(19) HER-5%??? (J P) mfifififififiw (11) fiflfiififififi§%
`
`*3EHEF9-148321
`
`
`
`(43)”EEEEI EFHEQEFUQQ'?) 6 F] 6 El
`
`(51)Int.Cl.“
`
`WEE EW§E$J3
`
`F I
`
`fimirfigm
`
`G P
`
`K
`
`M C
`
`H0 1 L 21/316
`
`H0 1 L 21/316
`
`21/3205
`
`21/768
`
`21/88
`
`21/90
`
`Efififi kfifi fiifimfiw OL fizsfi)
`
`
`(21) EHE$%
`
`HERE-305680
`
`emmma
`
`$m7$umauama
`
`(71) tflfik 000006013
`
`Sigflfifiéfl
`
`fififi$fimfiflmw:TE2§3%
`
`wmfimfi Em fifi
`
`fififl¥fimfinww:T52$3% 3
`
`iafififiéfiw
`wmfima ma a?
`
`ififl¥fimanww:TE2$3% 3
`
`fifififlfiéfiw
`
`UQREA #fli Em 3m (”3%)
`
`
`
`woifiwmgfll
`
`$fififififiifi%®flfififi
`
`(57) {£87}
`{fifll EfiE319fitfifiéflt7v$%fifly
`U :2wigs/HE1 2 aZCODLO')soGEE1 4 a %%UJEF§J
`
`fifififlfi 1 6 REM? ‘ S O Gfi 1 46:12IJ8E‘<°7 *3 v 7735'
`Wk
`{fim$%1
`7v$%%U&U:7%mfi12LK%
`Lf7v$EfiiéhyUflyfimfil3E%fit%®
`ixfiLTSOGfi14%%&LT\SOGfi14tT
`flt®%%fi%mt%fiéo
`
`1 :Hrwgfi
`Jfimggg
`3}” I:gifgwmt
`
`9
`
`
`
`wnvgfiabng
`13 — .
`9? *1”
`2
`mwmm
`' m¥wgggfi
`mgmfififi
`
`TSBJC1008
`
`IPR 0f U.S. Pat. No. 7,335,996
`
`TSMC1008
`IPR of U.S. Pat. No. 7,335,996
`
`

`

`(2)
`
`EEE9—148321
`
`{ EEEEEEODEI 1
`
`EL7 037WAWEW®EEEEUELELEUXE
`
`{EEEll EEEEEEENEEEEE:®EEE
`
`7E777XEEEEEEE3®IEE\EflELEE
`
`EszEEEEEELTEEEflfLEEEEEEEE
`
`EEEEEEEE4®IEEEEEECEEEEEEE
`
`EEEEEEEEECEELVC EEEEEJEEEEJEE 7 7EEE
`
`EEEéEEflEEEEEflEEEEO
`
`E7UQ7EEEE :m77EEEEU7037EEE
`
`ELELTEEEflfs77EEEEEM7U37EEE
`
`{EEESI EEEEEE
`
`WEE :w77EEEEAU7UZ7EWELL77EE
`
`EEEU7U37E
`
`E‘:®77EEEEEM7U37EEEELELTE
`
`EEEEXE7E777XEEEEEEEEEEEEE
`
`EEEM7U77EEEEELEEEEEEXE7E7
`
`772EE\:sz7E777XEEEEEEflt7
`
`:EEEEEEEEEEE
`
`U37EEEEEEEEEE:EEEEEEEEEEl
`
`{EEEIE2} EEEEEELZEEEEEEEELEE E
`
`Ebz7 7EEEU7UE7EEEEEEEEE1®:E
`
`EEmEEEELO
`
`{EEEQ} 767E777XEEKEEEEE7U
`
`t\:®77EEEU7037fimfii®EfiL77fi
`
`37EEEE\EEXE7E7772EEKELTEE
`
`EEEEM7U77EEEEEEEEE2EIEE :
`
`Ent77EEEEEm7UU7EEEE\:077E
`
`@77EEEEEEm7Ufl7EEEE®EEL7 0:7
`
`EEEEM7UE7EEEEEELTEEEEE77E
`
`MEWEfiwifihiUELELi02t7fi777x
