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UNITED STATES PATENT AND TRADEMARK OFFICE
`________________________
`
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`________________________
`
`
`CARL ZEISS SMT GMBH
`
`Petitioner,
`
`v.
`
`NIKON CORPORATION
`
`Patent Owner.
`____________
`
`
`Case IPR2013-00362
`
`Patent 7,348,575
`____________
`
`
`PATENT OWNER’S UPDATED EXHIBIT LIST
`
`
`
`
`Mail Stop "PATENT BOARD"
`Patent Trial and Appeal Board
`U.S. Patent and Trademark Office
`P.O. Box 1450
`Alexandria, VA 22313-1450
`
`
`
`

`

`NIKON CORPORATION
`Patent Owner’s Updated Exhibit List
`Case IPR2013-00362
`Patent 7,348,575
`
`
`Description
`Equation from the 2/12/14 Juergens Deposition
`Moore, “Cramming More Components onto Integrated Circuits,”
`PROCEEDINGS OF THE IEEE, VOL. 86, NO. 1, JANUARY 1998
`(reprinted from Gordon E. Moore, “Cramming More Components
`onto Integrated Circuits,” Electronics, pp. 114–117, April 19, 1965)
`International Technology Roadmap for Semiconductors, 2003 Edition,
`Lithography
`U.S. Patent No. 5,488,229
`Feldmann et al., “Catadioptric Projection Lenses for Immersion
`Lithography,” Proc. of SPIE Vol. 5962, 59620Y, 2005.
`Ohmura et al., “Catadioptric lens development for DUV and VUV
`projection optics,” Optical Microlithography XVI, Anthony Yen,
`editor, Proceedings of SPIE Vol. 5040, June 25, 2003.
`U.S. Patent No. 4,812,028
`U.S. Patent No. 4,747,678
`U.S. Patent No. 5,668,673
`U.S. Patent No. 5,808,805
`U.S. Patent No. 5,691,802
`U.S. Patent No. 5,861,997
`U.S. Patent No. 5,815,310
`U.S. Patent No. 7,079,314
`U.S. Patent No. 6,636,350
`WO2001/59502
`U.S. Patent No. 7,301,605
`U.S. Patent No. 7,030,965
`U.S. Patent Publication No. US2003/197922A
`U.S. Patent No. 7,385,756
`Deposition Transcript of Richard C. Juergens dated February 12, 2014
`for IPR2013-00362
`Deposition Transcript of Richard C. Juergens dated February 13, 2014
`for IPR2013-00363
`U.S. Patent No. 5,788,229
`Expert Declaration of Dr. Jose M. Sasian
`Curriculum Vitae of Dr. Jose M. Sasian
`Certified Translation of WO2001/59502 (Ex. 2016)
`
`2
`
`Exhibit
`2001
`2002
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`2003
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`2004
`2005
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`2006
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`2007
`2008
`2009
`2010
`2011
`2012
`2013
`2014
`2015
`2016
`2017
`2018
`2019
`2020
`2021
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`2022
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`2023
`2024
`2025
`2026
`
`

`

`NIKON CORPORATION
`Patent Owner’s Updated Exhibit List
`Case IPR2013-00362
`Patent 7,348,575
`
`
`U.S. Patent No. 4,293,186
`U.S. Patent No. 5,298,939
`Article entitled “CODE V 9.8 delivers improved optical system
`modeling and optimization,” obtained at
`http://www.ledsmagazine.com/ugc/2007/09/code-v-9-8-delivers-
`improved-... on June 20, 2014
`Article entitled “Code V 10.1. Optical Design Software – Synopsys,
`Inc., Optical Solutions Group,” obtained at
`http://www.photonics.com/Product.aspx?PRID=38981 on June 20,
`2014
`Article entitled “Optical Research Associates’ CODE V 10.2 Delivers
`– Designed to Enhance Ease of Use,” obtained at
`http://www.deskeng.com/de/optical-research-associates-code-v-10-2-
`deliver... on June 20, 2014
`Article entitled “Synopsys’ CODE V Enhances Aspheric Lens System
`Design,” obtained at
`http://in.reuters.com/article/2011/03/15/idUS149326+15-Mar-
`2011+PRN20... on June 20, 2014
`Article entitled “Synopsys CODE V Version 10.4 Optical Design and
`Analysis Software,” obtained at http://edablog.com/2011/09/29/ora/
`on June 20, 2014
`Article entitled “Synopsys Releases Version 10.5 of CODE V Optical
`Design Software,” obtained at
`http://edablog.com/tag/ora/?d96a349c52fc4f68eea46a47ccb3d360 on
`June 20, 2014
`Article entitled “Code V 10.6 – Synopsys Optical Solutions,” obtained
`at http://optics.synopsys.com/codev/codev-whatsnew.html on June 20,
`2014
`Plots of Terasawa Example 2 in Table 2, Fig. 5
`Plots of Lens Design in Exhibit 1042
`Plots of Lens Design in Exhibit 1047
`Plots of Lens Design in Exhibit 1049
`Deposition Transcript of Richard C. Juergens dated July 2, 2014 for
`IPR2013-00362
`
`3
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`2027
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`2035
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`2036
`2037
`2038
`2039
`2040
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`
`
`

`

`NIKON CORPORATION
`Patent Owner’s Updated Exhibit List
`Case IPR2013-00362
`Patent 7,348,575
`
`
`CERTIFICATE OF SERVICE
`
`
`
`The undersigned certifies that a copy of the foregoing Patent Owner’s
`
`Updated Exhibit List was served by electronic mail (IPR24984-0056IP1@fr.com)
`
`on July 9, 2014, in its entirety, to the following:
`
`Marc M. Wefers
`Chris C. Bowley
`Lawrence K. Kolodney
`Kurt L. Glitzenstein
`Fish & Richardson P.C.
`3200 RBC Plaza, 60 South Sixth St.
`Minneapolis, MN 55402
`
`Respectfully Submitted,
`
`
`/John S. Kern/
`John S. Kern, Reg. No. 42,719
`
`
`
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`

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