PTO/SB/SO (07-09)
`Approved for use through 07/31/2012. OMB 0651—0031
`US. Patent and Trademark Office; US. DEPARTMENT OF COMMERCE
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`
`
`11/513,160
`Request
`Application Number
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`for
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`.
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`Filing Date
`August 31, 2006
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`h. OMURA
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`I
`Y
`Continued Examination (RCE)
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`
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`
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`First Named nventor
`asu iro
`Transmittal
`
`
`2872
`Address to:
`
`
`
`Mail Stop RCE
`Examiner Name
`L. A. Fineman
`Commissioner for Patents
`
`
`
`PO. Box 1450
`Alexandria, VA 22313-1450
`258882000101
`
`
`
`This is a Request for Continued Examination (RCE) under 37 CFR 1.114 of the above-identified application.
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`Request for Continued Examination (RCE) practice under 37 CFR 1.114 does not apply to any utility or plant application filed prior to June
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`8, 1995, or to any design application, See Instruction Sheet for RCEs (not to be submitted to the USPTO) on page 2.
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`1-
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`Submission required Wider 37 CFR 1114 Note: If the RCE is proper, any previously filed unentered amendments and
`amendments enclosed with the RCE will be entered in the order in which they were filed unless applicant instructs otherwise.
`If
`applicant does not wish to have any previously filed unentered amendment(s) entered, applicant must request non—entry of such
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`a.
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`If a final Office action is outstanding, any amendments filed after the final Office action
`Previously submitted.
`may be considered as a submission even if this box is not checked.
`[:1 Consider the arguments in the Appeal Brief or Reply Brief previously filed on
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`i.
`IAffidavit(s)/Declaration(s)
`ii.
`2, Miscellaneous
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`iii.
`Information Disclosure Statement (IDS)
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`iv. [1 Other
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`a. D Suspension of action on the above—identified application is requested under 37 CFR 1.103(0) for a
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`period of
`months.
`(Period of suspension shall not exceed 3 months; Fee under 37 CFR 1.17(i) required)
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`Overpayments, to Deposit Account No.
`03-1952
`.
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`i. E RCE fee required under 37 CFR 1.17(e)
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`ii. 21 Extension of time fee (37 CFR 1.136 and 117)
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`iii. :1 Other
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`enclosed
`Check in the amount of $
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`
` August 14, 2009
`
`
`Date
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`Registration No.
`
`1
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`ZEISS 1022
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`1
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`ZEISS 1022
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`PTO/SBl22 (07—09)
`Approved for use through 07/31/2012. OMB 0651-0031
`U.S. Patent and Trademark Office; U.S. DEPARTMENT OF COMMERCE
`Under the Paerwork Reduction Act of 1995, no nersons are re-uired to reacond to a collection of information unless ifdis-la s a valid OMB control number.
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`PETITION FOR EXTENSlON OF TIME UNDER 37 CFR1.136(a)
`FY 2009
`(Fees pursuant to the Consolidated Appropriations Act, 2005 (H.R. 4818).)
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`Docket Number (Optional)
`258882000101
`
`Application Number
`
`11/513,160
`
`Filed
`
`August 31, 2006
`
`For
`
`PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS. AND EXPOSURE METHOD
`
`Art Unit
`
`2872
`
`Examiner
`
`L. A. Fineman
`
`This is a request under the provisions of 37 CFR 1.136(a) to extend the period for filing a reply in the above identified
`
`|:| One month (37 CFR 1.17(a)(1))
`|:| Two months (37 CFR 1.17(a)(2))
`|:| Three months (37 CFR 1.17(a)(3))
`|:| Four months (37 CFR 1.17(a)(4))
`Five months (37 CFR 1.17(a)(5))
`
`E
`$130
`$490
`$1110
`$1730
`$2350
`
`Small Entity Fee
`$65
`$245
`$555
`$865
`$1175
`
`:1 Applicant claims small entity status. See 37 CFR 1.27.
`:1 A check in the amount of the fee is enclosed.
`:1 Payment by credit card. Form PTO—2038 is attached.
