Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 1 of 246
`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 1 of 246
`
`EXHIBIT 17
`EXHIBIT 17
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 2 of 246
`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 2 of 246
`
`rtisan Artisan Technology Groupis your source for quality
`FecroogyGrup|new and certified-used/pre-owned equipment
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`COMUIOI US OD) eeSUUNCE | shiesadisantecom | wiwoteanyoom
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`Ly) LD “ Deeeeeeeeet
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`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 3 of 246
`
`THE
`ADVANCED ENERGv®
`MDX MAGNETRON DRIVE
`
`V
`
`ADVANCED ENERGY
`INDUSTRIES, INC
`
`DEFTS-PA_0000007
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 4 of 246
`
`To ensure years of dependable service, Advanced Energy® products are
`thoroughly tested and designed to be among the most reliable and highest
`quality systems available wor1dwide. All parts and labor carry our standard
`1-year warranty.
`
`For Customer Service, call:
`
`AE, Colorado office
`
`AE, California office
`
`AE, Northeast office
`
`AE, Japanese office
`
`AE, German office
`
`all others
`
`(303) 221-0108 (24-hour line)
`Fax: (303) 221-5583
`
`(408) 263-8784 (8 a.m. to 5 p.m. Pacific
`Standard Time - California only)
`Fax: (408) 263-8992
`
`(508) 371-1381
`Fax: (508) 369-1305
`
`81 (03) 3222-1311
`Fax: 81 (03) 3222-1315
`
`49 (0711) 777-87-18
`Fax: 49 (0711) 777-87-00
`
`contact your local service center-see the list on
`the next page
`
`©1991, Advanced Energy Industries, Inc
`
`All rights reserved. Printed in the United States of America. This manual is
`supplied to enable the reader to safely install, operate, and service the
`equipment described herein. Making copies of any part of this manual for any
`purpose other than these is a violation of U.S. copyright law.
`
`In the interest of providing even better equipment, Advanced Energy Industries,
`Inc., reserves the right to make product changes without notification or
`obligation. To the best of our knowledge, the information contained in this
`manual is the most accurate available as of the date on the title page.
`
`For more information, write Advanced Energy Industries, Inc., 1600 Prospect
`Parkway, Fort Collins, CO 80525.
`
`Artisan Technology Group - Quality Instrumentation ... Guaranteed I (888) 88-SOURCE I www.artisantg.com
`
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`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 5 of 246
`
`AE Service Centers
`
`Company Name
`
`Vacutec AB
`Sweden
`
`Gambetti Kenologia snc
`Italy
`
`Segen Technologies, Ltd.
`Israel
`
`Zeus Co., Ltd.
`Korea
`
`Schmidt Scientific
`Taiwan
`
`Phone/Fax Numbers
`
`46 (0) 40-437270
`Fax: 46 (0) 40-435538
`
`39 (02) 9055660
`Fax:39(02)9052778
`
`972 (03) 9363106
`Fax: 972 (03) 9362030
`82 (02) 577-3181
`Fax: 82 (02) 576-3199
`886 (02) 5013468
`Fax: 886 (02) 25029692
`
`Returning Units for Repair
`
`Before returning any product for repair and/or adjustment, call AE Customer
`Service and discuss the problem with them. Be prepared to give them the serial
`number of the unit and the reason for the proposed return. This consultation
`call will allow Customer Service to determine if the unit must actually be
`returned for the problem to be corrected. Such technical consultation is always
`available at no charge.
`
`If you return a unit without first getting authorization from Customer Service,
`and that unit is found to be functional, you will have to pay a retest and
`calibration fee, and all shipping charges.
`
`Upgrading Units
`
`AE will upgrade older units for a fee (a percentage of the current list price,
`based on the age of the unit. Such an upgraded unit will carry a 6-month
`warranty (which will be added to any time remaining on the original warranty).
`
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`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 6 of 246
`
`SAFETY
`
`WARNING
`
`SAFE OPERATING PROCEDURES AND PROPER
`EQUIPMENT ARE THE RESPONSfBILllY OF THE
`
`DANGERI AH personnel who work with or
`who are exposed to this equipment must
`take precautions to protect themselves
`against serious or possibly fatal bodily
`
`DO NOT BE CARELESS AROUND THIS EQUIPMENT.
`
`DEFTS-PA_0000010
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 7 of 246
`
`CONGRATULATIONS ...