`
`EEU7U37EEEEEEEEEECEEEEEEE
`
`EEEEEEEBQIEE\EEEEEEEEEEEE
`
`EE4®:EEEEEE:EEEEEEEEEEEEw
`
`EEEEO
`
`{EEEBI 77EEEE7UE7EEEE77EE
`
`EEEm7UH7EEEEE EEEEEWTEEEE
`
`EEESEEEEEEELO
`
`{EEElol 267E777XEEEEEEE3®
`
`IE®E\EEXE7E777xEEEEEMEEM
`
`E7777EEEEL\EMTEEE77EEEE7U
`
`37EEEEEELEE\EEEEEEEEEEE4®
`
`EEEECEEEEEEEEEE2EE®EEEEE®
`
`IEEEE:EEEEEEEEEEZEBEEE7QH
`
`EEEEO
`
`EEEEEEEEEEEEmEEEEO
`
`[EEE4] EEEEEECZEEEEEELch E
`
`EK77EEEE7UD7EEEEEEEEE1®::E
`
`[EEmEEEIHEEEE]
`
`{0001}
`
`E\EE77EEEU7UJ7EEEEEL77EEE
`
`mf7E7EI7E77LEEEEE2®IEE Em
`
`{EEEEEEEEEEJ:®EEEEEEEEEE
`
`LEEEEEEEmEEEEE®EEEEQEEfiEE
`
`TEEL~7 U37EAEEE®EEEEUELE i0
`
`EEEwaEEO
`
`xt7fi7772EEEEEEE3mIEE‘EmEi
`
`{0002}
`
`EEEEEEEEEE4®IEEEEEECEEEEE
`
`{EEmfimlEELSI®EEEEEEEE0EEE
`
`EEEEEEEmEEEE
`
`{EEEBI EEEEEE6:EEEEEELch E
`
`Em77EEEE7UJ7EEEEEEEEE1EZE
`
`EEEEméhEE\EEEEKEEEEEEEEEE
`
`
`mTflmEEwiEEEmfifimbiUEEEEmEE
`
`mEEEEEEflEMEOEéufiEmEEEEEmE
`
`EEEE77EEEU7U37EEEEELEA m0
`
`fi§fi7%fiflf%%oflfifihf\1&WZH7U:
`
`ZEEENHGMEEEEEME7727EEEEEE2
`@IEE EMTEEL~7 UJ7EEEEE®EEEi
`
`7EEEEEEEEEEEE(UT‘EEEEE)\2
`
`EEElEKEEEhEEEE\3EEEE2EKEE
`
`UEEEL;OXE7E7772EEEEEEE3®I
`
`EE\EflEEEEEEEEEEEE4®IEEEEE
`
`EfltxE26E7w:;7AEEEEE1®EEE\4
`
`EElmEEEBELEEEnE77EEE@7037
`
`ECEEEEEEEEEEEEEEEEEO
`
`EEE<UTx77EEEEEEEEE) 5E77E
`
`{EEEél EEEEEEtmeEE\:®EEE
`
`EEEWE4LLEEEEEEE+®EEEEETEé
`
`EEEEEEEEELTEEEEEEEEEEEEEE
`
`xE7E7771E<UT SOGEEEE) 6:8
`
`EEEEEELwa EEEEEEEEEEE77EEE
`
`OGESLLEEERE~7 U37EEETEO 76:7
`
`U7U37EEEEth7E77EXEEEEEnE
`
`7EEE7U37EWE4‘SOGE5\EIU7U3
`
`EEEETEoT EE77EEEE7U37EEE
`
`EEEwEEEE®77E7EEEflfEEK7037
`
`7EEE6EEEEEEEEEEEEEE EEK
`
`EEIEJEEEE 7:EJIII EELEEEEEL 95EEEEEEES7
`
`EEEEEEEE\LEEEEfl—E—EEEEEEE
`
`EEEEEHEEEzci7w::7AEgEEEEEE
`
`EEE:EEEEEEEEEEEEQ
`
`EELTmEZmEEEEEEO
`
`{EEETI EEEEEEEEEEEEELEE\E
`
`EE77EEEE7UH7EEEEEEEEE1®:E
`
`{0003}EEmEKEEEflEEEmEEEEEm
`
`EEEEEUTEEE EE EElEEEEEhEE
`
`E\LE7VEEEU7UJVEKEEEK\AFEW
`
`EEZLL 7J7; 6:777: ZWAEODEEEEEEO. 6
`
`MkleylvEVVEfifiE2®IEt\EMT?