`Z] The Director has already been authorized to charge fees in this application to a Deposit Account.
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`application. The requested extension and fee are as follows (check time period desired and enter the appropriate fee below):
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`|:] applicant/inventor.
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`I: assignee of record of the entire interest. See 37 CFR 3.71.
`Statement under 37 CFR 3.73(b) is enclosed. (Form PTO/SB/QG).
`
`attorney or agent of record. Registration Number
`
`36,119
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`ney or agent under 3
`'
`tion numberi acting under 37 CFR 1.34
`
`
`Signature
`
`August 14, 2009
`Date
`
`(703) 760-7748
`Peter J. Davis
`Telephone Number
`Typed or printed name
`NOTE: Signatures of all the inventors or assignees of record ofthe entire interest or their representative(s) are required. Submit multiple forms if more
`than one signature is required. see below.
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`D Total of
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`1
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`forms are submitted.
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`1
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`ZEISS 1022
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`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Docket N0.: 258882000101
`
`(PATENT)
`
`In re Patent Application of:
`Yasuhiro OMURA
`
`Application N0.: 11/513,160
`
`Confirmation N0.: 3253
`
`Filed: August 31, 2006
`
`Art Unit: 2872
`
`For: PROJECTION OPTICAL SYSTEM,
`EXPOSURE APPARATUS, AND EXPOSURE
`METHOD
`
`Examiner: Lee A. Fineman
`
`AMENDMENT UNDER 37 CFR 1.111
`
`MS RCE
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313~1450
`
`Dear Madam:
`
`In response to the final Office Action dated July 14, 2008, and the Notice of Appeal dated
`
`January 14, 2009, and prior to action on the Request for Continued Examination filed concurrently .
`
`herewith, applicant respectfully requests consideration of the following claim amendments and
`
`remarks.
`
`Amendments to the Specification begin on page 2.
`
`Amendments to the Claims begin on page 3.
`
`Amendments to the Drawings begin on page 26.
`
`Remarks begin on page 27.
`
`An Appendix including a replacement sheet of Fig. 14, and the Declaration of Dr. Mitch
`
`Ruda is attached after the Remarks.
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`Application No.: 11/513,160
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`Docket No.: 258882000101
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`AMENDMENTS
`
`In the Specification:
`Page 7, line 11, please add the following paragraphs:
`
`An embodiment of a catadioptric projection objective for imaging a pattern provided in an
`
`object plane of the projection objective onto an image plane of the projection objective may include
`
`a first objective part for imaging the pattern provided in the object plane into a first intermediate
`
`image, a second objective part entirely composed of reflecting elements for imaging the first
`
`intermediate image into a second intermediate image, and a third objective part for imaging the
`
`second intermediate image onto the image plane. The first concave mirror has a first continuous
`
`mirror surface and at least one second concave mirror having a second continuous mirror surface is
`
`arranged upstream of the second intermediate image. Pupil surfaces are formed between the object
`
`plane and the first intermediate image, between the first and the second intermediate images and
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`between the second intermediate image and the image plane, and the projection objective is an
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`unobscured system having no pupil obscuration.
`
`In some embodiments, a mirror group defined by the first and the second concave mirrors
`
`facing each other has a mirror group entry and a mirror group exit, the mirror group entry being
`
`positioned geometrically next to an edge of the second concave mirror facing an optical axis of the
`
`catadioptric projection objective and the mirror group exit being positioned geometrically next to an
`
`edge of the first concave mirror facing the optical axis and wherein some of the pupil surfaces of the
`
`projection objective are arranged in a vicinity of the mirror group entry and in a vicinity of the
`
`mirror group exit. In some embodiments, a first intermediate image is located geometrically within
`
`the interrnirror space between the first concave mirror and the second concave mirror. The first
`
`intermediate image and the second intermediate image may be located geometrically within the
`
`intermirror space between the first concave mirror and the second concave mirror.
`
`In some
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`embodiments, the projection objective may be telecentric on both an obj ect end and an image end.
