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`
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`Exhibit 13
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`Case 5:20-cv-05676-EJD Document 23-15 Filed 09/25/20 Page 2 of 5
`Case 5:20-cv-05676-EJD Document 23-15 Filed 09/25/20 Page 2 of 5
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`IDISCSOVERY®
`
`MULTl-CATHODE SPUTTER
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`DEPOSITION PLATFORM
`
`DENTON VACUUM ENABLES INNOVATION
`
`AND HAS FOR OVER 50 YEARS.
`
`With thousands of thin film deposition tools installed globally — including a large, globally installed base of precision optical
`
`deposition systems — engineers and researchers rely on Denton’s thin film innovations to drive higher throughputs, better
`
`yields and low cost of ownership (COO) while benefiting from comprehensive service and support, and a dedicated R&D
`
`program that delivers enabling technologies.
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`The Discovery® series of magnetron sputter deposition systems provides a versatile, turnkey solution for confocal and
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`
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`perpendicular sputtering geometries.
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`Denton’s Multi-Cathode Sputter Deposition Platform
`
`0
`
`0
`
`0
`
`R & D
`
`Batch production
`
`ln-Iine production
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`0
`
`0
`
`0
`
`Evaporation
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`Sputtering
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`PE-CVD
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`DENTONVACUUM
`Enabling Innovation
`
`
`
`Case 5:20-cv-05676-EJD Document 23-15 Filed 09/25/20 Page 3 of 5
`Case 5:20-cv-05676-EJD Document 23-15 Filed 09/25/20 Page 3 of 5
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`DENTON’S MULTl-CATHODE
`
`SPUTTER DEPOSITION PLATFORM
`
`THE DENTON
`
`DIFFERENCE
`
`Your process is our process.
`We collaborate with you to design a system that
`solves your exact thin film coating process needs.
`When we ship you a tool, it's production ready.
`
`0
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`Our systems scale to meet your
`production requirements
`0 We believe in customers for life
`
`0 Worldwide support network
`
`AT DENTON, WE CARE
`ABOUT YOUR SUCCESS
`
`Factory acceptance tests
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`Personalized training
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`Remote, real-time support
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`0
`
`0
`
`0
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`0
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`CE/UL/CSA compliant systems
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`
`
`
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`Case 5:20-cv-05676-EJD Document 23-15 Filed 09/25/20 Page 4 of 5
`Case 5:20-cv-05676-EJD Document 23-15 Filed 09/25/20 Page 4 of 5
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`TYPICAL APPLICATIONS
`
`SPUTTERING
`
`0
`
`0
`
`0
`0
`
`0
`
`Pilot production
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`Optical coatings
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`Protective coatings
`
`Nanotechnology
`OLEDs
`
`0 Metal coatings
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`DENTON FLEXIBLE CATHODE CONFIGURATIONS.
`
`The Discovery® accommodates up to 8 cathodes with Triaxis adjustment of radius, distance, and angular presentation to provide <:5% coating
`uniformity. Each cathode can be optimized for a different deposition process and target matter.
`
`Independent electro—pneumatic source shutters and chimney assemblies prevent cross contamination of the source material.
`
`POWERFUL CONTROL SYSTEM
`
`LARGE LOAD LOCKS
`
`_
`_
`_
`'
`'
`‘
`Available In semi-manual mode or In fully automatic mode With one
`.
`_
`push automation to reduce system downtime.
`
`Automated to handle substrate as large are 30" in
`diameter and as heavy as 5olbs.
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`PROCESSPRO U PGRADE OFFERS:
`
`1. Consistent controls across all Denton
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`Vacuum products.
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`2.
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`3.
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`Standard software makes it easy to support
`
`and av0Id costly customization fees.
`Source code for your programs so you can
`customize your programs.
`
`MULTIPLE PUMPING
`
`CONFIGURATIONS
`
`A variety of diffusion, cryogenic, and turbo
`pump configurations are available to fit your
`budget and process. Rear or bottom fitted pumps
`
`provide easy access for service based on your
`workspace needs.
`
`4. Network capabilities make Discovery
`a node on your network enabling real-time,
`remote support and upgrades.
`
`800-666-6004 | 1259 North Church Street, Bldg 3 Moorestown, NJ USA 08057
`info
`dentonvacuum.com www.dentonvacuum.com
`
`DENTONVACUUM
`a
`9
`ca 0
`En
`lin
`Inn vti n
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`
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`Case 5:20-cv-05676-EJD Document 23-15 Filed 09/25/20 Page 5 of 5
`Case 5:20-cv-05676-EJD Document 23-15 Filed 09/25/20 Page 5 of 5
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`DISCOVERYE OPTIONS
`
`MAXIMUM SUBSTRATE UP TO 8" DIAMETER
`
`MAXIMUM SUBSTRATE UP TO 30" DIAMETER
`
`RF ETCHIBIAS
`
`WATER COOLED TABLE
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`REACTIVE FLOW CONTROL
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`SUBSTRATE FLIP
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`IN-SITU ELLIPSOMETERY
`
`PUMP CONFIGURATION
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`CTI CRYOPUMP WITH THROTTLING GATE VALVE
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`TURBOMOLECULAR PUMP WITH LN2 TRAP ASSEMBLY
`
`TWO-STATE ROTARY VANE MECHANICAL PUMP
`
`DRY SCROLL MECHANICAL PUMP
`
`Specifications subject to change without notice.
`
`X
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`><><><><><><
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`ABOUT US
`
`All Denton Vacuum solutions are backed by an 18-month warranty on parts and labor, over 50 years of process knowledge, an in-house process
`engineering group, worldwide representation and support, and a Global Factory Service Center.
`
`800-666-6001, | 1259 North Church Street, Bldg 3 Moorestown, NJ USA 08057
`info@dentonvacuum.com | www.dentonvacuum.com
`
`DENTONVACUUM
`Enabling Innovation
`
`