`
`mefiEZEfittE\”7—377LTEIQEE
`
`TSB4C1008
`
`IPR 0f U.S. Pat. No. 7,335,996
`
`TSMC1008
`IPR of U.S. Pat. No. 7,335,996
`
`

`

`%%¥9—148321
`
`Eaéfimfiéomn\$fim7vfififimmfi4%\
`
`{0005}
`
`WififfifVCVDEmiOTEOS(?F3I%#
`
`&&37)%3Eflfi2tb\7v$§fiUCfi%fi1
`EEMLT%0.35um®§EtfififiéofiMT\
`
`{3%5H7bi‘fiiifitcl: 5 t $25 31%} fiffiéflfiéfifixfiéficim
`
`i®i5fififléflfbb\Efifififi7m7vfififi
`
`fimm4EmMéthiOfifififimfiwfififiéfi
`
`7v$§fifikfi4i®$fim\Wifiyaj—W(s
`
`fiLfEfiEEEEWfiHEHO\SOGEBEmmé
`
`1(OHM)%EfifimmfibLtfififi5a(flfi
`fif)EXEyj—biti0%0.15um®E§t
`
`EfittfixfifiLTSOGE5éfifiLT%fi%Efi
`
`{biéo
`
`:ttl0ifim%flot%®fi%éo\tfltfifi
`
`8‘7vfifififikfi4¢fiflvij-7vfifié
`
`(UTSi—Fa%f)fififit\fiwfifififififié
`
`Si—Fmi07vfififimmfi4fifififimfitt
`
`{00041égt\soefi5iméfimyvjyfi
`
`0‘%®LE%&§&&SOGE5&®%§%#E<N
`
`W§6E\WZHT§XVCVDEKiOTEOS%£
`
`%®i\7v$fififikfi4tSOGfi5tfififlfi$
`
`Eflfilttf%0.Bumflfigflfifitf\7v$
`
`mififiémo:mtbflTKfififiK\%méflts
`
`fififikfi4\SOGfi5\5lU9Uflyfikfi6®
`
`OGfi5fi7vifififikfi4flgfl%10Lt0\S
`
`EEflgméEfifififi7Efimfiéomm\fifi®$
`
`OGE5E73v711fifi$¢é¥®fififi%oto
`
`bUV7§74fim3iUivfyffimEmmf‘E
`
`[0006]7v$fifimmfi4LESOGfi5®fifi
`
`fifififi7®mimmfimfififl8éfinLtfi\:0
`
`mBaéfifiLtfim\7v$fififiwfi4tfifim5
`
`fififlSéfiwflUfimgfit\flzfi7w3:vA%
`
`atwfififfl:éfimEUT®m$filmfifio
`
`@$EEE%&LE&N7—:V¢Lf%2®mfig9
`
`{0007}
`
`éfimfiéo
`
`Sl—F +H10 ——‘9 Si
`
`{m1}
`—0H + HF‘
`
`-
`
`-
`
`-1‘b'¥i\‘.l
`
`{0008}:®fim\7vfifi€fimfi4fifi®81
`
`{0013]:m%%®%fifi4tfi饧¢%fi®%
`
`*Ffifififi5a¢®m0tifim$filfifififim
`EEZL\SOGfiKflfilO$73v7lléibé
`
`fiéfifltfiofwfio
`
`fifiifix$§W£Wtfififi§éfimtt%\$fim
`
`7v$€fiUVUHVEWEE$E¢6%1mlfitx
`
`Li7v$EfiUyuflymmfifififi7vfifimmf
`
`{0009]:®%%M\uimfitfififi%fifi¢%
`
`W:v%lvfyfflfl%flffi2mlfit\fimffi
`
`fibtfiéflt$®fi%01\7v$§€fimfitso
`
`GfitEfiféfifigfif¥fimmfifififigflmgfi
`
`EmvuflymémfimwfififiimflflfltiDRE
`
`yfiy7§2fi%%fi?%%smlfit\%®%i%fl
`
`
`fififif\flfi$7fiv7®%iwfiméfifimam%
`
`figéfififiéfi4wlfit%fifié%®f%éo
`
`fififiEE%&:t%amt¢éo
`
`{0014]:0%%®%fifi5tfi饧¢%fi®%
`
`{0010}
`
`fifififix¥§¢Emimfifigéfimtfifi\%fim
`
`{fifiéfimfiétw®$%l:mfiwmfiifi1m%
`
`7v$€fiUVUflyfikfiEfiE¢éfilmlfitx
`
`饧¢%pu\fifififififix7v$Efiflaujy
`
`Lfi7v$E%U&037fikfifififi\Ar\mi
`
`fimfitxZ®7v$%%U&UflVfimfiififiLT
`
`%fi§flt7v$§%ifivaflyfimfik‘Cw?
`
`vfiéfiiamyvjymmfiitfitffifiéntx
`
`EyfiyffilfitéfiféfigfifiT%%%®f%
`
`idflwmmfflfl%fimh7?27Mfl%flfifi2m
`Ifit\fiwféfitvvjyméW%mflfififiiU
`
`fiflflmiOXEyfiV7§Xfiéfimfi&%3®IE
`
`ax%®%i§fifi%§%fi¢é%4mlfitéfifié
`
`$0
`
`baf$éo
`
`{0011}:0%%®%$E2K%é$§¢%fim%
`
`{0 0 1 5 } :®%Hfiméfifilfié bdnfiéfiiéfzkéfifili
