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`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 1
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`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 2
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`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 3
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`Analysis of Exhibit 1047
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`1) Analysis performed with Zemax 13 Release 2 SP1 Professional.
`2) The lens prescription as input in Zemax is given below.
`3) NAO = 0.255
`4) Ray aiming to the aperture stop was used.
`5) RMS wavefront error was generated with the settings:
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`6) Distortion plot was generated with the settings:
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`7) Foot print diagram analysis was produced with fields 40 mm, 52.5 mm, and 62.5
`mm, and for cross sections at -45, -30, 0, 30, and 45 degrees in azimuth and at the
`plane of the second mirror.
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`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 4
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`SURFACE DATA SUMMARY:
`
`Surf Type Radius Thickness Glass Diameter Conic
`Comment
` OBJ STANDARD Infinity 77.71728 130 0
` 1 EVENASPH -156.8994 22.82591 1.560000, 0.000000 166.1415 0
` 2 EVENASPH -129.5284 15 166.4718 0
` 3 EVENASPH Infinity 134.2715 150 0
` 4 EVENASPH -114.6819 18 1.560000, 0.000000 130.3683 0
` 5 EVENASPH -502.8081 37.80548 149.0368 0
` 6 EVENASPH -190.6268 -37.80548 MIRROR 166.0333 0
` 7 STANDARD Infinity 0 140.1094 0
` 8 EVENASPH -502.8081 -18 1.560000, 0.000000 133.7796 0
` 9 EVENASPH -114.6819 -134.2715 108.4014 0
` 10 EVENASPH Infinity 134.2715 MIRROR 150 0
` 11 EVENASPH -114.6819 18 174.5503 0
` 12 EVENASPH -502.8081 37.80548 194.3468 0
` 13 EVENASPH -190.6268 12 209.2644 0
` 14 EVENASPH 866.815 45 1.560000, 0.000000 258.6567 0
` 15 EVENASPH -311.9878 1 260.9245 0
` 16 EVENASPH 168.8606 60.02651 1.560000, 0.000000 288.0668 0
` 17 EVENASPH -872.2497 120.149 287.607 0
` 18 EVENASPH 190.0465 18 1.560000, 0.000000 197.7989 0
` 19 EVENASPH 123.0113 325.385 171.2636 0
` STO STANDARD Infinity 1 186.5019 0
` 21 EVENASPH 194.5141 30.95637 1.560000, 0.000000 197.5057 0
` 22 EVENASPH -651.1728 1 197.4844 0
` 23 EVENASPH 136.0577 38.34687 1.560000, 0.000000 198.0717 0
` 24 EVENASPH 893.5049 19.80467 197.3614 0
` 25 EVENASPH 5707.356 44.93247 1.560000, 0.000000 198.0623 0
` 26 EVENASPH -179.5748 1 195.1913 0
` 27 EVENASPH 70.61113 76.61678 1.560000, 0.000000 115.4912 0
` 28 EVENASPH Infinity 0.05 1.370000, 0.000000 33.46615 0
` IMA STANDARD Infinity 1.370000, 0.000000 33.34479 0
`
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`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 5
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`SURFACE DATA DETAIL:
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`Surface OBJ STANDARD
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`Surface 1 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 3.3559679e-007
`Coefficient on r^ 6 : 2.9022156e-011
`Coefficient on r^ 8 : -3.9008194e-015
`Coefficient on r^10 : -3.5263424e-019
`Coefficient on r^12 : 2.6054464e-023
`Coefficient on r^14 : 3.3192287e-027
`Coefficient on r^16 : -1.952828e-031
`
`Surface 2 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 3 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 4 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 1.1294987e-008
`Coefficient on r^ 6 : -4.0761219e-012
`Coefficient on r^ 8 : -2.0318584e-015
`Coefficient on r^10 : 6.8808646e-019
`Coefficient on r^12 : -2.985658e-022
`Coefficient on r^14 : 5.6372595e-026
`Coefficient on r^16 : -4.5877375e-030
`
`Surface 5 EVENASPH
`Coefficient on r^ 2 : 0
`
`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 6
`
`
`
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 6 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : -2.7256934e-009
`Coefficient on r^ 6 : -6.0709659e-013
`Coefficient on r^ 8 : -5.87697e-017
`Coefficient on r^10 : 2.5086512e-021
`Coefficient on r^12 : -1.154549e-024
`Coefficient on r^14 : 1.4825221e-028
`Coefficient on r^16 : -7.871988e-033
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`Surface 7 STANDARD