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`Application No.: 11/513,160
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`Docket No.: 258882000101
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`In the Claims:
`
`1. (Currently amended) A catadioptric projection objective for imaging a pattern provided in
`
`an object plane of the projection objective onto an image plane of the projection objective
`
`comprising:
`
`a first objective part for imaging the pattern provided in the object plane into a first
`
`intermediate image;
`
`
`a second objective part entirely composed of reflecting elements for imaging the first
`
`intermediate image into a second intermediate image;
`
`a third objective part for imaging the second intermediate image onto the image plane;
`
`wherein a first concave mirror having a first continuous mirror surface and at least one
`
`second concave mirror having a second continuous mirror surface are arranged upstream of the
`
`second intermediate image;
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`pupil surfaces are formed between the object plane and the first intermediate image, between
`
`the first and the second intermediate images and between the second intermediate image and the
`
`image plane; and
`
`
`
`wherein the projection objective is an unobscured system having no pupil obscuration.
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`2, (Canceled).
`
`3. (Withdrawn) Projection objective according to claim 1, wherein there are exactly two
`
`concave mirrors and exactly two intermediate images.
`
`4. (Withdrawn) Projection objective according to claim 1, wherein the first objective part is
`
`a dioptric imaging system;
`
`the second objective part includes the first and the second concave mirrors, the concave
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`mirror surfaces of the concave mirrors facing each other and defining an intermirror space;
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`wherein at least the first intermediate image is located geometrically within the intermirror
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`space between the first concave mirror and the second concave mirror.
`
`5. (Withdrawn) Projection objective according to claim 4, wherein both the first intermediate
`
`image and the second intermediate image are located geometrically within the interrnirror space
`
`between the first concave mirror and the second concave mirror.
`
`6. (Original) Projection objective according to claim 1, wherein the first objective part and
`
`the second objective part and the third objective part share a common straight optical axis.
`
`7. (Withdrawn) Projection objective according to claim 1, wherein curvature surfaces of the
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`first concave mirror and the second concave mirror have a common axis of rotational symmetry
`
`defining a catadioptric or catoptric part of the optical axis which is inclined at an angle to an'object
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`side part and an image side part of the optical axis.
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`8. (Previously Presented) Projection objective according to claim 1, wherein at least one
`
`mirror surface of the concave mirrors is aspheric.
`
`9. (Withdrawn) Projection objective according to claim 1, wherein the first objective part is
`
`a catadioptric objective part including a single first concave mirror and the second objective part is a
`
`catadioptric objective part including a single second concave mirror.
`
`10. (Previously Presented) Projection objective according to claim 1, wherein a mirror group
`
`defined by the first and the second concave mirrors facing each other has a mirror group entry and a
`
`mirror group exit, the mirror group entry being positioned geometrically next to an edge of the
`
`second concave mirror facing an optical axis of the catadioptric projection objective and the mirror
`
`group exit being positioned geometrically next to an edge of the first concave mirror facing the
`
`optical axis and wherein some of the pupil surfaces of the projection objective are arranged in a
`
`vicinity of the mirror group entry and in a vicinity of the mirror group exit.
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`11. (Withdrawn) Projection objective according to claim 1, wherein it is designed such that
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`radiation reflected from the first concave mirror crosses the optical axis prior to impinging on the
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`second concave mirror.
`
`12. (Withdrawn) Projection objective according to claim 1, wherein the first objective part is
`
`purely refractive, the second objective part is catoptric or catadioptric, and the third objective part is
`
`purely refractive.
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`13. (Withdrawn) Projection objective according to claim 1, wherein the projection objective
`
`includes no convex mirror.
`
`14. (Currently amended) A catadioptric projection objective for imaging a pattern provided
`
`in an object plane of the projection objective onto an image plane of the projection objective
`
`comprising:
`
`a first objective part for imaging the pattern provided in the object plane into a first
`
`intermediate image;
`
`a second objective part entirely composed of reflecting elements for imaging the first
`
`intermediate image into a second intermediate image;
`
`a third objective part for imaging the second intermediate image onto the image plane;
`
`wherein the second objective part includes a first concave mirror having a first mirror
`
`surface and a second concave mirror having a second mirror surface, the concave mirror surfaces of
`
`the concave mirrors facing each other and defining an intermirror Space;
`
`wherein at least the first intermediate image is located geometrically within the inteimirror
`
`space between the first concave mirror and the second concave mirror, and
`
`wherein the projection objectiVe is an unobscured system having no pupil obscuration.