`
`fifimfi\¥%¢§mtmmfigéfifittfi\éfim
`
`Efififififix7v$§fiflvUflyfikfiiEZEV
`
`7v§§fiflvvflyfikfiEfififiéfilmifit\
`
`17732%fi%fi§flfifigfifiT%of\Lfi7v
`
`:m7vfi%%flyU:yfimfiLm$Em7vfiEfi
`
`fi??fl9UflVfik§M\fiflfifi%fi®7v$fi%
`
`EQMVUflyfikfiEfififiéfi2®lfit\:07
`
`ffiflffifimyvjymmfifififiéfl\Lh$fi£
`
`v$%%i&myv:ymmfiimfifimyUQVWé
`
`fl—f—%Kfififi%fi§flt£®f%%o
`
`Wfifiwfifibiwfimflt;DXEyiyffixfié
`
`fififiéfi3®lfit\%®%LEE%EE%K¢&%
`
`{0016]:wfifiwfififi7m%%¥§¢%fiwfl
`
`fififiu\$§W§WLKE§EE%KLE%\QEE
`
`4mlfiaéfi¢é%®?%éo
`
`7v$€fiU9U3VfikfiEfififéfilmlfitx
`
`{0012}:m%%®%fifi3fi%é$§¢%fimfi
`
`ifi7v$E%U&03ymmfififiK\Arémmfi
`
`fifimm\7vfiEfifiyvflyfimfit7vfiéfii
`
`fivyyzymmfité\fiéfimimffifimm%m
`
`xNvfiiv%V7EE5%2®Ifit\finf$fim
`
`yUEVméWfifiwfifiBiUfiflfifilOXEVfi
`
`fié$®f$éo
`
`y??1fl%%fifé%3®lfit\%®%i§flfi%
`
`TSB4C1008
`
`IPR 0f U.S. Pat. No. 7,335,996
`
`TSMC1008
`IPR of U.S. Pat. No. 7,335,996
`
`

`

`%%¥9—148321
`
`éfimfiéfi4wlfit%fi¢é£mf%éo
`
`{0017}:®%wwfiifi8t%饧wfifiu\
`
`
`fififilB.56MHZ\HWO.76W/Cmfiffi
`
`fifiwwfififi420KHz\HfiO.76W/cm
`
`Efififififi\7vfiéfiwv03yfimfit\:m7
`
`®%#T%0.05Mm®figmfimfié(fl2
`
`V$E%UVUflyfikfiifi7V$E%§QMVU3
`
`(b))0&K\y03yfikfilsiméfitmzfi
`
`Vfikfi%fitffiméfltxfiyfiyffilfit\C
`
`yfi/—wEfifififlmfiflLk90:VKQWfimt
`
`mzfiyfiyffixfiimfifiéhhvuJVEMEt
`
`Lfmfifim14a(flfifif)%XEVJ—bmti
`
`Tfifiéht%®T%éo
`
`{0018}:0%fi®%fifi9fi%§¥§¢%fifi\
`
`1 Bumflgéfliififit‘ Ngéflilfifill {HIE
`0,9150.
`400C?30fififififié:&fii080Gfi14é
`
`zEyfiyffixfiimfifiéfltyujyfimfifi\
`
`fimtfifié¥fimfi&(fl2(c))o
`
`:fixfiyfiyfifixfiitfitffifiént7vfié
`
`{0023}&E\SOGfil4i®$fiE$2®7v
`
`fiifimy03yfimfit\:m7vfiéfiifimyv
`
`fifififlkfi15é\flZH75X70VDEEl0%
`
`:ymkfiimfitffiméht7vfiéfiwvu3y
`
`1®7vfifififim§12%m%tfifififi%o.5M
`
`fimfitffifiéflfi%®f%éo
`
`mflfigt%fit\%1®7vfifififikfil2\VD
`
`{0019}:0fifimfififi10m%5¥§¢%fiw
`
`fififififi\Xfiyfiyffixfiéfififiéfi3®Zfi
`
`®%\LEXEV1V7§XE§EE\M%mHET
`327%EEWL\fimfgfim7vfiéfifly03y
`
`fimfiEfiELt&\Lgmfigéfififiéfi4m:fi
`
`€fi5$®f$éo
`
`{0020}
`
`{%%®%m®%%1
`
`%%®%%1.UT\:®%W®%flwfifiléflto
`
`Mffififéo&8\fi$®fimtfififiéfififififi
`
`QVEWE13‘SOGEl4BiU$2®7v$§E
`
`fikfilEflafiéEfifififilééfififiéo%m
`
`&\fifimgmtfifimfififl8éfimLk%fi2mm
`
`figgéfififi%(fl1§fi)o
`
`{0024}Cm£fi®fi¥Tfixfil®7vfifififi
`
`mfil2tSOGfi14t®fiK7v$%%ifiva
`
`EVEWE13éfififiéitKi0\SOG§14®
`
`@fifil4afi\Si—Fflfififiéfilfl7vfififi
`
`fiflfil2§fifififi§¢éitfifiwoit\VUj
`
`yfikfilBtSOGfil4tflfi§fifiE<\flflfi
`
`
`
`%®fi%%%%fiéoE1M:®%w®%mmfifilm
`
`$®£$flfifl$émkm\fi$®£®®fiESOGE
`
`i$¥§¢§fi®fifi§fifi%fiflfi%%oHmfimf
`
