`
`
`UNITED STATES DEPARTMENT OF COMMERCE
`US. Patent and Trademark Office
`
`Adm: COMMISSIONER FOR PATENTS
`P.O.Box1450 _
`Alexandria, Virginia 22313-1450
`
`APPLICATION NO]
`CONTROL NO.
`1 1266288
`
`FILING DATE
`
`11/4/2005
`
`FIRST NAMED INVENTORI
`PATENT IN REEXAMINATION
`OMURA, YASUHIRO
`
`OLlFF & BERRIDGE, PLC
`PO. BOX 320850
`ALEXANDRIA, VA 22320-4850
`
`ATTORNEY DOCKET NO.
`
`125842
`
`EXAMINER
`
`.
`
`ART UNIT
`
`ZIA R.. HASHMI
`PAPER
`
`2881
`
`20080126
`
`DATE MAILED:
`
`Please find below and/or attached an Office communication concerning this application or
`
`proceeding.
`
`Examination of the IDS submitted on January 1 1, 2008, does not reveal any new information to disallow the current application.
`
`Commissioner for Patents
`
`Zia R. Hashmi.
`
`PTO-900 (Rev.04-03)
`
`--
`
`1
`
`--
`
`ZEISS 1122
`
`-- 1 --
`
`ZEISS 1122
`
`

`

`‘4
`
`Form PTO—1449
`(REV. 1/06)
`
`US Dept. of Commerce
`PATENT & TRADEMARK OFFICE
`INFORMATION DISCLOSURE STAWENT
`
`ATI'Y DOCKET NO.
`125842
`
`Sheet
`
`1
`
`of
`
`1
`
`APPLICATION NO.
`11/266,288
`
`(Use several sheets if necessary)
`
`APPLICANT
`Yasuhiro OMURA
`FILING DATE
`November 4 2005
`
`'
`
`GROUP
`2881
`
`IIIIIIIH
`
`Cite
`No.
`
`Document Number
`
`2002/0176063 Al
`
`2006/01 [9750 A1
`
`5’
`
`1 1-28-2002
`
`06-08-2006
`
`Epple et 61.
`
`FOREIGN PATENT DOCUM3
`
`Document Number
`
`Date
`
`151’ 1 098 215 A1
`
`05-09-2001
`
`With
`English
`Translation
`
`
`
`08-20-2003
`EP 1 336 887 Al?
`-—-_--
`
`Examiner
`Initials
`
`Cite
`No.
`
`Z.H./
`
`OTHER DOCUMENTS
`
`(Including Author. Title. Date. Pertinent Pages. etc.)
`
`SWITKES et a]; "Resolution Enhancement of 157-nm Lithography by Liquid Immersion"; Massachusetts Institute of Technology;
`
`EXAMINER
`
`Examiner:
`
`‘
`
`.
`.
`'
`'
`DATE CONSIDERED
`Izla Hashmv m
`Initial if citation considered. whether or not citation is in conformance with M.P.E.P. 609; draw line through citation if not in conformance
`include c - of this form with next comunication to 85-11681“.
`and not considered.
`
`Date: January 11, 2908
`
`-- 2 --
`
`

