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`INNOLUX CORPORATION v. PATENT OF SEMICONDUCTOR ENERGY
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`LABORATORY CO., LTD.
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`lPR2013-00068
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`Display Research Lab Homepage
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`Page 1 of 2
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`Disp lay Resear
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`Ch Laboratory
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`Professor Miltiadis Hatalis
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`Research
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`Peo le
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`Alumni
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`Contactlnformation
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`Publications
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`Sherman Fairchild Lab 308
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`Facilities
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`Lehi h Home a e
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`Laboratory Director
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`Phone: (610)758-3944
`ECE De tPaoe
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`Fax: (610)758—6279
`email: mkh1@lehigh.edu
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`Education
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`Ph.D. Electrical Engineering, Carnegie Mellon University, USA 1987
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`MS. Electrical Engineering, State University of New York at Buffalo, USA 1984
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` BS. Physics, Aristotle University of Thessalonia, Greece 1982
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`Biography
`My CV
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`Professor Mi/riadis Hatalis received the BS. degree in Physics from Aristotle University of
`Thessaloniki, Thessaloniki, Greece,
`in 1982,
`the MS. degree in Electrical and Cmputer
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`Egineering from the State University of New York at Buffalo in 1984, and the Ph.D. degree in
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`Electrical and Computer Engineering from Carnegie Mellon University, Pittsburgh, PA,
`in
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`1987. He joined the Department of Electrical and Computer Engineering of Lehigh University,
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`Bethlehem, PA, in 1987 as an Assistant Professor and was promoted to Associate Professor in
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`1991 and to Professor in 1995. In 1992, he was a Visiting Scientist at XEROX Palo Alto
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`Research Center. He is the author or coauthor of over 150 technical publications in the field of
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`Polysilicon Thin-Film Transistor Technology. His research interests are in electronic thin film
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`materials, devices and circuits for flat panel displays, and integrated Microsystems on variety of
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`rigid and flexible platforms including silicon, glass, flexible metal foil, and plastic. Dr. Hatalis
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`served as Chairman of the organization committee for five technical workshops and conferences
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`in the field of flat panel displays and systems.
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`Xiaoxiao Ma
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`PhD. Candidate
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`Contact Information
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`Sherman Fairchild Lab 303
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`Phone: (610)758-3948
`Fax: (610)758-4561
`email: xim207@lehigh.edu
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` Education
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`Ph.D. Candidate, Electrical Engineering, Lehigh University, USA
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`M.S. Electrical Engineering, Lehigh University, USA 2009
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`BS. Material Science & Engineering, Shanghai Jiao Tong University, China 2007
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`Display Research Lab Homepage
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`Page 2 of 2
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`Xiaoxiao Ma received her BS. in Material Science and Engineering from Shanghai Jiao Tong
`University, China in July 2007. She earned her Master's Degree in Electrical Engineering under
`Dr. Hatalis’s supervisor in May 2009 after joining Lehigh University for two years. Currently
`she is pursuing her Ph.D degree in the same field working in the Display Research Lab. Her
`research interest focuses on study of various metal foils for flexible electronics as well as
`synthesis and characterization of thin films.
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`Thomas Charisoulis
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`M.SStudent
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`Contact Information
`Sherman Fairchild Lab 307
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`Phone: (610)758--4020
`Fax: (610)758-4561
`email: thc210@lehigh.edu
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`Biography
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`Devry lnstitute— Electrical Engineering
`Desales University and Lehigh University- Additional Studies
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`Perkin Elmer/ ASML- Field Service and Support Engineer
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`Lucent Technologies— Photolithography Engineer
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`Display Research Lab Homepage
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`Home
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`Developing Tomorrow's Technology Today
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`to realize high-performance electronic systems on flexible platform this group pursuits design and
`With the goal
`development of devices, circuits and very large scale integrated systems on stainless steel foil substrate mainly employing
`polysilicon Thin Film Transistor (TFT) technology. In contrast with plastic substrates, metal foils can withstand high—
`temperature steps such as thermal oxide growth,
`thermal dopant activation, silicidation etc. Furthermore,
`the superior
`dimensional stability of metal foil substrates permits the implementation of rather small features (<lum) over a large area.
`This makes the development of highly integrated, high performance CMOS electronics on flexible, large area platform
`possible. Our efforts cover the following aspects:
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`. Preparation of flexible metal foil substrates
`a Design, simulation, and fabrication of application specific solid state devices (including TFT, pin Diode, OLED, etc.)
`a Design, simulation, and fabrication of standalone circuits, application specific integrated circuits and systems with
`novel technologies (including poly-Si TFT, Oxide-TFT, and etc.)
`C Development of characterization and testing setup for highly customized large area integrated systems.
`0 Encapsulation of air or humidity sensitive electronic systems
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`Following are some of our projects
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`. AMOLED display on flexible metal foil substrate
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`0 Integrated analog, digital and mixed signal circuits on stainless steel foil
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`. Large Area Flexible Digital Systems on Flexible Platfomi
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`o Low Temperature Metal-Oxide TFTs for display and sensor applications
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`- Evaluation of TFT electronics on flexible platform under mechanical strain
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`0 Assessment of various metal foils for flexible electronic applications
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`- Reverse stamped printed electronics
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`m P
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`Publications
`Facilities
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`Lehigh Homepage
`ECE De tPa e
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`Display Research Lab Homepage
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`Page 1 of 2
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`Polysilicon TFT on Steel
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`Poly-Si TFT Structure
`Gate Dielecuic
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`DRL
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`Publications
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`Lehigh Homepage
`ECE Dept Page
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`Metal!
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`Display Research Lab Homepage
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