`1 Alfiillfifitfw‘ 75‘7775§%$L7E0TE>ZE7§?<
`
`1~3\83i09u%%®%®kfit%®\12H$
`
`Efifififilémfifififimifiéoit\:mfififi
`
`1mflfi§3itfiméfltfilw7vfififimmfi\
`
`mfimamgfifififiléfifigmfigfl6o
`
`13Mfi1®7vfififimmfil2ifimfifiéht7
`
`{00251&3\Lfiiflmfifilubfiéflfifm
`
`vfiEfiifimyvflyfim%\14uyvjymmfi
`
`t5m1\$1®7vfifififimfil2t%®im%fi
`
`13iK%fi§fltSOG§\15$SOG§14LK
`
`fiéyfljyfimfi13t%\CVD%E®H¥KE§
`
`fifiéfltfi2®7vfifififimfi\16fi$1®7v
`
`W’C‘iififimdfifi‘a‘é Z t fifé E) 0
`
`”fig 1 007 vi‘éfirfi
`
`fifififimfil2\vvflyfikE13\SOGfil
`
`fiwfi12E\wiwfaxVCVDEt;0\fiE4
`
`4‘Eiwfi2®7vifififimE15ffifiéhég
`
`fififififi%éo
`
`{0021]Lamifimfifiéfi饧¢%fimflfi
`
`OOfxEfi5.0Torr\Cfl%fifi4OOSCC
`
`M\TEOSWEQOOSCCM‘Ckfifigoosc
`CM\EEWM®fififi13.56MHZ\$fiO.7
`
`fifiéxfl2mfidmeTmfi¢oifx§mliw
`
`6W/bnfi\fifififl®fififi420KHz\fifl
`
`fifiéfltfififi2it\Wifi7ws:bA%®$E
`
`E%%0.éummfignfifittfi\N9—:V7L
`
`Tfil®fifi§3éfifi¢éoKfi\$fififilw7v
`
`0.76W/bnfimfififi%50@fififit\fiwf
`
`Cfi%fifi®AOSCCMKEEL\flfi$ffi%#T
`yonyfimfilséfifimt5flfifififiéo:mfi
`
`fifififikfi12%\Wifi7517CVDEEiU\
`
`Ex$1®7vfififimmfilzt903yfimfi13
`
`EE4OOCxEfi5.0Torr\Cfi%fifi4OO
`
`t%\fi#fimimfififimm%mfié:tmib\1
`
`SCCM‘TEOSWEQOOSCCM‘ChfifiQO
`
`OSCCM\EEEM®EEfi13.56MHzxflfi
`
`Efi%%t&0‘:fiLtfififlfiéfiféEfifima
`
`mgfifififiléfiégmfifimfignéo
`
`0.76W7bnfi\fififiw®fififi420KHz\
`
`{0026]§t\ifi7vfifififimfil2\15E
`
`mjjo. 76W/Cm20)%fi:'€\
`
`fifio. among);
`
`iUVUflVfimfi13fi\7§fl7CVDEtmg
`
`wfifi¢é(fl2(a))o
`
`{0022}&t\$1®7vfifififimfi12imfi
`
`fxfiCVDEiEfifiECVDE¥KiOTfiW§fl
`
`t$®T£E<\fifimflfiéfifiéo
`
`fifivvflyfikfi13E\WififfiKVCVDEE
`
`{00271%m®%%2.mt\:®%%®%fl®%
`
`i0fi§400@\Efi5.0Torr\TEOSm§
`
`fi2momffififiéofl3fl%fl®%%2uié¥%
`
`QOOSCCM\OflfiEQOOSCCM\EEWM®
`
`W%E®flfifi&éfiffififlf%éoif\iiim
`
`TSB4C1008
`
`IPR 0f U.S. Pat. No. 7,335,996
`
`TSMC1008
`IPR of U.S. Pat. No. 7,335,996
`
`

`

`%%¥9—148321
`
`@fifiltfififi\§Wlifififi§fltfififi2ifi
`
`aiESOGfi14E%WL(E3(C))\§$K%
`
`filfififiEBEfifiLk%\$1®7v$fififimfi
`
`witfi2®7vfifififikfi15EfifiLk%xfifi
`
`
`
`12a%\%0.35um®figfifififié(fl3
`
`H85iUfi2®EfiE9éflflfifiié(fl3
`
`(a))OKK\§W1KW1H1:10®Nv7T—
`
`(d)L
`
`F-7VM(UT\BHFt%¢)§fiHTV:vbl
`
`{0028]:wiflflfifiTfi\%1®7vifififi
`
`~v‘f‘77‘flffifi%fiffi‘§‘: t LZJ: 0 1 fi 1 007 vfifirfifififfi
`
`mfi12a%fi&fiBHFKiéW:v%Iv$VVfl
`
`fil2a®§fi§finmlv%yfféo:fltiUfi
`
`1®7vfifififlmfi12a§§®fifi7vfifi%i§
`
`fléfi5°:®t%‘BHF¢T$1®7v$§fifiM
`
`fl 1 2 aiEOZEZ $Jifll3§lfl$®fli$ifi2 Effie
`
`fl\7vfi§fi§§flyUflyfimfikLT®fim&U
`
`{0029}
`
`flyfikfiE13afififiéflé(fl3(b))oW
`
`Ht2}
`
`K\ifi%fl®%%1tfififi\vUflyfimfiE13
`HzO —% SifOH + HF
`SiiF +
`
`-
`
`.