`
`On your purchase of AE's MDX magnetron drive, which is designed for
`continuous hard use into a vacuum environment. Advanced circuit design and
`calibrated instrumentation make these units the most accurate, most efficient,
`and most versatile in the world today.
`
`The Advanced Energy® MDX magnetron drive provides exceptional efficiency
`from line to load, quick response to changes in the load, and extremely low
`stored energy in the the output filter. Its many optional configurations and
`standard features also make it a highly adaptable power supply.
`
`With an MDX you can regulate power, current, or voltage. You can choose any
`of these methods of output regulation at any time without turning the output off.
`
`Three interfaces are available: a control panel (connected or remote), an
`analog/digital port, and an RS-232 port. Control can be given exclusively to any
`or1e interface or distributed among two or three of them.
`
`Each MDX is equipped with a built-in impedance-matching transformer. These
`transformers are available in low-impedance, standard-impedance, and
`high-impedance configurations.
`
`The standard ARC-OUTTM arc-suppression circuitry provides outstanding
`suppression and quenching of arcs, cutting off the energy that feeds hot spots.
`The ARC-CHECK™ option goes one step further and eliminates destructive
`short-inducing flakes.
`
`Typical applications include de sputtering with RF bias, basic magnetron
`sputtering, cathodic-arc deposition (sputter etching), and de-biased RF
`sputtering.
`
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`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 8 of 246
`
`CONTENTS
`
`INTRODUCTION
`. Reid This Pagel . , ••••••...••••• , ••••••••••.•...•.• , • vii
`OVervlew of the Manual. .••••.••• , , • • • • • • • • • • . . . • . • . . • • Ix
`Interpreting the Manual • • • • • • • • • • . • • • • • • • • • • • • • . . . • . . • xi
`
`PART I GETTING TO KNOW YOUR MDX MAGNETRON DRIVE
`IS
`1. WiAT
`Table of Contents . . . • • • • • • . • . . . . . • • . • • • • • • • . . • • • • • • • • 1-3
`General Description. . • • • • . • • • • . . . . • • • • • • • • • • . . . • • • • • • • 1-5
`Typical Applications . . • • • • • • • • • . • . . • • • • . • • • • • . . • . •••••
`Specifications . .......................... ,., ................ ~ . 1-17
`2.HOW WORKS
`Table of Contents •.••••••••••.....•....•••....•••.•••
`Theory Operation. . . • . • . . • • . . . . . . . . . . . • • . . . . . . . . . . . . 2-3
`Connectors. • . . • . . . . . . . . . . . • . . . . . . . • • . . • • . . • . . . . • . • . • 2-7
`Status Information •.••••••••••....•••••.•••••.••••••••
`Interfacing . • . . • . . . . . . . . . . • • . . . . . • . . • • • • . • . . • • . . . . • . .
`
`PART II OPERATING YOUR MDX MAGNETRON DRIVE
`USE
`3. PREPARING
`Table of Contents . . . . . • . . . . . . . . . . . . . • . • . • . . . . . . . • . . . . 3-3
`Setting Up ......................... * ....... ~ ....... , .. .
`Making Rear Panel Connections ......................... 3-13
`First-time Operation • • • • • • • • • • • • • • • • • • • • • • • • . . . • • . . . . . . 3-31
`4. CHOOSING MODES/SETTINGS
`Table of Contents . • • • • • • • • • • . • . . • • • • • • • • • • . . . • • • • • • • • 4-1
`Output Regulation . . .. • .. . . . .. . • . . . • • . • • .. . . . . • . • • • • • . 4-5
`Program Mode ••...••••••••••...••• , . • • • • • . . . • • • • • • • • 4.5
`Lock Mode. • • • . . . . • • • . • • • • • . . . . . • • • • • • • • • • . . . • • • • • . • 4-19
`Remotes • • • • • • • . . . • • • • . • • • • . . . . • • • • • • . • • • • . . . . . • • • • • 4-21
`Tap
`. . . . . . . . . . . . . . ......................... 4-27
`Impedance Options . . . . . . . . . . . . . . . . . . • • . . . . . . . .. . . . .. 4-45
`Line Voltage Changes . .. • • • • • . . . . . • .. • • • • . . • . . • • .. .. • . 4-47
`Master/Slave
`. . . . • • . . . . . . • . • • • • • • . . . . . • . . . . • • 4-49
`5. USING THE
`FEATURES/OPTIONS
`Table of Contents .......•.•..••••••••••.•...•.•.....•
`ARC-CHECKTM .......•.••....•••••••....•.....•....•• 5-3
`Fast Ramp . . . . . ............ '"' . . . . . . . .. . . . . . . . ., ..... , . . . S..5
`Contac:tor Hold . . . . • • • • • • • • • . • • • • • • • • • • • • • . . . • ••••• , . • 5-7
`
`DEFTS-PA_0000012
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`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 9 of 246
`
`ilE~-----------------
`
`PART III LEARNING MORE ABOUT YOUR MAGNETRON DRIVE
`
`6. OPERA TING NOTES
`DC Bias ............................................. DC-1
`
`7. HOOK-UP NOTES
`Grounding ........................................... Gmd-1
`
`TROUBLESHOOTING GUIDE
`
`APPENDIX
`
`Warranty and claims infonnation
`
`Index
`
`Schematics
`
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`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 10 of 246
`
`INTRODUCTION
`
`READ THIS PAGEi
`
`We know that some of you want to start the magnetron drive now and that
`you have time to read the entire manual, Below is a 1st
`will
`to read in
`to
`started. We
`think that
`you will find overview of the Manual
`Interpreting the Manual
`ix)
`useful. They are very short sections, and are intended to guide you
`the manual.
