“Weakly-ionized plasmas are generally plasmas
`having plasma densities that are less than about 1012 — 1013 cm'3 ....”)
`
`‘ 184 Patent at 10:2-5 (“. . .increasing electron temperature caused by
`ExB Hall currents”)
`
`‘ 184 Patent at 11:5-10 (“An electron ExB Hall current 135 is generated
`when the voltage pulse 252 applied between the target 118 and the
`anode 124 generates primary electrons and secondary electrons that
`move in a substantially circular motion proximate to the target 118
`
`9. The method of
`
`claim 1 wherein an
`amplitude of the
`voltage pulse is
`sufficient to generate
`ionizational
`
`instabilities that
`
`enhance the ionization
`rate so as to cause a
`rapid increase in
`electron density and
`the formation of the
`strongly-ionized
`plasma.
`
`ActiveUS 122213 8 84V. 1
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`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Claims blitz-(1)2, and
`
`Mozgrin in view of Kudryavtsev
`‘ 184 Patent at 20:5-7 (“The magnetic field 526 increases the density of
`electrons and therefore, increases the plasma density in the region
`527.”).
`
`Mozgrin at Fig. 3(b).
`
`One of ordinary skill would expect that induced motion of the fiee
`electrons, in combination with the action of Mozgrin’s magnetic field,
`will create, at least temporarily, local instabilities within the plasma.
`
`If ionizational instabilities enhance the ionization rate in the ‘ 184
`
`Patent, it will occur in Mozgrin as well, because both systems apply
`pulses under similar conditions. Moreover, because instabilities in
`plasmas were well known by those of ordinary skill long before the
`‘ 184 Patent was filed, it would have been obvious to use such
`instabilities in Mozgrin.
`
`Background:
`
`Thornton at 173, left col, 111. (“When an electric field Ei is applied
`perpendicular to a magnetic field of sufficient strength to affect the
`electrons but not the ions
`an electron Hall current
`will flow in the
`
`E x B direction.”).
`
`Thornton at 173, right col, 112 (“Such drifts are inherently unstable,
`since any departure fiom charge neutrality in the form of charge
`bunching and separation (over distances of the order of the Debye
`length) create electric fields which cause second-order E x B drifts that
`can exacerbate the perturbation. These instabilities are often referred to
`as gradient-drift and neutral-drag instabilities”).
`
`
`
`10. The method of
`claim 1 wherein at
`least some of the
`
`Thornton at 173, right col, 114 (“Plasma oscillations and instabilities are
`believed to la an imortant role in the o eration of ma netrons. . .” .
`
`The combination of Mozgrin with Kudryavtsev discloses at least some
`of the ionizational instabilities comprise diocotron instabilities.
`
`ionizational
`
`See evidence cited for claim 1.
`
`instabilities comprise
`diocotron instabilities.
`
`ActiveUS 122213 8 84V. 1
`
`‘ 184 Patent at 9:20-26 (“A high-power stage 283 includes voltage
`oscillations 284 that have peak-to-peak amplitudes that are on the order
`of about 50V. These "saw tooth" voltage oscillations 284 may be caused
`by the electron density forming a soliton (sic) waveform or having
`another non-linear mechanism, such as diocotron instability discussed
`above, that increases the electron densi
`as indicated b the increasin;
`
`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Claims blitz-(1)2, and
`
`Mozgrin in view of Kudryavtsev
`discharge current 286.”)
`
`‘ 184 Patent at 14:41-44 (“Voltage oscillations 354 in the high-power
`stage 350 are sustained for about 100 usec. The voltage oscillations can
`are (sic) caused by the ionizational instabilities in the plasma as
`described herein, such as diocotron oscillations”)
`
`The claim merely adds a reference to the well-known principle of
`“diocotron instability” to the otherwise obvious independent claim.
`Therefore, this claim is obvious for the same reasons as claim 9.
`
`Background:
`
`Thornton at 173, right col, 112 (“Drifts driven by the two density
`
`11. A method of
`generating a strongly-
`ionized plasma, the
`method comn,risin:
`
`a) supplying feed gas
`proximate to an anode
`and a cathode
`
`The combination of Mozgrin with Kudryavtsev discloses a method of
`generating a strongly-ionized plasma.
`
`See evidence cited in claim 1 reamble.
