`TITLE 'US7075726'
`NAO 0.2
`NFO 11
`FFO -0.0005
`IFO 0.0001
`TEL
`DIM M
`WL 157.0
`REF 1
`WTW 1
`INI ' '
`XOB 0.0 0.0
`YOB 40.0 65.0
`WTF 1.0 1.0
`VUX 0.0 0.0
`VLX 0.0 0.0
`VUY 0.0 0.0
`VLY 0.0 0.0
`PRV
` PWL 157.0
` 'CAF2' 1.56
` 'PFPE' 1.37
`END
`SO 0.0 75.685
`S -707.9405694905501 15.0 'CAF2'
` CCY 0; THC 0
` SLB "L1"
` ASP
` K 0.0
` CUF 0.0
` A 0.1947877362029106e-6; B 0.3421864046555009e-10; C&
` -0.3638325878470326e-14; D -0.1230368132647292e-18
` AC 0; BC 0; CC 0; DC 0
` E 0.261068163401904e-23; F 0.3227923874691217e-26; G&
` -0.1465344360166697e-30; H 0.0
` EC 0; FC 0; GC 0
` J 0.0
`S -934.3548387655021 328.484
` CCY 0
`S -182.4435188230468 18.0 'CAF2'
` CCY 0
` SLB "L2_A"
` ASP
` K 0.0
` CUF 0.0
` A 0.205113355680762e-7; B -0.6372956976743152e-12; C&
` -0.3611328800436661e-15; D 0.1169199459597481e-18
` AC 0; BC 0; CC 0; DC 0
` E -0.1842583267925768e-22; F 0.1531284870526213e-26; G&
` -0.4582243703625849e-31; H 0.0
` EC 0; FC 0; GC 0
` J 0.0
` REX 78.1567287; REY 67.6057624
` ADY 21.6159916
`S 4966.826479690809 23.34198577155069
` CCY 0; THC 0
` REX 88.5040518; REY 75.18956655
` ADY 23.89151325
`S -229.7914761391224 -23.34198577155069 REFL
` CCY 0
` SLB "M1"
` ASP
` K 0.0
` CUF 0.0
` A -0.2594782075132461e-9; B -0.2760031339933422e-12; C&
`
`1
`
`ZEISS 1044
`Zeiss v. Nikon
`IPR2013-00362
`
`
`
` -0.5937847911324882e-16; D 0.1081119854499967e-19
` AC 0; BC 0; CC 0; DC 0
` E -0.1105064534884528e-23; F 0.5009989199424767e-28; G&
` -0.748043847485285e-34; H 0.0
` EC 0; FC 0; GC 0
` J 0.0
` REX 89.9267765; REY 78.1503223
` ADY 20.9318648
`S 4966.826479690809 -18.0 'CAF2'
` SLB "L2_B"
`S -182.4435188230468 -313.484
` THC 0
` ASP
` K 0.0
` CUF 0.0
` A 0.205113355680762e-7; B -0.6372956976743152e-12; C&
` -0.3611328800436661e-15; D 0.1169199459597481e-18
` E -0.1842583267925768e-22; F 0.1531284870526213e-26; G&
` -0.4582243703625849e-31; H 0.0
` J 0.0
`S 0.0 313.484 REFL
` SLB "M2"
` REX 43.9023927; REY 46.5546426
` ADY -34.2688677
`S -182.4435188230468 18.0
`S 4966.826479690809 23.34198577155069
`S -229.7914761391224 12.0
` SLB "M1_dummy"
`S 808.0268185496492 29.90496622632914 'CAF2'
` CCY 0; THC 0
` SLB "L3"
`S -847.6130710488849 1.0
` CCY 0
` ASP
` K 0.0
` CUF 0.0
` A 0.102283611162381e-8; B -0.2683264831233414e-12; C&
` -0.8600622683456331e-17; D 0.127556407685886e-20
` AC 0; BC 0; CC 0; DC 0
` E -0.5285840836740767e-25; F -0.5214757120396683e-30; G&
` 0.4190316355745006e-34; H 0.0
` EC 0; FC 0; GC 0
` J 0.0
