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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`CARL ZEISS SMT GMBH
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`Petitioner
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`V.
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`NIKON CORPORATION
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`Patent Owner
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`Case IPR2013—00363
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`Patent 7,348,575
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`NIKON CORPORATION
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`POWER OF ATTORNEY
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`PURSUANT TO 37 C.F.R. § 42.1000)
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`Mail Stop "PATENT BOARD "
`Patent Trial and Appeal Board
`US. Patent and Trademark Office
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`PO. BOX 1450
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`Alexandria, VA 22313-1450
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`Nikon Corporation
`Case IPR2013-00363
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`POWER OF ATTORNEY PURSUANT TO 37 C.F.R. § 42.101b)
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`Nikon Corporation, owner of US. patent 7,348,575, hereby appoints the
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`patent practitioners associated with Customer Number 22850 (which include, in
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`part, John S. Kern (Reg. No. 42,719) and Robert C. Mattson (Reg. No. 42,850» to
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`represent it before the Patent Trial & Appeal Board of the US. Patent and
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`Trademark Office in connection with case number IPR2013-00363.
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`Nikon Corporation
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`of Intellectual Property Headquarters
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`Nikon Corporation
`Case IPR2013-00363
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`CERTIFICATE OF SERVICE
`The undersigned certifies that a copy of the foregoing:
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`NIKON CORPORATION POWER OF ATTORNEY PURSUANT
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`TO 37 C.F.R. § 42.10(b)
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`was served via email (IPR24984-0056IP2@fr.com) on July 5, 2013, in its entirety,
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`on the following:
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`Marc M. Wefers
`Chris C. Bowley
`Fish & Richardson P.C.
`3200 RBC Plaza, 60 South Sixth St.
`Minneapolis, MN 55402
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`Respectfully Submitted,
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`/John S. Kern/
`John S. Kern (Reg. No. 42,719)
`Attorney for Patent Owner
` Nikon Corporation
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