`
`the Manual explains the organization of the manual, so that you
`Overview
`can more quickly find what you
`the Manual
`the
`type
`(what it means when a word appears in capilaUzed
`type, for
`and what the five
`(symbols) mean.
`
`• Physical specifications
`• Connectors
`• Setting up
`• Start-up procedures
`• Control
`• Line voltage changes
`
`and
`
`page 1-19
`2-7
`page 3-5
`page 3-29
`2-15,
`4-47
`
`2-21, 2-25
`
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`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 11 of 246
`
`INTRODUCTION
`
`OVERVIEW OF THE MANUAL
`
`of major topics covered in the
`hAJ:1rt1n,,c:: within each
`so that you
`""'11111Qlll';;u here, without
`
`to
`
`wUI
`
`ix
`
`DEFTS-PA_0000015
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`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 12 of 246
`
`dC®-------------
`
`Using the Special Features describes the contactor hold function, which is
`standard, and the optional ARC-CHECK™ and fast ramp features.
`
`Part Ill contains two technical operating notes: one on de bias and one on
`grounding considerations.
`
`Artisan Technology Group - Quality Instrumentation ... Guaranteed I (888) 88-SOURCE I www.artisantg.com
`
`X
`
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`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 13 of 246
`
`INTRODUCTION
`
`INTERPRETING THE MANUAL
`
`Type Conventions
`............ "" pick out what is
`nl'ln:t<:l#ll<:l in type that is l'liffll•l"#llnf
`
`Pin
`
`that are
`(RAMP IN.A).
`in boldface capital
`generally
`names, which
`begin with a
`
`::;oecnic messag,es that will
`auo1tam:>n marks
`(contactor hold).
`
`are indicated
`panel
`on the
`Fund:lons are printed in nni,1tsi,i• lowercase
`
`How to Use the Symbols
`
`Safety notes. Important notes conceming potential harm to
`people.
`
`to
`
`SHourir'KNow... > Operating notes. More thoughts on how to use the extended
`
`ICGllLIIC.::> provided,
`
`-
`
`DEFTS-PA_0000017
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`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 14 of 246
`
`AC®--------------
`
`m-YOU---'
`SHOULD KNOW ...
`
`Hook-up and interfacing notes. General practices
`concerning input and output power connections, or used
`in connecting communication and control interfaces.
`
`__.
`~-YOU _
`SHOULD KNOW ...
`
`Service notes. General practices to be used in
`maintaining this equipment in top running condition.
