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`(54)Title:
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`PROJECTION EXPOSURE METHOD AND SYSTEM
`
`(54)%B)§ 03%?/'1?
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`1’>“z‘%6§§E7‘a“‘(i~&I)*%E
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`(57) Abstract
`A projection exposure method capable of keeping a liquid (7) filled between a projection optical system (PL) and a wafer (W) even
`while the wafer (W) is being moved when a liquid immersion method is used to conduct an exposure, wherein a discharge nozzle (Zla) and
`inflow nozzles (2321, 23b) are disposed So as to hold a lens (4) at the tip end of the projection optical System (PL) in an X direction. When the
`wafer (W) is moved in a -X direction by an XY stage (10), a liquid (7) controlled to a preset temperature is Supplied from a liquid Supply
`device (5) via a supply pipe (21) and the discharge nozzle (2la) so as to fill the portion between the lens (4) and the surface of the wafer (W)
`and the liquid (7) is recovered from the Surface of the wafer (W) by a liquid supply device (6) via a recovery pipe (23) and the inflow nozzles
`(23a, 23b), the supply amount and recovery amount of the liquid (7) being regulated according to a moving Speed of the wafer (W).
`
`--
`
`1
`
`--
`
`ZEISS 1012
`
`-- 1 --
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`-- 4 --
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`

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`WO 99/49504
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`-- 5 --
`
`

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`WO 99/49504
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`-- 6 --
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`

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`WO 99/49504
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`PCT/JP99/01262
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`-- 7 --
`
`

`
`WO 99/49504
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`PCT/JP99/01262
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`-- 8 --
`
`

`
`W0 99/49504
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`PCT/JP99/01262
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`kK.$%%K;é%2®?N4X®flfifi&m\$%%®%2®&
`
`-- 9 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
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`_1Q_
`
`-- 10 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
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`__ 11 __
`
`-- 11 --
`
`

`
`WO 99/49504
`
`PCT/JP99l() I 262
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`W
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`_12_
`
`-- 12 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`11
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`__ 13 __
`
`-- 13 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`12
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`__ 14 __
`
`-- 14 --
`
`

`
`W0 99/49504
`
`PCT/JP99/01262
`
`13
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`__ 15 __
`
`-- 15 --
`
`

`
`W0 99/49504
`
`PCT/JP99/01262
`
`14
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`__ 15 __
`
`-- 16 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`W
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`%éT&oT%.v:AW&vy24@%%%4A&®@&mm7K;
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`W7m\%W25B®fifi(—Xfifi>Kfih.fik/2»23a,2
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`_17_
`
`-- 17 --
`
`

`
`W0 99/49504
`
`PCT/JP99/0l262
`
`M
`
`BbuibfifléméoV>f4&WIAW&®EKfiE?éW%7®
`
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`
`%5,&UW¢@W§E6%Efi?EEET@D\:®H4Kfim?é
`
`_18_
`
`-- 18 --
`
`

`
`WO 99/49504
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`PCT/JP99/01262
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`H
`
`%fiKW*fi%EHbTfi?E5K3mT‘E%%$%PLA®%%3
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`
`2a~22c&%K/fw24a,24b&%EELTmé°#m/X
`
`_19_
`
`-- 19 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`18
`
`»21a~21c¢mA/2»24a,24b&mYfi@u§§mmw
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`15
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`32Awfimtawfzfiw/X»TW%7®fi%XmEW&fi5;5
`
`__ 20 __
`
`-- 20 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`W
`
`KLT%imoEE\:®%%Km.+XfiW\Xfi—XfiW®EB%
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`é%%Kfi,Yfifitfifléhtfifi/Xw27a.fififik/KHZ
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`9a,29bEE%LTW¢7®%%&UEWEfih.Et\9IAE
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`
`fiFVVXFKflLT?%a%®(WKfit§—%%)EE%?%:&
`
`-- 21 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`7b%T%E>o
`
`it\%¢7aLTm.m#mK£fiT‘wBfi%%nfi¢éEfi$
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`’C‘b"ili§§L:§1l:L/’C%;\ %m:iE?tLT
`
`__ 22 __
`
`-- 22 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`21
`
`m¢Efi?fim%flmL\&%%%%&@:A&®%tm¢EmtLT
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`£<Z&fiT%éoEt.X?v7-7>F-Z$v>fifi®fi%%%
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`
`__ 23 __
`
`-- 23 --
`
`