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`15. (Withdrawn) Projection objective according to claim 14. wherein there are exactly two
`
`concave mirrors and exactly two intermediate images.
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`Docket No.: 258882000101
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`16. (Previously Presented) Projection objective according to claim 14, wherein the first and
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`second mirror surfaces are unbroken having no holes.
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`17. (Canceled).
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`18. (Original) Projection objective according to claim 14, wherein both the first intermediate
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`image and the second intermediate image are located geometrically within the intermirror space
`
`between the first concave mirror and the second concave mirror.
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`19. (Withdrawn) Projection objective according to claim 14, wherein the first intermediate
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`image and the second intermediate image are located geometrically in a middle region centered
`
`around a midpoint between the two concave mirrors within the intermirror space between the first
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`concave mirror and the second concave mirror, wherein the middle region extends in a space having
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`an axial extension § 90% of an axial distance between the verticcs of the curvatures of the first and
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`second concave mirror.
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`20. (Withdrawn) Projection objective according to claim 14, wherein dis a distance on the
`
`optical axis between the two concave mirrors, d1 is a distance on the optical axis between the first
`
`intermediate image and the first concave mirror and d2 is a distance on the optical axis between the
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`second concave mirror and the second intermediate image, and the relations: 0.5 d/2<d1<l .5 d/2
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`and 0.5 d/2<d2<1.5 d/2 are satisfied.
`
`21. (Withdrawn) Projection objective according to claim 14, wherein a chief ray of the most
`
`off axial field point intersects the optical axis in the optical paths between the two concave mirrors
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`in the geometrical vicinity of the location of the first intermediate image.
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`22. (Original) Projection objective according to claim 1, wherein the first objective part is
`
`designed as an enlarging imaging system.
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`23. (Withdrawn) Projection objective according to claim 1, wherein the first objective part is
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`designed as an enlarging imaging system having a magnification Bl in the range l<] B1l<2-5-
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`Docket N0.: 258882000101
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`24. (Withdrawn) Projection objective according to claim 1, wherein the second objective
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`part is designed as near unit magnification optical system.
`25. (Withdrawn) Projection objective according to claim 24, wherein the second objective
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`part is designed as a system having a magnification [32 in the range 0.4<[ [32! <15.
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`26. (Withdrawn) Projection objective according to claim 24, wherein the second objective
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`part is designed as a system having a magnification [32 in the range 0.9<[ [32l <1 . l.
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`27. (Original) Projection objective according to claim 1, wherein the third objective part has
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`a reducing magnification [33, wherein H33I<l.
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`28. (Original) Projection objective according to claim 1, wherein the second intermediate
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`image has a size larger than the image size.
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`29. (Original) Projection objective according to claim 14, wherein the first objective part and
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`the second objective part and the third objective part share a common straight optical axis.
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`30. (Original) Projection objective according to claim 14, wherein curvature surfaces of the
`
`first concave mirror and the second concave mirror have a common axis of rotational symmetry.
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`31. (Withdrawn) Projection objective according to claim 14, wherein a catadioptric or
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`catoptric part of the optical axis defined by the first concave mirror and the second concave mirror
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`is inclined at an angle to an object side part and an image side part of the optical axis.
`
`32. (Withdrawn) Projection objective according to claim 1, wherein at least one of the first
`
`concave mirror and the second concave mirror is designed as a Mangin Mirror.
`
`33. (Previously Presented) Projection objective according to claim 1, wherein at least one of
`
`the first concave mirror and the second concave mirror is designed as a front surface mirror.
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`34. (Withdrawn) Projection objective according to claim 1, wherein at least one of the
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`concave mirrors has an aspheric reflecting surface having an absolute value of curvature which
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`decreases from the optical axis to the edge of the mirror in a radial direction.