`
`xii
`
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`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 15 of 246
`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 15 of 246
`
`PARTI
`PART |
`
`
`
`
`GETTING TO KNOW YOUR
`GETTING TO KNOW YOUR
`MDX MAGNETRON DRIVE
`MDX MAGNETRON DRIVE
`
`
`
`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (688) 88-SOURCE| www.artisanig.com
`
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`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 16 of 246
`
`WHAT IT IS
`
`CONTENTS
`
`General Description ....••....•.•.•..•.....•••.••.•... 1-5
`Output
`Range ...................... 1-5
`Output
`....................•••..... 1-5
`interfaces . . • • • • • • . . • • • • • • • • • • • • • • • • . • • • • . . . . 1-5
`Microprocessor Advantages •••••••••••••••••••.. 1-6
`Displays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
`BuHUn Protection ••...•.•••••••••.•••••• , • • • . . 1-6
`Arc .. su1:,or1:1ssi1:>n Circuitry. . . . • . . . . . • •...••.•... 1-6
`Sophisticated Optfons ..••••••••.•...••.••••.•.. 1-6
`Typical Applications. • • • • • • . • . • • • • • • • • . . . • • • • . • • • . • . . . 1-9
`Basic Magnetron Sputtering ••••••• , • • • . • • • • . • • • • • . . 1-9
`Factory
`(Negative Output) •••••.••... 1-9
`nflnu=t1nn (Positive or Negative Output). 1-10
`(Floating Output) .•.•••••.. 1-12
`Optimum
`DC Sputtering with RF Bias . . . .. • . . • .. . .•..•••... 1-13
`DC-biased
`. • . • • • • • . . . . . . • . . • • . • • . • • . 1-15
`Specifications • • . • . . • • • . • • • . • . • . . • . . . • . . . • . • . . • . . • . . .
`. • • • • . . • . . . . . . • • . • • • • • . • . • 1-17
`Functional
`Physical
`. . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19
`
`1 - 3
`
`DEFTS-PA_0000020
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`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 17 of 246
`
`WHAT IT IS
`
`GENERAL DESCRIPTION
`
`•
`•
`•
`
`Output Impedance Range
`
`is
`
`Output Regulation
`
`Interfaces
`
`1 - 5
`
`DEFTS-PA_0000021
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`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 18 of 246
`
`dC®_P_A_R_T_I __________ _
`
`Microprocessor Advantages
`
`The internal microprocessor checks for proper circuit operation while
`supervising all operating parameters. System diagnostics run when the unit is
`initially powered up. Messages are displayed in response to errors. The most
`recent power settings and conditions (such as target life remaining and
`amount of time that the MDX has been producing output), are retained in
`nonvolatile memory.
`
`Displays
`
`Instrumentation and status readings are taken and interpreted by the internal
`microprocessor, then displayed on digital front panel displays and LED
`indicators. Power, voltage, current, ramp time, run time, target selection, target
`life, and intertock status are examples of the parameters that are displayed.
`
`Built-in Protection
`
`The MDX has complete internal protection for output overvoltage, over(cid:173)
`current, and overpower conditions. The key switch on the front panel can be
`used to restrict access to adjustable parameters. Three separate pins on the
`User port, and corresponding front-panel indicators, are provided for
`safety-related inputs such as vacuum, water, and auxiliary (user-specified)
`intertocks.
`
`Arc-suppression Circuitry
`
`ARC-OUTTM provides multilevel suppression and quenching of different types
`of arcs. An added advantage is that ARC-OUT reduces target bum-in time and
`material loss. This feature also prevents energy from being dumped into hot
`spots by sensing a drop in impedance and immediately shutting the power off.
`Start-up after an arc is controlled so that the hot spots cool before power is
`reapplied, thus preventing repeated arcing.
`
`Sophisticated Options
`
`Fast Ramp. This feature reduces the minimum time for the power supply to
`ramp to the setpoint, a major benefit for applications with very short cycles.
`
`Control Panels. The MDX is available with a standard control panel, passive
`front panel, or a combination of a passive front panel and remote control panel
`(standard or minipaneO. Foldout illustrations of the controVfront panels appear
`at the end of the second chapter.
`
`ARC CHECK™. This proprietary feature eliminates continuous low(cid:173)
`impedance conditions in certain vacuum environments, such as those in
`
`1 - 6
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`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 19 of 246
`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 19 of 246
`
`
`
`WHAT IT IS
`WHAT IT IS
`
`cathodic arc processes. When recovering from a low-impedance condition, the
`MDX automatically ramps up slowly in current regulation. As the chamber
`impedanceincreases (with the removal of excess ions), the power supply
`automatically crosses over to the previously selected method of output
`regulation (poweror voltage). Timing and current magnitudes can be adjusted
`to protect sensitive targets and system components.
`
`1-7
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`
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`DEFTS-PA_0000023
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`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 20 of 246
`
`WHAT IT IS
`
`TYPICAL APPLICATIONS
`
`Basic Magnetron Sputtering
`Three output configurations are possible for the MDX: negative output voltage,
`posffive output voltage, and floating ground. Provisions within the MDX mg,ccm
`alow you to tie either the anode or the cathode to ground; altematively. you
`can let the output float with respect to ground by not grounding either the
`anode or the cathode.
