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`UNITED STATES PATENT AND TRADEMARK OFFICE
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`__________
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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`CARL ZEISS SMT GMBH
`Petitioner
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`v.
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`NIKON CORPORATION
`Patent Owner
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`__________
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`Case IPR2013-00363
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`Patent 7,348,575
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`__________
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`NOTICE REGARDING FILING OF SUBSTITUTE EXHIBIT 2002
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`Mail Stop "PATENT BOARD"
`Patent Trial and Appeal Board
`U.S. Patent and Trademark Office
`P.O. Box 1450
`Alexandria, VA 22313-1450
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`Notice Regarding Filing of Substitute Exhibit 2002
`IPR2013-00363
`Patent 7,348,575
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`In accordance with the conference call with the Board of March 13, 2014,
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`and the March 13, 2014 Order, Patent Owner files Substitute Exhibit 2002 for the
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`sole purpose of correcting the function for the second unit in the chart on page 18
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`of the Expert Declaration of Dr. Jose Sasian (Exhibit 2002). No other changes
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`were made and a redline comparing the original Exhibit 2002 with the substitute
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`Exhibit 2002 was served upon Petitioner.
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`Dated: March 14, 2014
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`Respectfully submitted,
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`/John S. Kern/
`John S. Kern (Reg. No. 42,719)
`Attorney for Patent Owner
` Nikon Corporation
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`Notice Regarding Filing of Substitute Exhibit 2002
`IPR2013-00363
`Patent 7,348,575
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`CERTIFICATE OF SERVICE
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`The undersigned certifies that a copy of the foregoing NOTICE
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`REGARDING FILING OF SUBSTITUTE EXHIBIT 2002, along with
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`SUBSTITUTE EXHIBIT 2002 was served via email (IPR24984-0056IP2@fr.com)
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`on March 14, 2014, in its entirety, to the following:
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`Marc M. Wefers
`Chris C. Bowley
`Lawrence K. Kolodney
`Kurt L. Glitzenstein
`Fish & Richardson P.C.
`3200 RBC Plaza, 60 South Sixth St.
`Minneapolis, MN 55402
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`/John S. Kern/
`John S. Kern (Reg. No. 42,719)
`Attorney for Patent Owner
` Nikon Corporation
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