`
`INNOLUX CORPORATION v. PATENT OF SEMICONDUCTOR ENERGY
`
`LABORATORY CO., LTD.
`
`|PR2013—00066
`
`
`
`TCO Laser Scribing System ULT—1400 | ULVAC
`
`ULVAC PRODUCTS
`
`EQUIPMENT
`
`Top > EQUIPMENT > TCO Laser Scribing System ULT-1400
`
`PRODUCT CATEGORY
`
`Sputtering System
`
`TCO Laser Scribing System
`ULT-1400
`
`
`This system is a single-substrate laser scribing system that is used to
`remove the transparent electrode (TCO) films formed on the glass
`substrate by the laser ablation method using the near-infrared
`wavelength pulse oscillating laser.
`This system consists of6 lR lasers, 6 sets of laser light collection
`optical system, bridge type XY stage (X-axis: lower axis, Y‘axis: upper
`axis on bridge), substrate conveyor mechanism, dust collector, laser
`power measuring instrument and control systems. It is achieved high
`accuracy and high stability for using fiber lasers and a stage made of
`
`granite.
`
`Features
`
`- Diode coupled 6 IR lasers:
`Laser light is delivered by optical fiber and set variable pulse width
`
`- Simple and high stability optical system
`
`- Granite XY stage:
`High precision and minimal thermal expansion/contraction
`
`-
`
`Individual laser positioning control:
`Every IR laser has its own Y— and Z-stage
`
`. Automatic measurement and calibration of laser output power
`
`- Tact time < 90 sectULVAC standard pattern)
`Applications
`
`- Thin film solar Cell (TCO Laser scribing)
`
`.
`
`Specifications
`
`
`liubstrate material
`W1400 x D1100 x t=3~5mm
`
`act time
`< 90 sec. (ULVAC standard pattern)
`
`Excitation
`Laser Diode
`
`Laser wavelength
`About 1.06pm
`
`Beam delivery
`Optical Fiber
`
`Beam shape
`About 50-70um circle
`
`Number of beams
`Air cooling
`
`ooling
`Air cooling
`
`IStage size
`_L
`W2420mm x L4570mm x H2100mm
`X axis(upper axis): 2000mm
`alid stroke
`Y axis(lower axis): 1260mm
`
`Z axis(mounted on Y stage): 50mm
`
`
`
`Maximum speed
`X11000mmlsec
`Y2600mm/sec.
`-Y orthogonality
`Below Sum/500mm
`
`Eccuracy of repeatability positioning Below +/-10um
`
`CVD ISystem
`Vacuum Evaporation
`System
`Vapor Deposition
`Polymerization System
`Ashing System
`
`Roll Coater
`Freeze Drying [vacuum
`Drying System
`
`Vacuum Distillation System
`Automatic LeakTester
`Others
`APPLICATIONS
`Semiconductor Process
`(FEOtJBEOL)
`
`Semiconductor Process
`(NonVolatile Memory)
`LED Device
`Power DeVIce
`
`Advanced Packaging
`DeviceMEMS Devrce
`Optical Film
`Magnetic Device
`Thin-film Lithiumton
`Secondary Battery
`
`”TouchPanel
`VWR&DMEquipmentfor Display -~
`~Photovoltaic
`~-
`
`flAutomobiteParts
`IWringMaterials
`.,..Capacuors
`PackagingMaterialswmm
`“Decorative Coating
`"Pharmaceutical
`
`Food Processmg
`
`Electronics Materials
`Functional Materials
`
`
`
`
`
`TCO Laser Scribing System ULT—1400 | ULVAC
`
`Aviation
`Power Transmissron
`
`Home Appliance
`
`Cautions on use
`
`Contact
`EQUIPMENT
`PRODUCT CATEGORY
`. Sputtering System
`. DVD System
`. Vacuum Evaporation System
`w Vapor Deposition
`Polymerization System
`2 Ashing System
`~ Etching System
`‘
`ton Implantation System
`) Vacuum Furnace
`> Roll Coater
`» Freeze Drying/Vacuum Drying
`System
`, Vacuum Distillation System
`- Automatic Leak Tester
`. Others
`
`Link Policy
`
`Site Map
`EQUIPMENT
`APPLICATIONS
`’ Seniconductor Process
`(FEOL/BEOL)
`Semiconductor Process (Non
