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UNITED STATES PATENT AND TRADEMARK OFFICE
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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`
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`
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`
`
`CARL ZEISS SMT GMBH
`Petitioner
`
`v.
`
`NIKON CORPORATION
`Patent Owner
`
`
`
`
`
`
`
`
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`
`
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`
`
`Case IPR2013-00362
`Patent 7,348,575
`
`
`
`
`
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`
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`JOINT STIPULATION TO MODIFY DUE DATES 4-6 IN SCHEDULING
`
`ORDER
`
`

`
`ZEISS 1001
`
`ZEISS 1002
`
`ZEISS 1003
`
`ZEISS 1004
`
`ZEISS 1005
`
`ZEISS 1006
`
`ZEISS 1007
`
`ZEISS 1008
`
`ZEISS 1009
`
`ZEISS 1010
`
`ZEISS 1011
`
`ZEISS 1012
`
`ZEISS 1013
`
`Case IPR2013-00362
`Attorney Docket No: 24984-0056IP1
`
`EXHIBITS
`
`U.S. Patent No. 7,348,575 (“the Omura Patent”)
`
`U.S. Patent No. 7,309,870 (“the Omura ’870 Patent”)
`
`Judgment, Paper No. 49, Interference No. 105, 678
`(“the ’678 Judgment”)
`
`Judgment, Paper No. 157, Interference No. 105, 749
`(“the ’749 Judgment”)
`
`Judgment, Paper No. 41, Interference No. 105, 753
`(“the ’753 Judgment”)
`
`Judgment, Paper No. 291, Interference No. 105, 834
`(“the ’834 Judgment”)
`
`PCT Patent Publication WO 02/035273 (“Takahashi
`PCT”)
`
`US Patent Application Publication No. US
`2002/0024741 A1 (“Terasawa”)
`
`US Patent No. 5,825,043 (“Suwa”)
`
`M. Switkes and M. Rothschild, “Resolution
`Enhancement of 157 nm Lithography by Liquid
`Immersion,” Proc. SPIE Vol. 4691, pp. 460-465
`(2002) (“Switkes”)
`
`Willi Ulrich et al., “The Development of Dioptric
`Projection Lenses for DUV Lithography,” Proc.
`SPIE Vol. 4832, pp. 158-169 (2002) (“Ulrich”)
`
`PCT Patent Publication WO 99/49504 (“Fukami JP”)
`
`Satori Asai et al., “Resolution Limit for Optical
`Lithography Using Polarized Light Illumination,”
`
`ii
`
`

`
`ZEISS 1014
`
`ZEISS 1015
`
`ZEISS 1016
`
`ZEISS 1017
`
`ZEISS 1018
`
`ZEISS 1019
`
`ZEISS 1020
`
`ZEISS 1021
`
`ZEISS 1022
`
`ZEISS 1023
`
`ZEISS 1024
`
`Case IPR2013-00362
`Attorney Docket No: 24984-0056IP1
`Jpn. J. Appl. Phys. Vol. 32, pp. 5863-5866 (1993)
`(“Asai”)
`
`European Patent Application Publication No. EP 1
`336 887 A1 (“Takahashi”)
`
`Certified English translation of PCT Patent
`Publication WO 99/49504 (“Fukami”)
`
`Expert Declaration of Richard C. Juergens
`
`Wikipedia, “Optical Power,”
`https://en.wikipedia.org/wiki/Optical_power
`(downloaded May 20, 2013)
`
`Willi Ulrich et al., “Trends in Optical Design of
`Projection Lenses for UV- and EUV-Lithography,”
`Proc. SPIE Vol. 4146, pp. 13-24 (2000) (“Ulrich
`2000”)
`Eugene Hecht, Optics (4th ed.), Addison Wesley
`(2002), pp. 171-173.
`
`Wikipedia, “Optical Axis,”
`https://en.wikipedia.org/wiki/Optical_axis
`(downloaded May 20, 2013)
`
`File History Excerpts from U.S. Serial No.
`11/266,288 (“the Omura Application”)
`
`File History Excerpts from U.S. Serial No.
`11/513,160 (“the Omura Continuation Application”)
`
`Decision, Paper No. 40, Interference No. 105,753
`(the “753 Decision”)
`
`Wikipedia, “Refractive Index,”
`http://en.wikipedia.org/wiki/Refractive_index
`(downloaded May 20, 2013)
`
`iii
`
`

