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`Chistyakov
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`Drewery, et al.
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`5844195
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`1998-12-01
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`Fairbaim, et al.
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`6416634
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`5616224
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`Fteceipt date: 09/29/2006
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`KOUZN ETSOV, et al., A Novel Pulsed Magnetron Sputter Technique Utilizing Very High Target Power Densities,
`l:l
`Surface and Coatings Technology, 1999, Pgs. 290—293, Vol. 122, Elsevier
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`
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`
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`STEINBRUCHEL, A Simple Formula For Low-Energy Sputtering Yields, Applied Physics A., 1985, Pgs. 37—42, Vol.
`36, Springer, Verlag.
`l:l
`
`DAUGHERTY, et al., Attachment-Dominated Electron-Beam—lonized Discharges, Applied Physics Letters, May 15,
`
`1976, Pgs. 581-583, Vol. 28, No. 10, American Institute of Physics.
`
` FAJANS, et al., Bifurcations In Elliptical, Asymmetric Non-Neutral Plasmas, Physics of Plasmas, October 2000, Pgs.
`
`3929-3933, Vol. 7, No. 10, American Institute of Physics,
`
` DEKOVEN, et al., Carbon Thin Film Deposition Using High Power Pulsed Magnetron Sputtering, 46th Annual
`
`
`Technical Conference Proceedings, 2003, Pgs. 158-165, Society of Vacuum Coaters.
`
` CHOUEIRI, Characterization Of Oscilla '
`n
`
`
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`STARK, et al., Electron Heating In Atmospheric Pressure Glow Discharges, Journal of Applied Physics, April 2001,
`Pg. 3568, Vol. 89, No. 7, American Institute of Physics.
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`Receipt date: 09/29/2006
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`Application Number
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`11465574
`2006-08-18
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`11465574 - GAU: 2821
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`INFORMATION DISCLOSURE
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`STATEMENT BY APPLICANT
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`GUDMUNDSSON, et aI., Evolution Of The Electron Energy Distribution And Plasma Parameters In A Pulsed
`Magnetron Discharge, Applied Physics Letters, May 28,2001, Pgs. 3427-3429, American Institute of Physics.
`
`
`
`MOZGRIN, et al., High—Current Low-Pressure Quasi —Stationary Discharge In A Magnetic Field: Experimental
`Research, Plasma Physics Reports, 1995, Vol. 21, No. 5, Pgs. 400—409, Interperiodica Publishing.
`
`GARRIGUES, et al., Hybrid And Particle-In—Cell Models OfA Stationary Plasma Thruster, Plasma Sources Sci.
`Technol.. 2000, Pgs. 219—226, Vol. 9, IOP Publishing Ltd.. UK.
`
`KUDRYAVTSEV, et al., Ionization Relaxation In A Plasma Produced By A Pulsed Inert-Gas Discharge, Sov. Phys.
`Tech. Phys., January 1983, Pgs. 30—35, Vol. 28, No. 1, American Institute of Physcis.
`
`BIBERMAN, et aI., Low-Temperature Plasmas With Nonequilibrium Ionization, Sov. Phys. Usp., June 1979, Pgs.
`411-432, Vol. 22, No.6.
`
`THORNTON, Magnetron Sputtering: Basic Physics And Application To Cylindrical Magnetrons, J. Vac. Sci. Technol.
`March/April 1978, Pgs. 171-177, Vol. 15, No.2.
`
`.' mas, South Hall
`
`HELMERSSON, Metallization By Pulsed High—Power Sputtering, [online]. [retrieved on November 21, 2003].
`Retrieved from WWW.inf.Iiu.selthinprogramlprojects/p2.htmI.
`
`PISAREV, Modification Of The Surface Of Perforated Polymer MF-4SK In Low-Pressure, High Current Quasi-Stable
`Discharge Plasma In Magnetic Field, [online]. [retrieved on December 30,2003]. Retrieved from WWW.tech-db.rul
`Istc/db/pra.nsf/we/0624.
`
`GUDMUNDSSON, et 6]., Observation Of Ion-Acoustic Solitons In A Pulsed Magnetron Sputtering Discharge, 56th-
`Gaseous Electronics Conference-2003, October 24. 2003, Pgs. 1-14.
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`Receipt date: 09/29/2006
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`Application Number
`11465574 ~ GAU: 2821
`11465574
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`Filing Date
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`Chislyakov
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`INFORMATION DISCLOSURE
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`MATOSSIAN, et al., Operating Characteristics OfA100kV, 100kW Plasma Ion Implantation Facility, Surface Coatings
`& Technology, 1996, Pgs. 92-97, Vol. 85.
`
`FAJANS, et al., Second Harmonic Autoresonant Control Of The l=1 Diocotron Mode In Pure—Electron Plasmas,
`Physical Review E, September 2000, Pgs. 4131-4136, Vol.62, No. 3.
`
`J.T. GUDMUNDSSON, et al., Spatial And Temporal Behavior Of The Plasma Parameters In A Pulsed Magnetron
`Discharge, Surface & Coatings Technology, 2002, Pgs. 249-256, Vol. 161, Elsevier Science.
`
`BIBERMAN, et al., Chapter Eight: Transient Nonequilibrium Plasmas, Kinetics Of Nonequilibrium Low Temperature
`Plasmas, 1987, Pgs. 321, 360-372, Plenum Publishing Corporation, New York, USA.
`
`GUDMUNDSSON, et al., Observation Of Solitons In A Pulsed Magnetron Sputtering Discharge [online].
`December 8, 2003]. Retrieved from WWW.eps.org/aps/meet/GECOS/baps/abs/SSOO.html.
`
`[retrieved on
`
`The State Of The Art In Pulsed High Power [online]. [retrieved on July 15, 2002]. Retrieved from W.
`physiqueindustrie.com/Jiulsemeerhtml.
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`
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`Encyclopedia Of Low Temperature Plasma, Editor V.E. Fortov. 2000, Volume 3, Pg. 123.
`
`Encyclopedia Of Low Temperature Plasma, Editor V.E. Fortov. 2000, Volume 3, Pg. 119.
`
`HART, et al., Growth Of Soliton—Iike Structures From Normal Modes And Particle Loss From A Nonneutral Plasma,
`[online]. Non-Neutral Plasmas, Archibald/Cochran, 3rd Floor, Tower, November 7, 1995.
`
`HART, et al., Verification Of Solitons Grown From Normal Modes, [online]. Dusty Plasma
`l, Imperial Ballroom, Fairmont, November 16, Year unknow .
`‘
`
`VLADIMIROV, V., Voltage-Current Characteristics Of A Gas Magnetron In the Case Of Intense Cathode Sputtering,
`Sov. J. Plasma Phys, Jan-Feb. 1981, Pgs. 114-118, Vol. 7, No. 1.
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`Receipt date: 09/29/2006
`Application Number
`11465574
`11465574 - GAU: 2821i
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`Filing Date
`2006-08-18
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`First Named Inventor
`Chistyakov
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`LUTSENKO, E.I., Instability Mechanisms In A High-Current Straight Discharge At A Low Gas Pressure, Sov. J.
`Plasma Phys, Jan—Feb. 1984, Pgs. 87-95, Vol. 10, No. 1.
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