`

`
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`UNITED STATES DEPARTMENT OF COMMERCE
`United States Patent and Trademark Office
`Address: COMMISSIONER FOR PATENTS
`P.O. Box 1450
`Alexandria. Virginia 22313-1450
`www.uspto.gov
`
`NOTICE OF ALLOWANCE AND FEE(S) DUE
`
`OLIFF & BERRIDGE, PLC
`moxmsso
`
`ALEXANDRIA, VA 22320-4850
`
`'
`
`HASHMI. er R
`
`2881
`DATE MAILED: 10/29/2007
`
`APPLICATION NO.
`
`FILING DATE
`
`FIRST NAMED INVENTOR ‘
`
`ATTORNEY DOCKET NO.
`
`CONFIRMATION NO.
`
`Yasuhiro Omura
`1 1/04/2005
`1 ”266,288
`TITLE OF INVENTION: PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS; AND EXPOSURE METHOD
`
`125842
`
`8973
`
`APPLN. TYPE
`
`SMALL ENTITY
`
`ISSUE FEE DUE
`
`PUBLICATION FEE DUE
`
`PREV. PAID ISSUE FEE
`
`TOTAL FEE(S) DUE
`
`nonprovisional
`
`NO
`
`$1440
`
`$300
`
`$0
`
`$1740
`
`DATE DUE
`
`01/29/2008
`
`THE APPLICATION IDENTIFIED ABOVE HAS BEEN EXAMINED AND IS ALLOWED FOR ISSUANCE AS A PATENT.
`
`THIS APPLICATION IS SUBJECT TO WITHDRAWAL FROM ISSUE AT THE INITIATIVE OF THE OFFICE OR UPON
`PETITION BY THE APPLICANT. SEE 37 CFR 1.313 AND MPEP 1308.
`
`THE ISSUE FEE AND PUBLICATION FEE (IF REQUIRED) MUST BE PAID WITHIN THREE MONTHS FROM THE
`MAILING DATE OF THIS NOTICE OR THIS APPLICATION SHALL BE REGARDED AS ABANDONED.
`THIS
`SIAM RERIQD. QANNQI BE EXTENDED.
`SEE 35 U.S.C. 151. THE ISSUE FEE DUE INDICATED ABOVE DOES
`NOT REFLECT A CREDIT FOR ANY PREVIOUSLY PAID ISSUE FEE IN THIS APPLICATION.
`IF AN ISSUE FEE HAS
`PREVIOUSLY BEEN PAID IN THIS APPLICATION (AS SHOWN ABOVE), THE RETURN OF PART B OF THIS FORM
`WILL BE CONSIDERED A REQUEST TO REAPPLY THE PREVIOUSLY PAID ISSUE FEE TOWARD THE ISSUE FEE NOW
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`HOW TO REPLY TO THIS NOTICE:
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`‘
`
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`
`B. If the status above is to be removed, check box 5b on Part B -
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`and twice the amount of the ISSUE FEE shown above, or
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`B. If applicant claimed SMALL ENTITY status before, or is now
`claiming SMALL ENTITY status, check box 5a on Part B - Fee(s)
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`the ISSUE FEE shown above.
`
`II. PART B 4 FEE(S) TRANSMITTAL, or its equivalent, must be completed and returned to the United States Patent and Trademark Office
`(USPTO) with your ISSUE FEE and PUBLICATION FEE (if required). If you are charging the fee(s) to your deposit account, section "4b"
`of Part B - Fee(s) Transmittal should be completed and an extra copy of the form should be submitted. If an equivalent of Part B is filed, a
`request to reapply a previously paid issue fee must be clearly made, and delays in processing may occur due to the difficulty in recognizing
`the paper as an equivalent of Part B.
`
`III. All communications regarding this application must give the application number. Please direct all communications prior to issuance to
`Mail Stop ISSUE FEE unless advised to the contrary.
`
`IMPORTANT REMINDER: Utility patents issuing on applications filed on or after Dec. 12, 1980 may require payment of
`maintenance fees. It is patentee's responsibility to ensure timely payment of maintenance fees when due.
`
`PTOL-85 (Rev. 08/07) Approved for use through 08/31/2010.
`
`Page 1 of 3
`
`__3__
`
`-- 3 --
`
`