`
`W0 99/49504
`
`PCT/JP99/01262
`
`22
`
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`
`__ 24 __
`
`-- 24 --
`
`

`
`' WO 99/49504
`
`PCT/JP99/01262
`
`23
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`
`__ 25 __
`
`-- 25 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`24
`
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`WE§WEWifiWK%DT@fl§fié%K‘W%%%%$%®%%
`
`%fim®%#$¥®%fi%&fiE%fi®§@&®@Efitii5K‘W
`
`E%W®$fifiWKmoTW%®fi¢éfi?:&é%@&?é&%fi%
`
`fi&o
`
`2.%%E—AT727E%%L.WEv20®N5—yé&%%$%
`
`10
`
`EfiLT%WtK%E?é&%%%%EK3mT‘
`
`fiE%m&%%bT%fléfi5%WX?~§&\fiE&%%$%®fi
`
`%%mw®%#$¥®%%%&%E%W®%E&wfiéfikfii5K.
`
`mfimwflfiéfibffififimtmoTfiiwfiwéfififémwmfi
`
`fifii‘fififififl®E%&%K%%WEfifiK%E%%E—A®%%
`
`15
`
`%fi%&U;5KmfiémtfifimwfifiéfibfmfifimwifimE
`
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`
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`
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`
`Ea
`
`3.%fi®fi@2E§®fi%§%§ET%3T‘
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`
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`
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`
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`
`%LTfi%Efi5%E%%flTED\%%WEfifiM%§fi%%®%E
`
`__ 25 __
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`-- 26 --
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`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`25
`
`%1‘)>i0D$é'?7'5F5I'C‘Ei5?;:&%&4%°?a”fiZ&?”E>§‘£z“%2;§§‘fi%§é%o
`
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`
`‘I§fiI§’EJ3fiE7:7F5]CZE§'§_En7iF'FTJlZ\
`
`‘FJ‘fi§B1$®‘0)#§?fiE:‘)%3J0)EB’%s=‘.‘£2Z)3%3Fmffi
`
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`
`1 ii Xbifibsbiiifiibfz 2 $<fi‘0){i§7fi’E?}% 0)EE¢§.
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`
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`
`fiE%fiX?w§®%@fi§KmDTWEW¢®#%§\&U@W§
`
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`
`7.%fi®fiE2~6®Wh#—Efifi®&%fi%%%T%oT.
`
`10
`
`fifi§E%1‘}5Z0)i’%E¢:f#&?f*»’?-??—_< 3’LE>fiILJE°E?1?*zf2ISbiFfi%0)'?1%£'%L:§}fi%E‘_‘>3’L7‘:%@7J<\
`
`X@7v$%$%fiWWT%é:&E%@&?%fi%§%%Eo
`
`8.%%E~AEVZ7K%%?5%%%&‘WE7X7®N5—>®
`
`@E%W:Kfi§?é&%%$%&.WE§WEfi%bT%%éfié%
`
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`
`15
`
`%m®§@&®%E%t?;5K.mfimmmfiéfibfmfifimmw
`
`oTW%®W¢E&%?éWW%%%E&‘W%#%%®M%&%K%
`
`%WifimKfiEfi%E~A®%%fifiERUi5tfifiémtfimfl
`
`®E%€fiLTfi%§fi®§Efl6%EW¢%EW?6WWEW%E&
`
`€Wfi@mE%%TmA:fié:&&%w&?é&%%%%E®@fifi
`
`E0
`
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`
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`
`%%mEWi£WK%aT%fléfié%K.fi%&%%%%®fiE%W
`
`m®%$$¥®%%%&fi%§fi®%fit®%Efit?;5K‘%E§
`
`W®%%fifiK%oTW%®@WEfi?:&E%&&?é?N4X®fl
`
`__ 27 __
`
`-- 27 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`26
`
`fififio
`
`10.§%E~AT7X7E%%L\&%%#%EfiLTWE%%E~
`
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`
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`
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`
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`
`mfifimmfifififiéfififimwfiflfimmfi1flfi&.fiflfififi
`
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`
`W&fifiW®&%m%E®%EEflT®i%é&Eé;5K%EW¢E
`
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`
`12.%fi®fi%10%fi®&%§%f%T%oT\
`
`%EEW®%flfifiK&E%aTfiUW%K%EWWEfi?:&€%
`
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`
`13.%fi®fi%12%fl®&%fi%fi&T%aT.
`
`%%%Wm2?w7-7>F-UE~bfiflXm2%v7-7>F-
`
`ZikyfififififiéflxfiE§fi®X?vE>7ffiKfiE%3T%
`
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`
`14.%fi®%@12Xu13Efi®&%fi%fi&T@oT.
`
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`
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`
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`
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`
`15.%fi®fi%1O~l4®Whfl~fiEfi®fi%%%fi&T&9T\
`
`%E§W®%flE§KWDT%%W¢®%§E%¥?é:&E%@&
`
`?é%%§%fiEo
`
`__ 28 __
`
`-- 28 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`27
`
`16.%fi®fi@10~l5®Wh#—E%fi®&%§%fi&€%wT\
`
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`
`€U:&E%@&?é?N4X®§fif&°
`
`17.fi%E—AT7XOE%%L.&%%$%EfiLT%%§%E—
`
`ATEWLKfi§?5&%%%%EK£mT\
`
`fiE&%%$%&W%%fit®@Efit?i5KW¢Efi?&&%K\
`
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`
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`
`10
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`
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`
`flfiE%W®%flfiW&fififiT%ét%mWE@%§EmT®k%é
`
`&m6;5ufiEfi¢Efi?:&&%&&?é&%%%%E°
`
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`
`15
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`
`2 O. §§fl?0)§’é% 1 7 ~1 9 0)f?T>h73\#IE§E$JZ0)E'z“%é'Efi‘(’:§éE’G353’C.
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`3'é7x7”‘~“/“ - ~‘/7\?L\7a”:EL:1fi7l.
`
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`
`fifi§E%$Ji0)
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`
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`
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`
`WEE%%$%&fiEEW&®fiK#%éfltW%€EW?éW¢E
`
`W%EEEKfii%:&E%@&?é&%%%%Eo
`
`22.%i®fi%21%fi®&%fi%%ET%oT.
`
`__ 29 __
`
`-- 29 --
`
`