`
`-ft”7—”‘i§2
`
`{0030}Cwfit\%1®7vfifififimE12a
`
`@fiéfltTflmyUflymkfifilBatfififififi
`
`§E®81—FfiBHF¢TmOtLEm$fi2mfi
`fifiEEEZL\SiiFfl§EQSi*OHKEm§
`
`Efitfi0\SOGEl4fiflfiLt017fiv7fifi
`
`$Lt0?&:t&<\Efifiwgwgfifififiléfi
`
`fl\fififiTfifléfltHFfiBHF¢fififiéfiéo
`
`Egfifiéfl%o
`
`t:5fxifim$fi2mfi¢fimfixfi$®¥§¢£
`
`{O O 3 117:?9" iéflififfiwfiéfié2’é‘fii $1®7 v
`
`Emgmf\7vfifififimfi4imsoefi5mfifi
`
`m5aéfifittfimifimfifilmfifiimtfib$
`
`fié‘fififiitfil 2 ai’éfiwfi'fi7 vfiEfifiiE‘TéuWZB
`
`HFEiéWIvEIv%VVflE%flLEfi\film
`
`®T%éoftbfi\:®%%®%fiffi\BHFKi
`
`élvfyfwflEmfiitti0\$Wmm$fil\
`
`7v§fifi7fifififtfi1 2 afifib; Ar‘ N2\ Eifciiog
`
`whfflfiflfiXEfiwfffii7flfiEHLTEE
`
`2Kfi?fifl€fl:tfw&tw\QIETSOGfil
`
`<\%®%®fiEEUT®m$fi3~5Efi¢O
`
`4®Efifil4aéfifitt%K\SOGfi14®flfi
`
`[0032}
`
`$73v7®fifltfiéfim(W$fil\2)fifl%é
`
`HEB}
`
`:kfi%fi?§%o:®fifi\SOG§14k7vfifi
`
`31
`
`+
`
`FT
`
`~o-mfifi3
`
`Si—F ——7—Ta
`Ar7527
`
`{M4}
`
`{MB}
`
`SiiF +
`
`N ——wm—$ Si—N +
`
`FT
`
`--m$fl4
`
`51—? + o —wm444> SIAO +
`
`FT
`
`-fl$fl5
`
`{0033}:mfifi\%1®7vfififi®mfilza
`
`(b))oflfixifiiflflfifiltfififi\yUfly
`
`fiEQSi—Ffififiéflf\Simfié HfifiL7
`
`WHEE13biESOGE14%%flL(H4
`
`vififiXkafififéZttiO%£éfléoCw
`
`(c))\é5m%mim%2m7vfifififimfi15
`
`%ééBHFKi%WIv1Ivfyfiflfléfltk%
`
`@fifitt%\fififl8bififi2®fifi§9§flfifi
`
`
`é&fifi®fi§é§fi飮f%%o
`
`fi?é(fl4(d))o
`
`{00341%m®%%3.&m\:®%%®%mmfi
`
`{0035}:flfififlfifiTfixfil®7vfifififi
`
`
`
`fiamomffififéoH4fi¥flmfifi3miéfig
`
`¢%fiwflfififiéfi¢%fiflfi%éoif\ii%fl
`
`m%fi1tfifit\fifilitfifiéhtfififiZim
`
`filwmfifi3&%mtflfi\$1®7vfifififimfi
`
`Wfil2b$fi§Ar1fiVfigoTXNv2Iv1V
`
`7fiéo:flfii0%®TK§HLt%1®7vfififi
`
`fiftfi 1 2 bi‘éEGZBHéfi'fi7 viii iéfiififidfifi
`
`fiZTfiLtW$fi3®Emfigoffiféfl\filfi
`
`
`
`12bE%0.37Mm®§EK%fifié(fl4
`
`TfifiéfléSOGfil4t®fi§fififlfitfi0\S
`
`(a))QKK\EW1%Ar4fiVKi%Xval
`
`OGEl4fiflfiLh0\7397fifiiLflofié:
`
`vf77Ki0\Efi30mTorr\AFWEIOO
`
`SCCM1EfiSOOW@%#Tlv%VVLT\%1
`
`£fifimoéBK\Ar417KiéXNv9IVfV
`
`71:4: GTF§%fl—+—%flbfltfiifl 1 7 EMS}? L'Cbxéf:
`
`®7vfififimmfil2b$fi§§é20nmfi£b\
`
`bxfilmflfiE3N2—V07XN7%Efifi%<T
`
`%®TK§ELE%1®7V$%EEW%12bfi§®
`
`%\SOGfil4®fififi14afi§§fiKEOflfig
`
`fig?v$E%£Lf7v$E%ifimyUflyfimfi
`
`<xfifi¥flkfifififii¢éoitxfilfl7vfifi
`
`tbfwfimyvflyfimfigl3b?%flfiétt%
`
`fifimfil2bfi§®fifi7v$%£t%§fl—T—%
`
`Ex&%3—+—%Kfifl17éfififié(fl4
`
`®fifi17%fitEAr4fiyfiiéle7Iv1V
`
`TSB4C1008
`
`IPR 0f U.S. Pat. No. 7,335,996
`
`TSMC1008
`IPR of U.S. Pat. No. 7,335,996
`
`

`

`(6)
`
`%%¥9—148321
`
`7miaffi%tfi2étm\Littfifiéfifég
`
`mfifibiflflflflfiiéSOG%%%fiLTEfiEE
`
`fifififiléEfigmfimfiéztfifééo
`
`flgfifififii%fifiéfib\SOGfitTfltflfifi
`
`{00361%fl®%%4.mm\:®%fiw%mmfi
`
`fifimit\SOGfiKflfi$7fiv7fifi$fiémfi
`
`
`
`fl4momffiwféoH5fi£fl®fifi4tiéfl§
`