`

`1.1
`
`PART B - FEE(S) TRANSMITTAL
`
`Complete and send this form, together with applicable fee(s), to: Mail Mail Stop ISSUE FEE
`Commissioner for Patents
`P.O. Box 1450
`Alexandria, Virginia 22313-1450
`
`or m (571)-273-2885
`
`through 5 should be completed where
`INSTRUCTIONS: This form should be used for transmitting the ISSUE FEE and PUBLICATION FEE (if required); Blocks 1
`ap ropriatc. All further correspondence including the Patent, advance orders and notification of maintenance fees Will
`e mailed to the current corres ondence address as
`in icatcd unless corrected below or directed otherwrse in Block 1, by (a) spccrfying a new correspondence address; and/or (b) indicating a separate." EE ADDRESS" for
`maintenance fee notifications.
`
`CURRENT CORRESPONDENCE ADDRESS (Note: Use Block I for any change ofaddress)
`
`25944
`
`7590
`
`10/29/2007
`
`OLIFF & BERRIDGE, PLC
`P 0 BOX 320850
`ALEXANDRIA, VA 22320-4850
`
`Note: A certificate 0i maliln can only he used ior domestic mailings oi the
`Fee(s) Transmittal. This eerti icate cannot be _used for any other accompanying
`papers. Each additional paper, such as an asSignment or formal drawrng, must
`ave its own certificate of mailing or transmiSSion.
`Cenifieate of Mailing or Transmission
`that this Feefi) Transmittal is being deposited with the United
`i hereb ccrtif
`ervice with su icient postage for first class mail in an envelope
`States ostal
`addressed to the Mail Sto
`ISSUE FEE address above, or bein
`facsrmile
`transmitted to the USPTO ( 71) 273-2885, on the date indicated be ow.
`
`_
`
`APPLICATION NO.
`
`FILING DATE
`
`FIRST NAMED INVENTOR
`
`ATTORNEY DOCKET NO.
`
`CONFIRMATION NO.
`
`Yasuhiro Omura
`1 1/04/2005
`1 ”266,288
`TITLE OF INVENTION: PROIECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
`
`125842
`
`8973
`
`
`
`
`(Signature)
`
`
`
`
`APPLN. TYPE
`
`nonprovisional
`
`SMALL ENTITY
`NO
`
`HASHMI, ZIA R
`
`ISSUE FEE DUE
`
`PUBLICATION FEE DUE
`
`PREV. PAID ISSUE FEE
`
`TOTAL FEE(S) DUE
`
`$1440
`
`2881
`
`$300
`
`$0
`
`$1740
`
`250492200
`
`DATE DUE
`
`01/29/2008
`
`1. Chan e of correspondence address or indication of "Fee Address" (37
`CFR I. 63).
`Cl Chan e of corres ondenee address (or Change of Correspondence
`Address orm PTO/ B/ 122) attached.
`
`D "Fee Address" indication (or "Fee Address" Indication form
`PTO/SB/47; Rev 03-02 or more recent) attached. Use of a Customer
`Number is required.
`
`2. For printing on the patent front page, list
`(I) the names of up to 3 registered patent attorneys
`or agents OR, alternatively,
`(2) the name of a single firm (having as a member a
`registered attorney or agent) and the names of up to
`2_ regiistered patent attorneys or agents. If no name is
`liste , no name Will be printed.
`
`]
`
`2
`
`3
`
`
`
`3. ASSIGNEE NAME AND RESIDENCE DATA TO BE PRINTED ON THE PATENT (print or type)
`If an assigncc is identified below, the document has been filed for
`PLEASE NOTE: Unless an assigncc iS identified below, no assignoe-data will appear on the patent.
`rceordation as set forth in 37 CF 3.1]. Completion of this form is NOT a substitute for filing an assignment.
`(A) NAME OF ASSIGNEE
`(B) RESIDENCE: (CITY and STATE 0R COUNTRY)
`
`Please check the appropriate assignce category or categories (will not be printed on the patent) : D Individual D Corporation or other private group entity Cl Government
`
`413. Payment of Fee(s): (Please first reapply any previously paid issue fee shown above)
`4a. The following fcc(s) are submitted:
`E] A check is enclosed.
`0
`CI Issue Fee
`E] Payment by credit card. Form PTO-2038 is attached.
`Ci Publication Fee (No small entity discount permitted)
`-
`D Advance Order - # ofCopies
`E] The Director is hereby authorized to charge the required feeEs), any deficiency, or credit any
`
`‘ enclose an extra copy of this form). overpayment, to Deposrt Account Number
`
`5. Change in Entity Status (from status indicated above)
`
`D a. Applicant claims SMALL ENTITY status. See 37 CFR 1.27.
`CI b. Applicant is no longer claiming SMALL ENTITY status. See 37 CFR l.27(g)(2).
`NOTE: The Issue Fee and Publication Fee (if required) will not be accepted from anyone other than the applicant; a registered attorney or agent; or the assignee or other party in
`
`interest as shown by the records of the Unith States Patent and Trademark Office.
`
`Authorized Signaturc
`
`Date
`
`
`
`Typed or printed name Registration No.
`
`This collection of information is required by 37 CFR 1.311. The information is re uired to obtain or retain a benefit b2 the public which is to file (and by the USPTO to process)
`an application. Confidentialityis governed by 35 U.S.C. 122_and 37 CFR 1.14. T ‘is collection is estimated to take 1 minutes to complete, including gathering, preparing, and
`submitting the completed application form to the USPTO. Time Will varg' de ending upon the individual case. Any comments on the amount of time you require to com lete
`this form and/or Suggestions for reducmg this burden, should be sent to t e C ief In omiation Officer, US. Patent and Trademark Office, US. Department of Commerce,
`.0.
`Box 1450, Alexan na, Vir inia 22313-1450. DO NOT SEND FEES OR COMPLETED FORMS TO THIS ADDRESS. SEND TO: Commissioner for Patents, PO Box 1450,
`Alexandria, Virginia 2231 -l450.
`Under the Paperwork Reduction Act of 1995, no persons are required to respond to a collection of information unless it displays a valid OMB control number.
`
`PTOL»8S (Rev. 08/07) Approved for use through 08/31/2010.
`
`OMB 0651—0033
`
`US. Patent and Trademark Office; US. DEPARTMENT OF COMMERCE
`
`__4__
`
`-- 4 --
`
`