`
`Dangerl An understanding of grounding and
`the proper hookup of grounds Is essential to
`personnel safety and is necessary for the
`proper operation of your system. In all cases
`you must connect the chassis ground stud
`on the rear of the MDX to earth.ground with
`the lowest possible impedance (see
`operating note on grounding methods and
`definitions. page 7-1).
`
`Factory Configuration (negative output)
`Most MOX applications require a negative output voltage, which in tum
`requires that the anode be
`to ground. The MOX Is shipped with a
`safety Jumper installed as shown in Fig.
`to make this ground connection,
`although this Is not the optimum configuration. The reason is related to safety
`- most people associate the braided shield layer of a coaxial cable with a
`ground connection. If we shipped products with no intemal ground, I ls
`conceivable that a system could be configured with a lethal voltage on the
`would be extremely dangerous
`coaxial cable's sheath.
`of the
`possibility that people could unknowingly be exposed to such a voltage at the
`connectors.
`
`ground is that additional grounds
`The diSadvantage of having an
`means
`there are two or more
`invariably do exist in the
`ground paths in the system. \l\lhen multiple ground
`the chassis is
`made to conduct some of this current.
`flow can cause a
`of
`instrumentation accuracy. electrical
`and heating of the chassis or
`connectors and
`it may even
`the ground-reference voltage level so
`that extemal and intemal control
`control the MDX erratically or
`best system performance Is obtained using the "optimum
`not at all.
`configuration (positive or negative output)" described next.
`
`1 - 9
`
`DEFTS-PA_0000024
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`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 21 of 246
`
`Jli:·-P_A_R_T_I - - - - - - - - - - -
`
`f actory-instolled
`
`-----, \Sofety Jumpe,
`
`MDX
`
`+
`
`Optional
`"'----- Grounded
`Substrate
`
`Optimum Configuration (positive or negative output)
`The configuration that AE recommends is illustrated In Fag. 1-2, which shows
`an lndependenUy grounded anode at the chamber, fon::ing all return current
`through the anode return path. The design of the chamber may use the
`chamber waif, special Internal shielding structure, or the substrate holder as
`the actual anode. V\lith this setup, ·only one current path wil exist. thus
`eliminating the problems caused by multiple returns.
`
`Make certain that you have established a good ground at the chamber anode
`or the ground reference will be lost. The integrity of this ground connection
`should be checked as part of a periodic maintenance schedule to ensure
`continued optimum performance and safety. Whenever a system is configured
`in this manner, it is recommended that secondary dielecb1c shielding be
`installed over all parts of the coaxial cable and connectors that are exposed.
`
`When this connection degrades, as it will overtime, the system could become
`unsafe
`described in the two preceding paragraphs); more llkely,
`performance will be lost. This slow loss of performance can be subtle and ver,
`difficult to detect. Some Indications of ground degradation are
`of
`instrumentation accuracy, symptoms of Increased noise such as display flicker
`and jitter, data-logging Rnes, secondary plasma development between the
`target and the closest point at ground potential, change in the appearance of
`the chamber plasma at known power levels, and increasingly erratic behavior
`of the power supply or the system controller.
`
`DEFTS-PA_0000025
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 22 of 246
`
`WHAT IT IS
`
`MDX is used in the positive
`true when
`voltage (grounded cathode} configuration.
`
`Anode
`
`+
`
`+
`
`Anode
`
`, - - - - Insulated
`
`- - - Substrate
`
`1 - 11
`
`DEFTS-PA_0000026
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 23 of 246
`
`ili:G_P_A_R_T_I __________ _
`
`Optimum Configuration (floating output)
`it is
`output of
`In some
`to
`om;1tl\ire or
`MDX with
`power supply.
`be another de supply or
`The MDX may
`of
`±400 V
`own (MDX) l"h!!:lcc:i<t
`1-4
`a typical
`type.
`
`of
`
`very important to '"''""'"'"""
`VVhen using the MDX in this
`it is
`all power supply
`a good chassis ground for each power supply.