`
`ZEISS 1025
`
`ZEISS 1026
`
`ZEISS 1027
`
`ZEISS 1028
`
`ZEISS 1029
`
`ZEISS 1030
`
`ZEISS 1031
`
`ZEISS 1032
`
`ZEISS 1033
`
`Case IPR2013-00362
`Attorney Docket No: 24984-0056IP1
`U.S. Patent No. 4,346,164 (“Tabarelli”)
`
`Omura Reply 1, Paper No. 200, Interference No.
`105,834
`
`European Patent Application Publication No. EP 1
`069 448 B1 (“Suenaga”)
`
`Curriculum Vitae of Richard C. Juergens
`
`CODE V sequence data
`
`US Patent Publication 2013/0329283
`
`(cited as exhibit 1030 during May 7, 2014 cross-
`examination of Dr. Sasian)
`
`US Patent No. 5,650,877
`
`(cited as exhibit 1031 during May 7, 2014 cross-
`examination of Dr. Sasian)
`
`United States Court of Appeals for the Federal
`Circuit decision in GE Lighting Solutions, LLC v.
`Agilent, Inc., Appeal No. 2013-1267 (May 1, 2014)
`
`Cross-examination Transcript of Dr. Sasian for
`IPR2013-00362 on May 7, 2014
`
`ZEISS 1034
`
`U.S. Patent No. 7,450,300 (“Arriola Patent”)
`
`ZEISS 1035
`
`File History for U.S. Provisional Patent Application
`60/431,370 (“Arriola Provisional”)
`
`ZEISS 1036
`
`May 25, 2014 Declaration of Mr. Richard Juergens
`
`ZEISS 1037
`
`Cross-examination Transcript of Dr. Sasian for
`IPR2013-00363 on May 8, 2014
`
`iv
`
`

`
`Case IPR2013-00362
`Attorney Docket No: 24984-0056IP1
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Code V Sequence cited in ZEISS 1036
`
`Email Permission from the Board to Modify Due
`Dates 4-6
`
`ZEISS 1038
`
`ZEISS 1039
`
`ZEISS 1040
`
`ZEISS 1041
`
`ZEISS 1042
`
`ZEISS 1043
`
`ZEISS 1044
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`ZEISS 1045
`
`ZEISS 1046
`
`ZEISS 1047
`
`ZEISS 1048
`
`ZEISS 1049
`
`ZEISS 1050
`
` 
`
`v
`
`

`
`Case IPR2013-00362
`Attorney Docket No: 24984-0056IP1
`
`
`
`Carl Zeiss SMT GmbH ("Petitioner") and Nikon Corporation ("Patent
`
`Owner"), by and through their respective counsel of record, hereby stipulate as
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`follows:
`
`On December 16, 2013, the Scheduling Order in the Inter Partes Review of
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`U.S. Patent No. 7,348,575 (IPR2013-00362) set forth "due dates for the parties to
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`take action in this trial." (Paper No. 10.) The Board modified those due dates in
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`its Order dated January 13, 2014. (Paper No. 15.) The parties have since modified
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`Due Dates 2 and 3 by joint stipulation on January 16, 2014 and March 24, 2014.
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`(Paper Nos. 16 and 20.)
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`In accordance with the permission of the Board transmitted via email on
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`June 5, 2014, a printout of which is attached hereto as Exhibit ZEISS 1050, the
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`Petitioner, with authorization from Patent Owner, hereby stipulates to further
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`modify DUE DATE 4-6 as follows:
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`
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`DUE DATE 4:
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`July 9, 2014
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`DUE DATE 5:
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`July 14, 2014
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`DUE DATE 6:
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`July 16, 2014.
`
`1
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`

`
`Case IPR2013-00362
`Attorney Docket No: 24984-0056IP1
`This stipulation does not affect or otherwise modify the date for DUE DATE
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`7.
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`
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`Respectfully submitted,
`
`
` /Marc M. Wefers Reg. No. 56,842/
`Marc M. Wefers, Reg. No. 56,842
`For Petitioner, Carl Zeiss SMT GmbH
`
`2
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`
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`Date: June 11, 2014
`
`
`Customer Number 26171
`Fish & Richardson P.C.
`Telephone: (617) 527-7857
`
`

`
`Case IPR2013-00362
`Attorney Docket No: 24984-0056IP1
`
`
`
`CERTIFICATE OF SERVICE
`
`Pursuant to 37 CFR §§ 42.6(e)(4) and 42.105(b), the undersigned certifies
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`that on June 11, 2014, a complete and entire copy of this Joint Stipulation to
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`Modify Due Dates 4-6 in Scheduling Order was provided via email to the Patent
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`Owner by serving the correspondence email addresses of record as follows:
`
`John S. Kern
`Robert C. Mattson
`OBLON SPIVAK
`1940 Duke Street
`Alexandria, VA 22314
`
`Email: CPdocketKern@oblon.com
`Email: CPdocketMattson@oblon.com
`
`
`
`
`
`
`
`/Edward G. Faeth/
`Edward G. Faeth
`Fish & Richardson P.C.
`60 South Sixth Street, Suite 3200
`Minneapolis, MN 55402
`(202) 626-6420
`
`
`
`3

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