`

`
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`
`.
`UNITED STATES DEPARTMENT OF COMMERCE
`United States Patent and Trademark Office
`Address: COMMISSIONER FOR PATENTS
`PO. Box 1450
`Alexandria, Virginia 22313-1450
`www.uspto,gov
`
`11/266,288
`
`1 1/04/2005
`
`Yasuhiro Omura
`
`125842
`
`8973
`
`OLIFF & BERRIDGE, PLC
`w-Boxszosso
`
`ALEXANDRIA, VA 22320-4850
`
`HASHMI’ZIA R
`
`2881
`DATE MAILED: 10/29/2007
`
`Determination of Patent Term Adjustment under 35 U.S.C. 154 (b)
`(application filed on or after May 29, 2000)
`
`The Patent Term Adjustment to date is 298 day(s). If the issue fee is paid on the date that is three months after the
`mailing date of this notice and the patent issues on the Tuesday before the date that is 28 weeks (six and a half
`months) after the mailing date of this notice, the Patent Term Adjustment will be 298 day(s).
`
`If a Continued Prosecution Application (CPA) was filed in the above-identified application, the filing date that
`determines Patent Term Adjustment is the filing date of the most recent CPA.
`
`Applicant will be able to obtain more detailed information by accessing the Patent Application Information Retrieval
`(PAIR) WEB site (http://pair.uspto.gov).
`
`Any questions regarding the Patent Term Extension or Adjustment determination should be directed to the Office of
`Patent Legal Administration at (571)-2—72-7702. Questions relating to issue and publication fee payments should be
`directed to the Customer Service Center of the Office of Patent Publication at
`1--(-888)-786-0101
`or
`(571)-272-4200.
`
`PTOL—85 (Rev. 08/07) Approved for use through 08/31/2010.
`
`-- 5 --
`
`