`
`The combination of Mozgrin with Kudryavtsev discloses supplying feed
`gas proximate to an anode and a cathode assembly.
`
`assembl
`
`; and
`
`See evidence cited in claim 1 a .
`
`
`
`The combination of Mozgrin with Kudryavtsev discloses generating a
`voltage pulse between the anode and the cathode assembly, the voltage
`pulse having at least one of a controlled amplitude and a controlled rise
`time that shifts an electron energy distribution in the plasma to higher
`energies that increase an ionization rate so as to result in a rapid
`increase in electron density and a formation of a strongly-ionized
`plasma without forming an arc between the anode and the cathode
`assembly.
`
`See evidence cited in claim 1(b).
`
`One of ordinary skill would have readily understood that the electron
`energy distribution shifts to higher energies in Mozgrin, because
`Mozgrin applies voltage pulses in a magnetron sputtering chamber.
`
`Background:
`Leipold at Abstract (“Application of a high voltage pulse causes a shift
`in the electron energy distribution function to higher energies. This
`causes a temporary increase of the ionization rate and consequently an
`increase of the electron densi
`
`b) generating a
`voltage pulse between
`the anode and the
`cathode assembly, the
`voltage pulse having
`at least one of a
`controlled amplitude
`and a controlled rise
`time that shifts an
`
`electron energy
`distribution in the
`
`plasma to higher
`energies that increase
`an ionization rate so
`as to result in a rapid
`increase in electron
`density and a
`formation of a
`strongly-ionized
`n lasma without
`
`ActiveUS 122213 8 84V. 1
`
`

`

`Claims Lag-32’ and
`forming an arc
`between the anode
`and the cathode
`assembly.
`
`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Mozgrin in view of Kudryavtsev
`
`Gudmundsson at Title (“[e]volution of the electron energy distribution
`in a pulsed magnetron discharge.”).
`
`Gudmundsson at 3427, right col, 1] 2 (“For the measurements presented
`here, the average power was 300 W, pulse width 100 us, and repetition
`frequency 50 Hz. The peak voltage was roughly 800 V. . ..”)
`
`Gudmundsson at 3428, left col, 1] 2 (“Figure l [of Gudmundsson] shows
`the evolution of the electron energy distribution function with time from
`initiating the pulse.”).
`
`Gudmundsson at 3429, right col, 1] l (“The average electron energy
`peaks at 3.5 eV roughly 100 us after initiating the pulse. This peak in
`the average energy coincides with the presence of the high energy group
`of electrons apparent in the electron energy distribution”)
`
`sure 2 111Torr.
`
`Gudmundsson at Figs. 1 and 2:
`
`
`
`NormalizedEEDF
`
`oo8‘2
`o 8
`
`.0S
`
`
`
`\"nr'nmli/PdEFDF
`
`a
`
`2
`
`b
`
`2‘ |e\‘v’|
`
`5
`
`E
`
`7
`
`:5 [e\.’]
`
`FIG. 1. Nomialized EEDF measured (a) during pulses 60. 80. and 100 ,us
`after initiating the pulse: (b) around the electron density maximum 105. 110.
`and 130 ,us after initiating the pulse: and Ic) 250. 350. and 450 us after
`initiating the pulse. Pulse length, 100 ,us: average power. 300 W: and pres—
`
`ActiveUS 122213 884V.l
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`l2
`
`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Claims 1-2, 4-12, and
`14-20
`
`Mozgrin in view of Kudryavtsev
`
`100
`
`200
`
`300
`
`400
`
`500
`
`,>
`r:cu
`:cH
`“O.—
`
`
`
`0
`
`100
`
`200
`
`300
`
`400
`
`500
`
`1 yrs]
`tbt average electron mag) and it!
`tal Election density.
`FIG. 1.
`i floating potential I", ‘- plasma potential l'wl. and‘ potential difi'etence
`il'pf I’m as :1 fimctmn of mm: {tom Initiation of the pulse Target current
`pulse length. loo [6: average power. 300 W: and pRfiSllIE. 2 mTon
`
`Gudmundsson’s teaching that applying a voltage pulse that raises the
`density of a plasma also “shifts an electron energy distribution in the
`plasma to higher energies” is part of the background knowledge that
`one of ordin
`skill would have1n mind while reading
`.