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`Docket No.: 258882000101
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`35. (Withdrawn) Projection objective according to claim 14, wherein the projection
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`objective includes no convex mirror.
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`36. (Original) Projection objective according to claim 1, wherein the projection objective
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`includes no planar folding mirror.
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`37. (Withdrawn) Projection objective according to claim 1, wherein a maximum light beam
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`height at the Concave mirrors is less than the 1.5 fold of the maximum light beam height within the
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`third objective part.
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`38. (Withdrawn) Projection objective according to claim 1, wherein the diameter of the
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`concave mirrors is less than 150% of the size of the first and the second intermediate image.
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`39. (Withdrawn) Projection objective according to claim 1, wherein all light beams within
`
`the projection objective are located within a space defined as a cylinder around the optical axis of
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`said third objective part, extending from the object plane to the image plane and having a maximum
`
`radius of the 1.5 fold of a maximum beam height within said third objective part.
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`40. (Withdrawn) Projection objective according to claim 1, wherein a maximum free
`
`diameter is 2.4 fold of a maximum beam height within said third objective part.
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`41. (Withdrawn) Projection objective according to claim 1, wherein between the radius R]
`
`of the first concave mirror and the radius R2 of the second concave mirror the following relation:
`
`0.7<| R1/R2l <1.3 is satisfied.
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`42. (Withdrawn) Projection objective according to claim 1, wherein between the radius R1
`
`of the first concave mirror and the radius R2 of the second concave mirror and the distance d on the
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`optical axis between the two concave mirrors the relation: 0.7<(|R1| +|R2l )/2/d<1.3 is satisfied.
`
`43. (Withdrawn) Projection objective according to claim 1, wherein at least one lens having
`
`a free entry surface and a free exit surface is arranged Within an intermirror space defined between
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`the first and second concave mirror.
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`44. (Withdrawn) Projection objective according to claim 43, wherein the lens is a mirror-
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`related lens arranged such that it is transited twice by the radiation passing to and from the concave
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`mirror.
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`45. (Withdrawn) Projection objective according to claim 44, wherein the mirror—related lens
`
`is a negative lens.
`
`46. (Withdrawn) Projection objective according to claim 44, wherein the mirror—related lens
`
`is a meniscus lens having negative refractive power and a sense of curvature similar to the sense of
`
`curvature of the concave mirror to which it is assigned.
`
`47. (Withdrawn) Projection objective according to claim 44, wherein the mirror—related lens
`
`is designed as a truncated lens being arranged mostly on the side of the optical axis where the
`
`associated concave mirror is situated.
`
`48. (Withdrawn) Projection objective according to claim 1, wherein there is at least one lens
`
`arranged within an intermirror space defined between the first and second concave mirror, wherein
`
`the lens is transited three times by a light beam between the object plane and the image plane.
`
`49. Withdrawn) Projection objective according to claim 1, wherein the first concave mirror
`
`and the second concave mirror are designed to have essentially the same or exactly the same
`
`curvature surfaces.
`
`50. (Withdrawn) Projection objective according to claim 1, wherein the first concave mirror
`
`and the second concave mirror are manufactured such that firstly a mirror blank for the first and
`
`second concave mirror is manufactured to obtain a desired concave shape of a mirror surface and
`
`that, afterwards, the mirror blank is separated into two truncated mirror used as the first and second
`
`concave mirror.
`
`51. (Withdrawn) Projection objective according to claim 1, wherein the second objective
`
`part includes a first catadioptric sub—group consisting of the first concave mirror and a first mirror—
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`Application No.2 11/513,160
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`Docket No.: 2588820001 01
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`related lens and a second catadioptric sub—group consisting of the second concave mirror and a
`
`second mirror—related lens, wherein the catadioptric sub-groups are designed essentially identically.
`
`52. (Previously Presented) Projection objective according to claim 14, wherein at least one
`
`mirror surface of the concave mirrors is aspheric.
`
`53. (Previously Presented) Projection objective according to claim 1, wherein concave
`
`surfaces of the first and second concave mirrors are aspheric.