`

`Application No.
`
`~
`
`11/266,288
`Examiner
`
`’
`
`Zia R. Hashmi
`
`Applicant(s)
`
`OMURA. YASUHIRO
`Art Unit
`
`2881
`
`
`
`
`
`
`
`
`-- The MAILING DA TE of this communication appears on the cover sheet with'the correspondence address--
`All claims being allowable, PROSECUTION ON THE MERITS IS (OR REMAINS) CLOSED in this application.
`If not included
`herewith (or previously mailed), a Notice of Allowance (PTOL-85) or other appropriate communication will be mailed in due course. THIS
`NOTICE OF ALLOWABILITY IS NOT A GRANT OF PATENT RIGHTS. This application is subject to withdrawal from issue at the initiative
`of the Office or upon petition by the applicant. See 37 CFR 1.313 and MPEP 1308.
`
`1. ® This communication is responsiVe to 11/4/2005.
`
`2.
`
`The allowed claim(s) is/are 1-83.
`
`
`
`
`Notice of Allowability
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`3. X Acknowledgment is made of a claim for foreign priority under 35 U.S.C. § 119(a)-(d) or (f).
`a) X All
`b) D’Some*
`c) E] None
`ofthe:
`1. IZI Certified copies of the priority documents have been received.
`2. DtCertified copies of the priority documents have been received in Application No. _
`3. El Copies of the certified copies of the priority documents have been received in this national stage application from the
`International Bureau (PCT Rule 17.2(a)).
`
`" Certified copies not received:
`
`Applicant has THREE MONTHS FROM THE “MAILING DATE” of this communication to file a reply complying with the requirements
`noted below. Failure to timely comply will result in ABANDONMENT of this application.
`THIS THREE-MONTH PERIOD IS NOT EXTENDABLE.
`
`4. El A SUBSTITUTE OATH OR DECLARATION must be submitted. Note the attached EXAMINER'S AMENDMENT or NOTICE OF
`INFORMAL PATENT APPLICATION (PTO-152) which gives reason(s) why the oath or declaration is deficient.
`
`5. I] CORRECTED DRAWINGS ( as “replacement sheets”) must be submitted.
`”(a) E] including changes required by the Notice of Draftsperson‘s Patent Drawing Review ( PTO-948) attached
`1) [:1 hereto or 2) D to Paper No./Mai| Date _.
`
`(b) D including changes required by the attached Examiner’s Amendment / Comment or in the Office action of
`Paper No./Mail Date _.
`Identifying indicia such as the application number (see 37 CFR 1.84(c)) should be written on the drawings in the front (not the back) of
`each sheet. Replacement sheet(s) should be labeled as such in the header according to 37 CFR 1.121(d).
`
`6. [:I DEPOSIT OF and/0r INFORMATION about the deposit of BIOLOGICAL MATERIAL must be submitted. Note the
`attached Examiner's comment regarding REQUIREMENT FOR THE DEPOSIT OF BIOLOGICAL MATERIAL.
`
`Attachment(s)
`1. E Notice of References Cited (PTO-892)
`
`2. [:I Notice of Draftperson's Patent Drawing Review (PTO-948)
`.
`'
`3. X Information Disclosure Statements (PTO/$8108),
`Paper No./Mai| Date 2/7/2006an W572”; “0 \
`4. I] Examiner's Comment Regarding Requirement for Deposit
`of Biological Material
`’
`
`
`
`.
`5. III Notice of Informal Patent Application
`
`6. I] Interview Summary (PTO-413),
`Paper No./Mai| Date
`.
`7. El Examiner's Amendment/Comment
`
`8. IE Examiner's Statement of Reasons for Allowance
`
`9. 1:] Other
`
`.
`
`.
`
`Mama
`
`PM!!! Examiner
`
`US. Patent and Trademark Office
`PTOL-37 (Rev. 08-06)
`
`.
`
`Notice of Allowability
`
`-
`
`Part of Paper No./Mai| Date 20070815
`
`--6--
`
`-- 6 --
`
`

`

`Application/Control Number: 11/266,288
`Art Unit: 2881
`
`'
`
`’
`
`Page 2
`
`DETAILED ACTION
`
`Allowable Subject Matter
`
`1.
`
`2.
`
`3.
`
`Claims 1-83 are allowed.
`
`The following is an examiner’s statement of reasons for the allowance:
`
`With respect to independent claims 1, 34, 41, 55, and 68, prior art fails to
`
`disclose or make obvious, in combination with other recited features of the claims’
`
`limitations, a relatively compact high resolution catadioptric projection optical system,
`
`exposure apparatus, and exposure method suitable for production of semiconductor
`
`devices by photolithography. The system is designed for forming a reduced image of a
`
`first surface on a second surface corrected for various aberrations, such as chromatic
`
`aberration and curvature of field, and being capable of securing a large effective image-l
`
`side numerical aperture while suitably suppressing reflection loss on optical surfaces.
`
`The projection optical system comprises at least two reflecting mirrors and a boundary
`
`lens whose surface on the first-surface side has a positive refracting power, and an
`
`optical path between the boundary lens and the second surface is filled with a medium
`
`having a refractive index larger than 1.1. Every transmitting member and every
`
`reflecting member with a refracting power forming the projection optical system are
`
`' arranged along a single optical axis and the projection optical system has an effective
`
`imaging area of a predetermined shape not including the optical axis.
`
`Claims 2-33, 35-40, 42-54, 56-67, and 69-83 are allowed by virtue of their
`
`dependencies on independent claims 1, 34, 41, 55, and 68.
`
`-- 7 --
`
`