`grounds should be connected at one common point. All
`must
`int.,.,r,.,,nn.:,,,-tir,n
`tO nnf,!->ntiiAIIV
`
`Insulated
`,--~~ Feedthrough
`
`MOX
`
`+
`
`Anode
`
`---1
`
`DC Bias +
`
`Chamber
`
`L_P'_
`
`1 - 12
`
`DEFTS-PA_0000027
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 24 of 246
`
`WHAT IT IS
`
`DC Sputtering with RF Bias
`
`WARNING! You must place an ac blocking
`filter in
`with the output of the
`power supply if your system uses a de
`power supply in combination with an ac
`power supply that has an output frequency
`greater than 50 kHz.
`
`1c::t~1t1nn on the next
`to proper nrvi,rm11nn
`RF grounding
`ln~allat~n
`
`The purpose of this
`substrate. VVith
`RFX can
`note on
`
`1nS1:a11at1on is to elevate
`programming, an
`ae,re1ooea de bias on the substrate
`
`DEFTS-PA_0000028
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 25 of 246
`
`/lC® __ PA_R_T_I - - - - - - - - - - -
`
`Insulated
`
`RF FIiter~
`
`500
`
`-,
`
`er
`
`Target
`
`Substrate
`
`Alternate
`Method
`
`er
`
`500
`
`1-5.
`
`1 - 14
`
`DEFTS-PA_0000029
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 26 of 246
`
`WHAT IT IS
`
`DC-biased RF Sputtering
`
`WARNING! You must place an ac blocking
`filter in
`with the output of the de
`power supply if your system uses a de
`power supply in combination with an ac
`power supply that has an output frequency
`greater than 50 kHz.
`
`DANGERf Lethal high-voltage potentials will
`be present if the tuner, chamber, and MDX
`are not properly grounded.
`
`power a1~;1panea
`increase in circulating current
`
`In light of this
`a more favorable fl'\CU'm61 l'l'\<lil"61'f<>n,c,til'
`Will minimi~7A rninrotlnn
`
`in any
`A key
`supply/tuner connection:
`
`1 - 15
`
`DEFTS-PA_0000030
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 27 of 246
`
`L\c._P_A_R_T_I _________ _
`
`conductor
`
`___ Insulated
`
`+
`
`500
`
`500
`
`1-6.
`
`1 - 16
`
`DEFTS-PA_0000031
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 28 of 246
`
`WHAT IT IS
`
`SPECIFICATIONS
`
`Functional Specifications
`
`Program -
`
`full control is available from all
`
`Lock~
`control~
`test
`on/off, emergency stop,
`<::sll!tr'ln,nto::: can be viewed for whatever method
`
`Sources
`
`n11.:.1rnnr,c of Output
`Regulation
`
`Setpoints
`
`An output
`output) can
`
`to the unit's maximum rated
`for
`or
`
`U:tm,m-llfA COUntefS (Q.. 7) can be
`or from a control panel.
`monitored from a
`~nA!l'Jfi1Kt
`(1-9900
`
`k\/Vh).
`
`1 - 17
`
`DEFTS-PA_0000032
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 29 of 246
`
`dC~-P_A_R_T_I - - - - - - - - - -
`
`Dual Meters
`
`Timers and
`Counters
`
`Fault Conditions
`
`Two digital meters on the control panel display
`output information in kilowatts, volts, or amps,
`regardless of whether output is presently being
`produced in power, current, or voltage regulation;
`they display power, voltage, or current setpoint for
`the selected method of output regulation.
`
`Select a ramp time (600 ms - 99 min.; see page
`5-5 for a discussion of the fast ramp range) or a
`run time (0.01-99 min.; 0.01-99 sec. with fast
`ramp); specify how long output can be out of
`setpoint without triggering an alarm (0.01-2.55
`min.); or program a target life (1-9900 k\/Vh).
`
`The faults that will cause the MDX to shut off
`output are inter1ock, input power, over(cid:173)
`temperature, and out of setpoint (if this feature is
`activated). Other conditions that cause output to be
`shut off: the EMERGENCY STOP button has been
`pushed, or the time programmed on the run timer
`has been exceeded.
`
`1 - 18
`Artisan Technology Group - Quality Instrumentation ... Guaranteed I (888) 88-SOURCE I www.artisantg.com
`
`DEFTS-PA_0000033
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 30 of 246
`
`WHAT IT IS
`
`Physical Specifications
`
`Input VoHages
`
`Input Current
`
`200Vacor
`maximums.