`S 173.076614105922 61.92937130990598 'CAF2'
` CCY 0; THC 0
` SLB "L4"
` ASP
` K 0.0
` CUF 0.0
` A -0.2545710638022431e-7; B -0.5210557604451827e-12; C&
` -0.3266251881880555e-16; D 0.5460269504197403e-21
` AC 0; BC 0; CC 0; DC 0
` E 0.1689334312926333e-25; F -0.1817698188290168e-30; G&
` -0.5340744986315294e-34; H 0.0
` EC 0; FC 0; GC 0
` J 0.0
`S -4074.056376653614 120.149
` CCY 0
`S 403.5515422405496 18.0 'CAF2'
` CCY 0
` SLB "L5"
`S 221.6027399696829 325.385
` CCY 0
` ASP
` K 0.0
` CUF 0.0
`
`2
`
`
`
` A 0.2439023435662187e-6; B 0.1628729878181906e-10; C&
` 0.5106573063012043e-16; D -0.1692337501646639e-18
` AC 0; BC 0; CC 0; DC 0
` E 0.4167444848187071e-23; F 0.6039358529674224e-27; G&
` -0.5998018375177212e-31; H 0.0
` EC 0; FC 0; GC 0
` J 0.0
`S 0.0 1.0
` STO
`S 223.4556397357079 18.02185665932877 'CAF2'
` CCY 0; THC 0
` SLB "L6"
`S -484.1974973587104 1.0
` CCY 0
` ASP
` K 0.0
` CUF 0.0
` A 0.6188325610008802e-7; B -0.1535836097645004e-11; C&
` 0.1729618321915501e-15; D -0.9383724167448872e-20
` AC 0; BC 0; CC 0; DC 0
` E 0.1687330740237098e-23; F -0.1877190262989012e-27; G&
` 0.1488715372613362e-31; H 0.0
` EC 0; FC 0; GC 0
` J 0.0
`S 131.8113726093519 45.0 'CAF2'
` CCY 0; THC 0
` SLB "L7"
`S 662.0353604129243 16.25532125688592
` CCY 0; THC 0
`S -727.2320043275898 43.79354574999874 'CAF2'
` CCY 0; THC 0
` SLB "L8"
` ASP
` K 0.0
` CUF 0.0
` A -0.1457624596339093e-6; B -0.230076243194303e-10; C&
` 0.5523919322686341e-14; D -0.8128725290144672e-18
` AC 0; BC 0; CC 0; DC 0
` E 0.8424417750842532e-22; F -0.5764476147983804e-26; G&
` 0.1857122262519912e-30; H 0.0
` EC 0; FC 0; GC 0
` J 0.0
`S -144.1080998352116 1.0
` CCY 0
`S 71.5080857604424 81.26555615031187 'CAF2'
` CCY 0; THC 0
` SLB "L9"
` ASP
` K 0.0
` CUF 0.0
` A 0.9515154930130806e-8; B 0.2559497346461505e-10; C&
` -0.7865647050797652e-15; D 0.2224367464149378e-17
` AC 0; BC 0; CC 0; DC 0
` E -0.1043166355261983e-20; F 0.3368266210087538e-24; G&
` -0.4079652971148776e-28; H 0.0
` EC 0; FC 0; GC 0
` J 0.0
`S 0.0 0.05 'PFPE'
`SI 0.0 0.0
`PIK THI S5 Z1 THI S4 Z1 -1.000000
`PIK THI S6 Z1 THI S3 Z1 -1.000000
`PIK PRO S6 S4
`PIK PRO S7 S3
`PIK THI S8 Z1 THI S7 Z1 -1.000000
`PIK THI S9 Z1 THI S3 Z1
`PIK THI S10 Z1 THI S4 Z1
`
`3
`
`
`
`PIK RDY S9 Z1 RDY S3 Z1
`PIK
`RDY S9 Z1 RDY S3 Z1
`PIK RDY S10 Z1 RDY S4 Z1
`PIK
`RDY SlO Z1 RDY S4 Z1
`PIK RDY S11 Z1 RDY S5 Z1
`PIK
`RDY 511 Z1 RDY S5 Z1
`GO
`GO
`
`4
`
`
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