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`Surface 8 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 9 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 1.1294987e-008
`Coefficient on r^ 6 : -4.0761219e-012
`Coefficient on r^ 8 : -2.0318584e-015
`Coefficient on r^10 : 6.8808646e-019
`Coefficient on r^12 : -2.985658e-022
`Coefficient on r^14 : 5.6372595e-026
`Coefficient on r^16 : -4.5877375e-030
`
`Surface 10 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`
`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 7
`
`
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`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
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`Surface 11 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 12 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 13 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 14 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 15 EVENASPH
`Coefficient on r^ 2 : 0
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`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 8
`
`
`
`Coefficient on r^ 4 : -3.7414408e-008
`Coefficient on r^ 6 : 3.1328897e-012
`Coefficient on r^ 8 : -7.7113845e-017
`Coefficient on r^10 : -2.3575368e-021
`Coefficient on r^12 : -3.715049e-026
`Coefficient on r^14 : 6.5504358e-030
`Coefficient on r^16 : 2.7909129e-034
`
`Surface 16 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : -7.9600645e-008
`Coefficient on r^ 6 : -3.5476583e-013
`Coefficient on r^ 8 : 3.6690135e-018
`Coefficient on r^10 : 1.0530613e-021
`Coefficient on r^12 : 1.74782e-026
`Coefficient on r^14 : -1.1533076e-031
`Coefficient on r^16 : -9.3401943e-035
`
`Surface 17 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 18 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 19 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 2.2431537e-007
`Coefficient on r^ 6 : 1.5523236e-012
`Coefficient on r^ 8 : -3.6686855e-015
`Coefficient on r^10 : 4.6889966e-019
`Coefficient on r^12 : -1.7133862e-023
`Coefficient on r^14 : -7.4465876e-028
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`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 9
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`
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`Coefficient on r^16 : 5.2524228e-032
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`Surface STO STANDARD
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`Surface 21 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 22 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 6.3729782e-008
`Coefficient on r^ 6 : -2.3124105e-012
`Coefficient on r^ 8 : 1.763632e-016
`Coefficient on r^10 : -1.4376722e-020
`Coefficient on r^12 : 1.2533303e-024
`Coefficient on r^14 : -8.2161517e-029
`Coefficient on r^16 : 2.8185418e-033
`
`Surface 23 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
`
`Surface 24 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
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`Surface 25 EVENASPH
`Coefficient on r^ 2 : 0
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`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 10
`
`
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`Coefficient on r^ 4 : -1.5025955e-007
`Coefficient on r^ 6 : -2.0798786e-011
`Coefficient on r^ 8 : 4.8462067e-015
`Coefficient on r^10 : -5.3015812e-019
`Coefficient on r^12 : 3.5170693e-023
`Coefficient on r^14 : -1.3640468e-027
`Coefficient on r^16 : 2.368454e-032
`
`Surface 26 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
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`Surface 27 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 5.2693286e-008
`Coefficient on r^ 6 : 3.6400628e-011
`Coefficient on r^ 8 : 8.7166011e-015
`Coefficient on r^10 : -3.9267777e-018
`Coefficient on r^12 : 2.8267963e-021
`Coefficient on r^14 : -7.8437291e-025
`Coefficient on r^16 : 1.1681424e-028
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`Surface 28 EVENASPH
`Coefficient on r^ 2 : 0
`Coefficient on r^ 4 : 0
`Coefficient on r^ 6 : 0
`Coefficient on r^ 8 : 0
`Coefficient on r^10 : 0
`Coefficient on r^12 : 0
`Coefficient on r^14 : 0
`Coefficient on r^16 : 0
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`Surface IMA STANDARD
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`IPR2013-00362, Carl Zeiss v Nikon
`Nikon Exhibit 2038, pg. 11
`
`
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