`
`V ac full toad; see
`
`below for
`
`MDX
`
`5K
`MDX10K
`
`MDX25K
`30K
`
`19A
`A
`57A
`76A
`A
`114A
`
`Output Power
`
`table below
`
`0-5000 W
`1
`0-10,000W
`1
`0-15,000 W
`2
`w 2
`0-25,000 W
`3
`0-30,000 W
`3
`
`5
`2
`2
`2
`2
`2
`
`kHz
`100 kHz
`100
`100
`100 kHz
`100
`
`Output Display
`Accuracy
`
`Target Accumulator
`
`Methods Control
`
`DEFTS-PA_0000034
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 31 of 246
`
`ilE®_P_A_R_T_I - - - - - - - - - -
`
`Output Connector
`
`UHF type, Amphenol part number 83-822 (mate
`supplied) or terminal block.
`
`Output Cable
`
`RG-8U coaxial cable and/or discrete cables.
`
`Size
`
`Weight
`
`7" (H) X 19" (W) X 19" (D)
`(17.8 cm x 48.3 cm x 48.3 cm).
`
`MDX SK model: 55 lb. (25 kg).
`MDX 1 OK model: 71 lb. (32.3 kg).
`
`Ambient Temperature:
`Operating
`
`Minimum 0°c, maximum 40°C (maximum value of
`average over 24 hr.:35°C). If the units are enclosed
`in cabinets, the operator will ascertain the
`temperature at the place of instalation and ensure
`that the macimum ambient temperature is not
`exceeded.
`
`Storage
`
`Minimum -25°C, maximum 55°C.
`
`Transportation
`
`Minimum -25°C, maximum 55°C (for short periods
`of up to 24 hr., the maximum is 70°C).
`
`Coolant Temperature
`
`Air (gas) minimum 0°c, maximum 35°C.
`
`Coolant Flow Parameters:
`Contamination
`Cooling air should be free of corrosive vapors and
`particles, conductive particles, and particles that
`could become conductive after exposure to
`moisture.
`
`Humidity
`
`15-85% relative humidity; no condensation or icing.
`
`Atmospheric Pressure:
`Operating
`
`800 mbar minimum (approx. 2000 m above sea
`level).
`
`Storage
`
`800 mbar minimum (approx. 2000 m above sea
`level).
`
`Transportation
`
`660 mbar minimum (approx. 3265 m above sea
`level).
`·
`
`1 - 20
`Artisan Technology Group - Quality Instrumentation ... Guaranteed I (888) 88-SOURCE I www.artisantg.com
`
`DEFTS-PA_0000035
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 32 of 246
`
`WHAT IT IS
`
`Output Parameters
`
`The table below incHcatE:IS
`that can be
`at
`available at
`range of output
`when the MDX Is In voltage regulation
`+3).
`
`tap,
`page
`
`Output
`
`MDX5K
`
`MDX 10K
`
`MDX
`
`MDX20K
`
`MDX
`
`MDX
`
`Maximum
`
`V
`OVto
`0Vto640V
`OVto 800V
`
`A
`10.00A
`A
`
`25.00A
`A
`15.50A
`
`37.50A
`30.00A
`23.50A
`
`50.00A
`40.00A
`.OOA
`
`62.50A
`50.00A
`38.75A
`
`75.00A
`60.00A
`46.50A
`
`0 Vto 600 V
`OVto
`V
`0 Vto 1000 V
`
`A
`8.00A
`6.25A
`
`A
`A
`
`V
`OVto
`0 Vto 1000V
`OVto 1250 V
`
`A
`6.40A
`5.00A
`
`48.00A
`38.40A
`30.00A
`
`No.
`
`1
`2
`3
`
`1
`2
`3
`
`1
`2
`3
`
`1 - 21
`
`DEFTS-PA_0000036
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 33 of 246
`
`HOW IT WORKS
`
`CONTENTS
`
`Theory of Operation. • • • • • • . . • • . • • • . . . • . . . • • • • • • • • • • • • 2-3
`Connectors. . . . . . . • . . • • • • . . . • • • • • • • • • • . . • • • • . • • . . • • . 2-7
`................................ 2-7
`Input Power
`Output ~nnnor'fnr ••••• "'
`"' • • • •
`• ........................ ..
`Remote Control Panel Connector •.•........•.•...•..