`
`WO 99/49504
`
`PCT/JP99/01262
`
`28
`
`fifi%E?T5‘z{4§{%#7fié?%3éE0D{i*&ffif3* D c‘:’I?fi§E?T5”z{2l§ E1lZ§é%0) [E11151 El &LiF‘1I‘JE‘Eé??‘fi
`
`1:°-L\0)!3.%?§U‘fiEifiJZ%3‘3’%/u'(“EE:Eé7J’L>:> Z: &E5F#?$J(cE79”E>T§,%3:E'§fi‘é§éEo
`
`10
`
`15
`
`__ 30 __
`
`-- 30 --
`
`

`
`
`
`WO 99/49504WO 99/49504
`
`PCT/JP99/01262
`PCT/JP99/01262
`
`1/4
`1/4
`
`-- 31 --
`
`

`
`
`
`WO 99/49504WO 99/49504
`
`
`
`PCT/JP99/01262PCT/JP99/01262
`
`
`
`2/42/4
`
`
`
`__ 32 ____ 32 __
`
`-- 32 --
`
`

`
`
`
`WO 99/49504WO 99/49504
`
`
`
`PCT/JP99/01262PCT/JP99/01262
`
`
`
`3/43/4
`
`-- 33 --
`
`

`
`WO 99/49504
`WO 99/49504
`
`PCT/JP99/01262
`PCT/JP99/01262
`
`
`
`4/44/4
`
`
`
`I""""""'IIII""""""'III
`
`
`
`XIXI
`
`
`
`l\J LO Q)l\J LO Q)
`
`
`
`|\Jl\)04KOU‘,3?§|\Jl\)()4KOUQ?Q
`
`
`
`__ 34 ____ 34 __
`
`-- 34 --
`
`

`
`INTERNATIONAL SEARCH REPORT
`
`International application No.
`PCT/JP99/01262
`
`A. CLASSIFICATION or SUBJECT MATTER
`Int.c1‘
`I-I01L21/027, G03F7/20
`
`According to International Patent C