`Case 1:16-cv-00290-MN Document 45-8 Filed 11/22/17 Page 1 of 8 PageID #: 1359
`
`EXHIBIT H
`EXHIBIT H
`
`
`
`Case 1:16-cv-00290-MN Document 45-8 Filed 11/22/17 Page 2 of 8 PageID #: 1360
`EXHIBIT H - USP 6,538,324 - OmniVision Technologies, Inc. OV8858 (PureCel)
`
`1. (A) A barrier film preventing diffusion of copper from (B) a copper wiring layer formed on (C) a semiconductor substrate,
`comprising
`(D) a multi-layered structure of (D1) first and (D2) second films,
`(D1) said first film being composed of (G) crystalline metal containing nitrogen therein,
`(D2) said second film being composed of (H) amorphous metal nitride,
`(A) said barrier film being constituted of (I) common metal atomic species,
`(D1) said first film being formed on (D2) said second film,
`(D1) said first film in direct contact with (D2) said second film,
`(D1) said first film (J) containing nitrogen in a smaller content than that of (D2) said second film.
`
`SUBJECT TO CHANGE
`
`1
`
`
`
`Case 1:16-cv-00290-MN Document 45-8 Filed 11/22/17 Page 3 of 8 PageID #: 1361
`EXHIBIT H - USP 6,538,324 - OmniVision Technologies, Inc. OV8858 (PureCel)
`
`Claim 1
`
`(A) A barrier film preventing diffusion of copper from (B) a copper wiring layer formed on (C) a semiconductor substrate,
`comprising
`
`(C)
`
`(A)
`
`(B)
`
`SUBJECT TO CHANGE
`
`2
`
`
`
`Case 1:16-cv-00290-MN Document 45-8 Filed 11/22/17 Page 4 of 8 PageID #: 1362
`EXHIBIT H - USP 6,538,324 - OmniVision Technologies, Inc. OV8858 (PureCel)
`
`Claim 1
`
`(D) a multi-layered structure of (D1) first and (D2) second films,
`(D1) said first film being composed of (G) crystalline metal containing nitrogen therein,
`(D2) said second film being composed of (H) amorphous metal nitride,
`
`Metal 1 Ta-Based – FFT of Amorphous and Crystalline Regions
`
`(D1)
`(D2)
`
`(D)
`
`(H) : Amorphous Region
`
`(A) a barrier film
`
`(G) : Crystalline Region
`
`SUBJECT TO CHANGE
`
`3
`
`
`
`Case 1:16-cv-00290-MN Document 45-8 Filed 11/22/17 Page 5 of 8 PageID #: 1363
`EXHIBIT H - USP 6,538,324 - OmniVision Technologies, Inc. OV8858 (PureCel)
`
`Claim 1
`
`(D) a multi-layered structure of (D1) first and (D2) second films,
`(D1) said first film being composed of (G) crystalline metal containing nitrogen therein,
`(D2) said second film being composed of (H) amorphous metal nitride,
`
`Metal 1 Cu Line – Analysis Locations
`
`(H) : amorphous TaN
`
`(G) : crystalline TaN
`
`(D2)
`
`(D1)
`
`(D2)
`(D1)
`
`(A) a barrier film
`
`Metal 1 Ta-Based Liner – EELS Line Scan
`
`SUBJECT TO CHANGE
`
`4
`
`
`
`Case 1:16-cv-00290-MN Document 45-8 Filed 11/22/17 Page 6 of 8 PageID #: 1364
`EXHIBIT H - USP 6,538,324 - OmniVision Technologies, Inc. OV8858 (PureCel)
`
`Claim 1
`
`(A) said barrier film being constituted of (I) common metal atomic species,
`
`(I) common metal atomic species (=Ta)
`
`(A) a barrier film
`
`Metal 1 Ta-Based Liner – TEM-EDS
`
`SUBJECT TO CHANGE
`
`5
`
`
`
`Case 1:16-cv-00290-MN Document 45-8 Filed 11/22/17 Page 7 of 8 PageID #: 1365
`EXHIBIT H - USP 6,538,324 - OmniVision Technologies, Inc. OV8858 (PureCel)
`
`Claim 1
`
`(D1) said first film being formed on (D2) said second film,
`(D1) said first film in direct contact with (D2) said second film,
`
`Metal 1 Cu Line – Analysis Locations
`
`(D2)
`
`(D1)
`
`(D2)
`(D1)
`
`(A) a barrier film
`
`Metal 1 Ta-Based Liner – EELS Line Scan
`
`SUBJECT TO CHANGE
`
`6
`
`
`
`Case 1:16-cv-00290-MN Document 45-8 Filed 11/22/17 Page 8 of 8 PageID #: 1366
`EXHIBIT H - USP 6,538,324 - OmniVision Technologies, Inc. OV8858 (PureCel)
`
`Claim 1
`
`(D1) said first film (J) containing nitrogen in a smaller content than that of (D2) said second film.
`
`Metal 1 Cu Line – Analysis Locations
`
`(J) : Nitrogen contained in (D1) said first film is smaller
`than that of (D2) said second film.
`
`(D2)
`
`(D1)
`
`N
`
`Nitrogen
`
`Nitrogen
`
`(D2)
`(D1)
`
`(A) a barrier film
`
`Metal 1 Ta-Based Liner – EELS Line Scan
`
`SUBJECT TO CHANGE
`
`7
`
`
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