`Analog/Digital 1/0 Port • . . . • • • • • . . • • • . . . . . . . • . . . • . . 2-8
`Pin-description Table . . • • • . • . • • .. . . . . . . . • . . . . .. 2-8
`Host RS-232 Port . • • • • . . . . • • • • • • • • • . • • • • • • • . • • • • • 2-10
`Pin-description Table ..•••••••••••..•••••••.•.. 2-10
`Cathode Port {Minipanel) .•••••••••••...••....••••. 2-10
`
`Status Information . . . . . • • . . . . . . • • . • • . . ....••.•..... 2-13
`Status Signals •.•••••.....••••••••••••••••..•.... 2-13
`Indicators. . . • . . • • • • • • . . . • . • • . . • • . . . . . . •........ 2-15
`Status Indicator LEDs-Control Panels. • • • • • • • • • . . 2-15
`Status Indicator LEDs-Passive Front Panel •••••.. 2-18
`LEDs on
`•••.••••••••.•..•.•.••••••.. 2-17
`Digital Meter LEDs • • • •••••••.••••••..•.•...•.
`Messages . . . . . . . . . • • . . . . . . . • • . • . • . • • • • • • • • . • • • . 2-23
`Interfacing • • . . • • • • • • . • • . • • • • . • . • • • • • • . • • • • . • • • • • • . . 2-25
`Control
`Controls •....• , .. • . . • . . • • . . • . . • . • . . . 2-25
`User Port
`• • . • . . • • • • • • • • • . • • . . • . • • • • . . . 2-31
`Host Port . . • . • • • • • . . • • . • • • • • • • • • • • . • • • • • • . • • • . . . 2-33
`Tn:1,nc::rn1c::c11nn Pi:n·!::lmAtArc • • • • • • • • • • • • • • • • • • • • • • 2-33
`
`s {"status
`Commands. . . . . . . . . • . • • . . . . . 2-38
`Variables • . . . • . . . • .. . • • • • • . . . 2-38
`Commands To
`Responses to Requests for lnter1ock
`.•...•.. 2-40
`Responses to
`for System Status • • • • • • • • . 2-41
`Key to
`Hexadecimal Characters • • • • • • • • 2-42
`T ....... .,. • .,,fll'\ft RPc::nnr1ctoct to Status Requests. . . . . . . . . 2-43
`
`2 -1
`
`DEFTS-PA_0000037
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 34 of 246
`
`HOW IT WORKS
`
`THEORY OF OPERATION
`
`power supply
`figure below and
`
`In
`
`DC
`
`AC no V
`
`Inverter
`Section
`
`Control Ponel
`
`Remote
`Interfaces
`
`Housekeeping Supply
`
`V de to power the logic
`
`Inverter
`ln\ll'>!"fP.r C:U:>t"flnn converts de to ou1se-w1a1U1-lrrlOICIUli:lt84l, 25-kHz ac voltage
`the current through two sets of
`transistors
`by
`2-2 and 2-3 on the next
`
`2-3
`
`DEFTS-PA_0000038
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 35 of 246
`
`oc· __ PA_R_T_I __________ _
`
`Inverter
`
`DC
`
`AC
`25 kHz
`
`+
`
`Input Rectifier
`Bridge
`
`2-2. Illustration
`
`lower Tn::msiator
`Current Flow
`
`2 4
`
`DEFTS-PA_0000039
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 36 of 246
`
`HOW IT WORKS
`
`Output Measurement
`The
`
`measures current
`are
`to 0-5 V de and sent to both
`remote Interfaces sections.
`
`for providing status infr,rmafir,n
`l'J'\r11rnlilinn the input C:.Af"rtnn
`
`Control Panel Display
`display on the
`inputs to
`information.
`
`2-5
`
`DEFTS-PA_0000040
`
`

`

`Case 5:20-cv-09341-EJD Document 138-20 Filed 03/18/22 Page 37 of 246
`
`HOW IT WORKS
`
`CONNECTORS
`
`Input Power Connector
`input rnn,nAr-tinn is provided by means of a fiV&•PO)!;ltiOn,
`ac
`tenninal block (TB) on
`high-current,
`the end of this chaptel).
`show line (A, B, C),
`ti::>nT'linl::11 position on the rear
`connections (GND).
`
`,11,...,,.,u,., at
`
`See page
`
`for
`
`Output Connector
`
`a UHF type connector
`of output connectors are
`or a two-pin tenninal block.
`(Amphenol
`
`Remote Control Panel Connector
`
`Connections for a remote Amrarncea i-m=•mvt.111 111""'''"' p