`Volatile Memory)
`» LED Device
`w Power Device
`. Advanced Packaging Device
`- MEMS Device
`- Optical Film
`\ Magnetic Device
`Thin-film Lithium Ion Secondary
`Battery
`LCD
`I DLED
`v Touch Panel
`'- R&D Equipment for Display
`‘ Photovoltaic
`: Magnet
`> Automobile Parts
`* Viking Materials
`- Capacitors
`: Packaging Materials
`> Decorative Coating
`a Pharmaceutical
`'- Food Processing
`' HealthCare
`= Electronics Materials
`= FunctionalMaterials
`'- Aviation
`« PowerTransmission
`~ Home Appliance
`
`MATERIALS
`Sputtering Targets
`I For FPD
`. FerSeniconductor
`. ForPhotovoltaic
`,
`lTOTarget
`. 1620 Target
`- Evaporation Deposition
`Materials
`High Performance Materials
`,
`[Ta][Nb]Sheet
`-
`[Tallelvthre/Ear
`v
`[TeHNblTube/Pipe
`‘
`[TaHNbflZr] Reactor Vessels
`.
`[Talle] Heat Exchanger
`:
`[Ta][Nb][Zr] Columns
`,
`[‘l‘a][Nb]|Zr|[TI] Coating
`‘
`['l'filthllZ'ltTIlPiPinQS
`Nano»me|at Ink
`
`CUSTOMER SUPPORT
`Field Service for Equipment
`’ Ftied Service
`, Gloobal CIP
`, Factory Outsourcing
`> Recycling I Cleaning / Reusing
`Resources
`Maintenace tor Component
`« Pump Maintenance Service
`I JCSS Calibration Service
`(Vacuum Gauge)
`~ Termination of Production and
`Maintenance
`Parts Supply
`Surface Treatment
`MEMS Foundry Service
`Analysis Service
`Used Equipment/Refurbish
`
`COM PONENTS
`Vacuum Pump
`i Dry Pump
`i Oil Rotary Pump
`- Mechanical Booster Pump
`:
`Ion Pump
`\ Turbo Molecular Pump
`~ Oil Diffusion Pump
`, Cryo Pump
`. Titanium Getter Pump
`Vacuum Gauge
`Process Gas Monitor
`Leak Detector
`Thin Film
`Measurement/Deposition
`Controller
`VacuumValve
`Parts for Ultravl-figh Vacuum
`Power Supply
`Transfer Robot
`Sefiware
`Catalog Download
`Drawing Data Download
`Termination of Production and
`Maintenance
`
`
`
`Copyright (C) 2001-2013 ULVAC, Inc All rights reserved
`
`
`
Accessing this document will incur an additional charge of $.
After purchase, you can access this document again without charge.
Accept $ Charge
Still Working On It
This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.
Give it another minute or two to complete, and then try the refresh button.
A few More Minutes ... Still Working
It can take up to 5 minutes for us to download a document if the court servers are running slowly.
Thank you for your continued patience.
This document could not be displayed.
We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.
Your account does not support viewing this document.
You need a Paid Account to view this document. Click here to change your account type.
Your account does not support viewing this document.
Set your membership
status to view this document.
With a Docket Alarm membership, you'll
get a whole lot more, including:
- Up-to-date information for this case.
- Email alerts whenever there is an update.
- Full text search for other cases.
- Get email alerts whenever a new case matches your search.
One Moment Please
The filing “” is large (MB) and is being downloaded.
Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.
Your document is on its way!
If you do not receive the document in five minutes, contact support at support@docketalarm.com.
Sealed Document
We are unable to display this document, it may be under a court ordered seal.
If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.
Access Government Site