`
`The combination of Mozgrin with Kudryavtsev discloses applying a
`magnetic field proximate to the cathode assembly.
`
`See evidence cited for claim 11.
`
`See evidence cited in claim 2.
`
`The combination of Mozgrin with Kudryavtsev discloses generating an
`electron Hall current fiom an electric field generated by the voltage
`pulse and fiom the magnetic field, the electron Hall current raising the
`temerature of the electrons in the weakl -ionized lasma to a
`
`12. The method of
`
`claim 11 further
`
`comprising applying a
`magnetic field
`proximate to the
`cathode assembl
`
`.
`
`14. The method of
`
`claim 12 further
`
`comprising generating
`an electron Hall
`
`ActiveUS 122213 884V.1
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`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Claims Liz-(1)2, and
`
`current from an
`
`electric field
`
`Mozgrin in view of Kudryavtsev
`temperature that enhances the increase in electron density and the
`formation of the strongly-ionized plasma.
`
`See evidence cited for claim 11.
`
`See evidence cited in claim 4.
`
`See evidence cited for claim 11.
`
`generated by the
`voltage pulse and
`fiom the magnetic
`field, the electron Hall
`current raising the
`temperature of the
`electrons in the
`
`weakly-ionized
`plasma to a
`temperature that
`enhances the increase
`
`in electron density and
`the formation of the
`
`strongly-ionized
`. lasma.
`
`15. The method of
`
`claim 11 wherein the
`
`voltage pulse
`comprise a multi-
`stage voltage pulse.
`
`16. The method of
`
`claim 11 further
`
`comprising applying a
`voltage between the
`anode and the cathode
`
`assembly that sustains
`the strongly-ionized
`lasma.
`
`17. The method of
`
`claim 11 wherein a
`
`lifetime of the
`
`strongly-ionized
`plasma is greater than
`200 sec.
`
`18. The method of
`
`claim 11 further
`
`comprising
`discharging energy
`from an energy
`storage device into the
`lasma to enhance
`
`ActiveUS 122213 8 84V. 1
`
`The combination of Mozgrin with Kudryavtsev discloses the voltage
`pulse comprise[s] a multi-stage voltage pulse.
`
`See evidence cited for claim 11.
`
`See evidence cited in claim 5.
`
`The combination of Mozgrin with Kudryavtsev discloses applying a
`voltage between the anode and the cathode assembly that sustains the
`strongly-ionized plasma.
`
`See evidence cited for claim 11.
`
`See evidence cited in claim 6.
`
`The combination of Mozgrin with Kudryavtsev discloses a lifetime of
`the strongly-ionized plasma is greater than 200 usec.
`
`See evidence cited for claim 11.
`
`See evidence cited in claim 7.
`
`The combination of Mozgrin with Kudryavtsev discloses discharging
`energy fiom an energy storage device into the plasma to enhance the
`rapid increase in electron density and the formation of the strongly-
`ionized plasma.
`
`

`

`EXHIBIT G.01
`
`U.S. Patent No. 7,808,184
`
`Mozgrin in view of Kudryavtsev
`See evidence cited in claim 8.
`
`The combination of Mozgrin with Kudryavtsev discloses an amplitude
`of the voltage pulse is sufficient to generate ionizational instabilities
`that enhance the ionization rate resulting in a rapid increase in electron
`density and the formation of the strongly-ionized plasma.
`
`See evidence cited for claim 11.
`
`Claims blitz-(1)2, and
`the rapid increase in
`electron density and
`the formation of the
`
`strongly-ionized
`. lasma.
`
`19. The method of
`claim 11 wherein an
`amplitude of the
`voltage pulse is
`sufficient to generate
`ionizational
`
`instabilities that
`
`
`
`enhance the ionization See evidence cited in claim 9.
`
`rate resulting in a
`rapid increase in
`electron density and
`the formation of the
`
`strongly-ionized
`. lasma.
`
`20. The method of
`claim 11 wherein the
`ionizational
`
`instabilities comprise
`at least some
`
`The combination of Mozgrin with Kudryavtsev discloses the
`ionizational instabilities comprise at least some diocotron instabilities.
`
`See evidence cited for claim 11.
`
`diocotron instabilities.
`
`See evidence cited for claim 10.
`
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