`
`54. (Withdrawn) Projection objective according to claim 1, wherein there is at least one lens
`
`arranged within an intermirror space defined between the first and second concave mirror between
`
`an intermediate image and an associated concave mirror optically near the intermediate image,
`
`where at least one surface of the lens is aspheric.
`
`55. (Withdrawn) Projection objective according to claim 54, wherein the aspheric surface of
`
`the lens is the surface facing the intermediate image.
`
`56. (Withdrawn) Projection objective according to claim 1, wherein the first concave mirror
`
`has a curvature cl(in [mm'l]) and the second concave mirror has a curvature cz(in [mm'1]) and D (in
`
`[mm]) is a maximum diameter of a lens element of the third objective part and wherein the
`
`following condition is fulfilled:
`
`1<D/(|¢1|+| czl )10‘4<6.
`
`57. (Withdrawn) Projection objective according to claim 52, wherein at least one concave
`
`mirror fulfills the condition: p>0.22R where p=R—(R2—D2/4)0'5, wherein R is the curvature radius and
`
`D is the diameter of the aspherical mirror surface.
`58. (Withdrawn) Projection objective according to claim 57, wherein the condition D>l .3R
`
`is fulfilled.
`
`59. (Withdrawn) Projection objective according to claim 1, wherein the projection objective
`
`is designed such that the first intermediate image is located geometrically within an intermirror
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`Docket No.: 258882000101
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`space defined between the first and second concave mirror and the second intermediate image is
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`arranged outside the intermirror space.
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`60. (Withdrawn) Projection objective according to claim 14, wherein the first objective part
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`is a catadioptric objective part including the first concave mirror and the second objective part is a
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`catadioptric objective part including the second concave mirror.
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`61. (Withdrawn) Projection objective according to claim 14, wherein a mirror group defined
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`by the first and the second concaVe mirror facing each other has a mirror group entry and a mirror
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`group exit, the mirror group entry being positioned geometrically next to an edge of the second
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`concave mirror facing the optical axis and the mirror group exit being positioned geometrically next
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`to an edge of the first concave mirror facing the optical axis and wherein pupil surfaces of the
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`projection objective are arranged in a vicinity of the mirror group entry and in a vicinity of the
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`mirror group exit.
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`62. (Currently amended) Projection objective according to claim 14, the projection objective
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`is designed such that radiation reflected from the first concave mirror crosses the a;optical axis
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`prior to impinging on the second concave mirror.
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`63. (Previously Presented) Projection objective according to claim 1, wherein the first and
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`second concave mirrors are disposed on the same side of an optical axis of the catadioptric
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`projection objective.
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`64. (Previously Presented) Projection objective according to claim 1, wherein the first
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`concave mirror and at least part of the second concave mirror are positioned at opposite sides of an
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`optical axis of the catadioptric projection objective.
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`65. (Withdrawn) Projection objective according to claim 1, wherein at least one lens is
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`arranged outside an intermirror space defined between the first and second concave mirror between
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`a mirror group defined by the first and second concave mirror and the second intermediate image.
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`Application No.: 11/513,160
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`Docket No.: 258882000101
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`66. (Withdrawn) Projection objective according to claim 1, wherein the projection objective
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`includes at least one biaspherical lens having an aspheric entrance surface and an aspheric exit
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`surface.
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`67. (Withdrawn) Projection objective according to claim 66, wherein the third objective part
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`has a pupil surface and wherein the biaspherical lens is arranged between the pupil surface and the
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`image plane.
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`68. (Withdrawn) Projection objective according to claim 1, wherein the first objectiVe part
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`includes at least one lens having a concave surface facing the image plane.
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`69. (Withdrawn) Projection objective according to claim 68, wherein the lens having a
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`concave surface facing the image plane is a meniscus lens arranged between the object plane and a
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`pupil surface of the first objective pan.
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`70. (Withdrawn) Projection objective according to claim 1, wherein the first objective part
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`includes a pupil surface and a first lens group arranged between the object plane and the pupil
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`surface, wherein the first lens group includes in that sequence a positive lens, a negative lens and a
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`positive lens, wherein the negative lens has a concave surface facing the image.