`¢%E®EEE%¢%EET%éOEtbmf1w3\
`
`fiifiétéfifimawgfififififififinfififé
`50
`
`8‘95iU12wléfiifiifl®%%lkfiD%
`
`{00421:n\:m%fit;étx7vfiéfifly
`
`w‘18MSOG§14&%®LQ%2®7W$%HE
`
`ijfimfit7v$EfiiémyvjymmfitE\
`
`WEI5t®fififlifi7327CVDEEibfifié
`
`fi—Efiimfififimufimfiémm\Lfiflfiéfifi
`
`flt7vfiéfiifim903ymmfif%%o:®%fl
`
`égfifififimfififiégfifigfifiéo
`
`®%%Tu\SOGEl4®TEEHTfi<LEE§7
`
`{0043}§t\:®%%miétx7vfiéfiny
`
`vfiéfiifimyUJVEmfi18éfifiL\%®L®
`
`Uflyflmfiéfifittfi\7vfiéfimtfiiv%l
`
`fi2®7v$§fifimfi15tmfififiémiéfi\fl
`
`vfy7flfléflt\fiHTSOGfiéfifiLTEfiE
`
`Wfi$®$$fififiéo:mtmfififififilemfifi
`
`Jfifiééwafitféo
`
`fiflEfifififiEfififiékb\ifi7vfi§fifl90
`
`nyfimfi§§®7v$fi%£énTLE®SOGEt
`
`[0037}&3\C®%Q®SOGfi14L®VU3
`
`@fifififimib\SOGfiEflfi$7§v7fi%E¢
`
`yfikfileiwfi2m7vfifififimfi15a\i
`
`éméWifgtémfimgmgfifififififigmfifi
`
`Eifl®%filffittSOGfi14TEmfilm7v
`
`Tééo
`
`$fififikfil23iwyvnyfimfilstfifit\
`
`{0044]§E\C®%mfii%t\7v$E%UV
`
`fi#fifl§fl?fififlfi%fi¢éitfif%éo
`
`{00381%fl®%%5.mm\:®%fim%mwfi
`
`Uflymmfiéfifibtfi\Ar\CbitfiNflme
`flfiéfimtffif?flfl%flb\EMTSOGfiéfi
`
`fiBtomffififiéoif\:fi%M®%filtfifi
`
`fit?flfi%fi®%fifififi§%fifiét%\Lfi7v
`
`KL?SOG%14§TE%&LE%\fiMfSOGE
`
`fiéfivaJmefiigw7vifi%fiéhft§
`
`14§EKMfiXEmwffifvflflémL\%w
`fifi2®7vfifififim§15éfififiécZ®WK\
`
`SOGEl4fifitNgfiXEfimt7317Mfl%fl
`fiitti0\SOGfil4§EE§fE§F§fi\S
`
`@SOGfltmfifififimiL\SOGflKflfi$73
`
`v7fifiifié®%mmvééfimfiwamgfifififi
`
`fififimfifiT%%o
`
`{0045}§t\:®%%tiétx7vfiéfiby
`
`i—N®@%Ki0?§fig®mfimfifl&%¢?éo
`
`ijmmfifi\E®%E%fim7v$fi%£éflffi
`
`:mthOGfll4i£fififié$2m7vfififim
`
`EK&Uflymmfifi%méfl\Lfi£%%3—+—%
`
`
`
`Wfil5D®SiiFfiTflSOGE14t®fiETT
`
`tfiflfi%fiéflttb\LEflSOGfitfl§EHfi
`
`Eflafifittmfitfimbffi%fiéfiflfiztfifi
`
`EHTSOGfiKflfi$75v7mfiifié®éfiifi
`
`¢§fl\SOGfil4t%®i®%2®7v$fififik
`
`$étt$fi¥fikfifi®fiitt\Eflfimamafi
`
`filBamfifififith\Liiflm$fi4tfifim
`
`Efifififififififighéo
`
`Efifififil6wéfififiégflfiifiétk%m:®
`
`fifififlfiwfimfifififlfil6fi§%t%fifigéo
`
`{0046]§t\:flfififiiétx7vfiéfiflv
`
`ijmmfiEfiELtfi‘Arémwtxmvyiv
`
`{0039]t5\LE%MQ%%45;U5M\so
`
`fVVQfiM\fiHfSOGE%%fiLTEfiEE®E
`
`
`Gfil4TE®E£K0mTLE¥fl®fifi1§EfiL
`
`fifififié%fifiétw\:Emfififififimamafi
`
`tfiw?%é#\:fififlmfifl2ituséfifitf
`
`$fifi®fl$駢éo
`
`{0040}
`
`fififififififififi%tfimfi%éo
`
`{0047}§t\:®%%Kiflfi\mfi%fimgfi
`
`fifimfi\7v$§fifiVUflyfimfit\%®it7
`
`{%%®%%1ULmfim\:mfiwt;%t\mfifi
`
`vfiEfiifimyUflyfimfiEfiLffiméhfiso
`
`fimgfififififi\7V$E§UVUUVfim§£\%
`
`Gfitx%®L®&U37fikfitfififiéflfméfi
`
`®LK7V$EfiitwyU:yfimfiEfiLffimé
`
`m\fi%%$T$fim%fififlfif\SOGfitTflt
`
`fltSOGE&%E¢%EEfifiT%étb\fifig$
`
`mfififimflmxEHEwEmEfifitgfifififififi
`
`T?fik%fi®flfit@fifififif%of\L#%SO
`
`Bfléo
`
`GfitTfltmfififififlfiT\soefitflfi$7fi
`
`{0048}§t\:®%Wti%t\SOGELE?
