`
`U.S. Patent No.: 7,348,575
`Issue Date:
`March 25, 2008
`Appl. Serial No.: 11/266,288
`Filing Date:
`Nov. 4, 2005
`Title:
`PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS,
`AND EXPOSURE METHOD
`
`Attorney Docket No.: 24984-0056IP1
`
`Mail Stop Patent Board
`Patent Trial and Appeal Board
`U.S. Patent and Trademark Office
`
`P.O. Box 1450
`
`Alexandria, VA 22313-1450
`
`PETITIONER’S POWER OF ATTORNEY IN AN INTER PAR TES
`
`REVIEW OF CLAIMS 1-3, 8-12, 16-20, 23-26, and 29-33
`OF U.S. PATENT NO. 7,348,575
`
`Petitioner, Carl Zeiss SMT GmbH, hereby appoints the following
`
`practitioners as its attorneys to transact all business in the U.S. Patent and
`
`Trademark Office associated with the above captioned inter partes review.
`
`Marc M. Wefers, Reg. No. 56,842
`
`Chris C. Bowley, Reg. No. 55,016
`
`and all practitioners associated with PTO Customer Number 26171.
`
`The individuals signing below have the authority to execute this document
`
`on behalf of the Petitioner.
`
`Petitioner Carl Zeiss SMT GmbH
`
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`By;
`Name: ppa'AndreaS Zefler
`Title: Managing Clerk
`Date:
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`Name:
`Title: Authorized Clerk
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