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`71. (Withdrawn) Projection objective according to claim 1, wherein a maximum diameter of
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`optical elements of the second objective part is smaller or equal to a maximum diameter of lenses of
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`the third objective part.
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`72. (Withdrawn) Projection objective according to claim 1, wherein the third objective part
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`includes a pupil surface and negative refractive power arranged between the second intermediate
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`image and the pupil surface such that a shallow waist is defined in the beam path, wherein no
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`negative lens is arranged between the waist and the image plane.
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`73. (Withdrawn) Projection objective according to claim 1, wherein the third objective part
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`includes no more than two negative lenses.
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`Docket No: 258882000101
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`74. (Previously Presented) Projection objective according to claim 1, wherein the projection
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`objective has an image side numerical aperture NA>0.9.
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`75. (Original) Projection objective according to claim 1, wherein the projection objective is
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`designed as an immersion objective adapted with reference to aberrations such that an image side
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`working distance between a last optical element and the image plane is filled up with an immersion
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`medium with a refractive index substantially greater than 1.
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`76. (Previously Presented) Projection objective according to claim 1, wherein the projection
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`objective has an image side numerical aperture NA>1.l when used in connection with an immersion
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`medium.
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`77. (Previously Presented) Projection objective according to claim 1, wherein the projection
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`objective is telecentric on both an object end and an image end.
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`78. (Withdrawn) Projection objective according to claim 1, that has an essentially
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`homocentric entrance pupil.
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`79. (Withdrawn) Projection objective according to claim 1, wherein an aperture stop is
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`provided in the first objective part.
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`80. (Withdrawn) Projection objective according to claim 1, wherein an aperture stop is
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`provided in the second objective part.
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`81. (Original) Projection objective according to claim 1, wherein an aperture stop is
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`provided in the third objective part.
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`82. (Previously Presented) Projection objective according to claim 1, wherein the projection
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`objective is configured for use with ultraviolet light falling within a wavelength range extending
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`from about 120 nm to about 260 nm,
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`83. (Canceled).
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`Application No.: 11/513,160
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`Docket No.: 258882000101
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`84. (Currently amended) A catadioptric projection objective for imaging a pattern provided
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`in an obj ect plane of the projection objective onto an image plane of the projection objective
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`comprising:
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`a first objective part for imaging the pattern provided in the object plane into a first
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`intermediate image;
`
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`a second objective part entirely composed of reflecting elements for imaging the first
`
`intermediate image into a second intermediate image;
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`a third objective part for imaging the second intermediate image onto the image plane;
`
`wherein the second objective part includes a first concave mirror having a first mirror
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`surface and a second concave mirror having a second mirror surface, the concave mirror surfaces of
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`the first and second concave mirrors facing each other and defining an intermirror space; agd
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`wherein the first objective part is designed as an enlarging imaging system.
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`85. (Withdrawn) Projection objective according to claim 84, wherein first objective part is
`
`refractive, the second objective part is catadioptric or catoptric, and the third objective part is
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`refractive.
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`86—90. (Canceled).
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`91. (Currently amended) A catadioptric projection objective for imaging a pattern provided
`
`in an object plane of the projection objective onto an image plane projection objective comprising:
`
`a first objective part for imaging the pattern provided in the object plane into a first
`
`intermediate image;
`
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`a second objective part entirely composed of reflecting elements for imaging the first
`
`intermediate image into a second intermediate image;
`
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`a third objective part for imaging the second intermediate image onto the image plane; and
`
`wherein the first objective part is a catadioptriceseateptrieobjective part including a single
`
`first concave mirror, the second objective part is a eatadiepticieescatoptric objective part including
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`Application No.2 11/513,160
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`Docket No.: 258882000101
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`a single second concave mirror, and the third objective part contacts an immersion liquid to image
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`the second intermediate image through the immersion liquid onto the image plane.
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`92. (Original) Projection objective according to claim 91, wherein the third objective part is
`
`purely refractive.
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`93. (Withdrawn) Projection objective according to claim 1, wherein the first concave mirror
`
`has a first aspheric mirror surface and the second con