`
`v7fifigfié:tfifimémfiwamgfifififififi
`
`vfiéfiitmyvflymmfiéfitf7vfiéfiay
`
`Uflyflmfifififléflttm\SOGfiELEtwfi
`
`fifi$fiLLéemfiflfi®EmEfifififififigfl
`
`Bhéo
`
`{004llifi\:®%fitlét\7vfi§fifly
`
`
`
`ijmmfiéfifittfi\%®im7v$§%§tm
`
`$0
`
`aunyfimfiéfifit\%®ity03ymémfifi
`
`[0049}§t\:®%fiw;5t\soeméfifi
`
`TSB4C1008
`
`IPR 0f U.S. Pat. No. 7,335,996
`
`TSMC1008
`IPR of U.S. Pat. No. 7,335,996
`
`

`

`(7)
`
`%%¥9—148321
`
`Lt%\méflmk7327%fléflbxfim17v
`fiéfiflvvflyfikfiEfififiékm\SOGfit:
`
`fifiéfi¢%fiflf%éo
`
`{E6}
`
`fi$®¥§¢§fi®fifi§fififififlfi%
`
`Et®%%fi%mtt\$8t€fifi®§w§fifififi
`
`$0
`
`fifigmfifif§éo
`
`{flfiwfiitfifil
`
`{H1}
`
`:mfifiwiflmfifilmi%¥§¢%fiw
`
`fifi?fi¢%fifl?%éo
`
`{HZ}
`
`:m%fi®$fl®%filfii%¥§¢%fi®
`
`flfifiiéfi¢%fiflf%%o
`
`{ET}
`
`fifim¥§¢%fi®fififiéfiwfié%fifl
`
`T%éo
`
`{fi%mfifil
`
`1 #EWEW‘S filmmfifi‘g Lgmfigt
`
`LT®%2®EEE\12,12a,12b $1®7
`
`vfiéfifiyvjyfimfi\13 7vfiéfiifiwv
`
`
`
`{EB}
`
`:fl%¥®%fl®%fl2fli饧¢§
`
`W0)
`
`‘JITVWHEfi‘ 13a, 13b 7‘Vfi’i’fii7EELF/U
`
`fifififi?fi¢%fiflf%éo
`
`{E4}
`
`:mfiflm£fl®%fi3mi饧¢%fiw
`
`§fifi$§fififififlT$éo
`
`[H5]
`
`:wfififliflflfifi4fli饧¢%fiw
`
`jyfimfittfmyujymmfig\14 xwyfi
`
`V7§ZE(SOG§)\14a yuayméWfifi
`
`ttfmfifim\15 $2®7v$%%flvujyfi
`
`mfi\16 Efifififi\17 @fio
`
`{El}
`
`{HQ}
`
`h¥§¢£fi
`3 :ggmmaafifi
`
`9 317.me
`
`:1wzét
`a; ”$5Efiflsflfi
`
`
`Ix?» tfiinv
`iwwmmi
`
`
`
`
`TSB4C1008
`
`IPR 0f U.S. Pat. No. 7,335,996
`
`TSMC1008
`IPR of U.S. Pat. No. 7,335,996
`
`

`

`m, : {fl {av-viz at w: uMfiJfiEHE
` (c)
`
`‘i‘ii
`
`~-B 3"!
`
`(8)
`
`tliviJrF‘ar‘33lZQ—148321
`
`{I3}
`
`{I41
`
`%3I
`
`I20
`
`~‘
`
`
`
`TSMC1008
`
`IPR 0f U.S. Pat. No. 7,335,996
`
`TSMC1008
`IPR of U.S. Pat. No. 7,335,996
`
`