`

`Application/Control Number: 11/266,288
`Art Unit: 2881
`
`Page 3
`
`Conclusion.
`
`4.
`
`Shafer et al. disclose (US 2005/0190435 A1) a catadioptric projection objective for
`
`imaging a pattern.
`
`5.
`
`Any comments considered necessary by applicant. must be submitted no later
`
`than the payment of the issue fee and, to avoid processing delays, should preferably
`
`accompany the issue fee. Such submissions should be clearly labeled “Comments-of
`
`Statement of Reasons for Allowance”.
`
`6.
`
`Information regarding the status of an application may be obtained from the
`
`Patent Application Information Retrieval (PAIR) system. Status information for published
`
`applications may be obtained from either Private PAIR or Public PAIR. Status
`
`information for unpublished applications is available through Private PAIR only. For
`
`more information about the PAIR system, see http://pair-direct.usptogov. Should you
`
`have questions on access to the Private PAIR system, contact Electronic Business
`
`Center (EBC) at 866-217-9197 (toll-free).
`
`7.
`
`Any inquiry concerning this communication or earlier communications from the
`
`examiner should be directed to Zia Hashmi whose telephone number is (571) 272-2473.
`
`(The examiner can normally be reached between 8.30 AM- 5 PM. If attempts to reach
`
`the examiner by telephone are unsuccessful, the examiner’s supervisor, Robert Kim can
`
`be reached on (571) 272-2293.
`
`%WBarman
`
`Zia Hashmi
`
`Primary Examiner
`
`October 16, 2007.
`
`-- 8 --
`
`

`

`
`
`A'ITY DOCKET NO.
`APPLICATION NO.
`
`Form PTO-I449
`.
`:34."
`US Dept. ofConuneme
`
`
`
`l25842
`l ”266,288
`"ATENTfi TRADEMARK OFFICE
`(REV. l/06)
`"
`'
`.2 m»; A
`
`
`
`
` INFORMATION DISCLOSURE STATEMENT
`
`
`(Use several sheen ifnecessary)
`APPLICANT
`
`
`
`
`Yasuhin) OM URA
`
`
`FILING DATE
`
`
`November 4, 2005
`
`
`
`
`U.S. PATENT DOCUMENTS
`
`Examiner
`Cite
`2p
`Initials
`
`GROUP
`288l
`‘
`
`Date
`
`Name
`
`/Z.H./
`
`\IVILu
`
`4,346, l 64
`
`US 6.600,608 Bl
`
`US 6.63|.036 82
`
`US 6,636,350 82
`
`US 6,873,476 B2
`
`US 2003/0l97922 Al
`
`US 2002/0024741 Al
`
`US 6,829,099 I32
`
`US 2004/0 I 30806 Al
`
`US 6,473,243 Bl
`
`US 2005/00362l 3 Al
`
`08/24/l 982
`
`07/29/2003
`
`10/07/2003
`
`10/2l/2003
`
`03/29/2005
`
`l0/23/2003
`
`02/28/2002
`
`l2/07/2004
`
`07/08/2004
`
`l0/29/2002
`
`, 02/17/2005
`
`TA BARELLI et al.
`
`SHAFER et al.
`
`SCHUSTER
`
`SHAFER et'al.
`
`SHAFER
`
`HUDYMA
`
`TERASAWA et al.
`
`KATO ct al.
`
`TAKAHASHI
`
`OMURA
`
`MANN et all
`
`/Z.H./
`
`US 2004/0240047 Al
`
`
`
`
`
`SHAFER et al,
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` SWITKES cl al; "Resolution Enhancement of l57-nm Lithography by Liquid Immersion"; Massachusetts Institute ofTechnology;
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`WO 2005/0I 53 l 6 A2
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`W0 2005/0I 53 I 6 A3
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`Sharer et al.
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`WO 2005/098505 Al
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`Application/Control No.
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`Applicant(s)/Patent Under
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`OMURA, YASUHiRO
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