throbber
Case 5:20-cv-05676-EJD Document 23-12 Filed 09/25/20 Page 1 of 6
`
`
`
`
`Exhibit 10
`
`
`
`
`
`
`
`
`

`

`ULVAC
`
`Case 5:20-cv-05676-EJD Document 23-12 Filed 09/25/20 Page 2 of 6
`
`Components
`
`Systems
`
`Markets
`
`Services
`
`About ULVAC
`
`Contact
`
` 
`
`Support
`
`ENTRON-EX
`
`Plasma Ashing
`Etching
`PVD
`Cluster Systems
`Roll-coater
`In-line Systems
`R&D
`300mm
`Vacuum Distillation
`Evaporation
`Ion Implanter
`Vacuum Furnaces
`CVD
`Freeze Drying
`
`http://www.ulvac.com/systems/PVD/PVD300mm/PVD300mmEntron[9/23/2020 4:41:44 PM]
`
`

`

`ULVAC
`
`Case 5:20-cv-05676-EJD Document 23-12 Filed 09/25/20 Page 3 of 6
`Case 5:20-cv-05676-EJD Document 23-12 Filed 09/25/20 Pa e30f6
`g
`
`SHARE 1 1 1
`
`Vacuum Cooling
`
`
`
`Mass Production 300mm Sputtering
`
`The Entron—EX multi—chamber sputtering system is specifically designed for the 300mm Semiconductor market. This system is equipped with
`
`the latest process chambers for advanced 300mm processing.
`
`Get More Information
`
`Request Engineering lnformation
`
`
`
`Request a Demo
`
`
`
`
`
`978-686—7550
`
`Details
`
`Key Features
`
`> Flexible module configuration.
`
`) System can run both PVD and CVD/ALD process.
`
`htlp://www.ulvac.com/systcms/PVD/PVD300mm/PVD300mEn1mnP/23/2020 4:41 :44 PM]
`
`Download Spec
`
`

`

`ULVAC
`
`Case 5:20-cv-05676-EJD Document 23-12 Filed 09/25/20 Page 4 of 6
`) Many applications includingzmfigg'ewigfifiigfilkl bQREWetBEfiillcfi Afflfifi egfiggcigeag‘éfi Of 6
`
`> Process capability for not only Si devices but also compound semiconductor.
`
`> 10 process modules maximum.
`
`> Single or Tandem platforms are available.
`
`) High Throughput system with great reliability.
`
`) Highly reliable Rorze EFEM used for atmospheric transfer.
`
`> Equipped with the latest control system that complies with the next generation semiconductor Fab.
`
`> Semi Compliant.
`
`Specifications
`
`Resources
`
`NEED MORE INFORMATION?
`
`Contact U LVAC
`
`*State
`
`*First Name
`
`*Last Name
`
`*Company
`
`*Email
`
`*Street Address
`
`Phone
`
`hflpzllwww.1flvac.conVsystuns/PVDIPVD300nm/PVD300mEnhm[9/23l2020 4:41 :44 PM]
`
`

`

`ULVAC
`
`*
`
`Country
`
`TOpiC
`
`Case 5:20-cv-05676-EJD Document 23-12 Filed 09/25/20 Page 5 of 6
`Cas
`'
`-
`-
`-
`ent 23-12 Filed 09/25/20 Page50f6
`
`
`Petite? ‘ntzrrmation
`
`system/Component
`Category
`
`System/ Component
`Name
`
`ModeINo-
`
`SeriaINo-
`
`Questions/Additional Information
`
`Prefered Method of Contact
`
`D PHONE
`
`E EMAIL
`
`I would like to receive emails from ULVAC Technologies
`
`|:| YES
`
`1:] NO
`
`I'm not a robot
`
`9
`
`reCAPTCHA
`Privacy ~ Terms
`
`http://www.ulvac.oom/systcms/PVD/PVD300mm/PVD300mmEn1mn[9/23/2020 4:41 :44 PM]
`
`

`

`ULVAC
`
`Case 5:20-cv-05676-EJD Document 23-12 Filed 09/25/20 Page 6 of 6
`
`© 2020 U LVAC
`
`Privacy | Terms of Use
`
`40‘l Griffin Brook Drive, Methuen, MA 01844
`
`2 978-686-7550 | Contact ULVAC
`
`http://www.ulvac.com/systems/PVD/PVD300nnn/PVD300mmEntron[9/23/2020 4:41:44 PM]
`
`

This document is available on Docket Alarm but you must sign up to view it.


Or .

Accessing this document will incur an additional charge of $.

After purchase, you can access this document again without charge.

Accept $ Charge
throbber

Still Working On It

This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.

Give it another minute or two to complete, and then try the refresh button.

throbber

A few More Minutes ... Still Working

It can take up to 5 minutes for us to download a document if the court servers are running slowly.

Thank you for your continued patience.

This document could not be displayed.

We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.

Your account does not support viewing this document.

You need a Paid Account to view this document. Click here to change your account type.

Your account does not support viewing this document.

Set your membership status to view this document.

With a Docket Alarm membership, you'll get a whole lot more, including:

  • Up-to-date information for this case.
  • Email alerts whenever there is an update.
  • Full text search for other cases.
  • Get email alerts whenever a new case matches your search.

Become a Member

One Moment Please

The filing “” is large (MB) and is being downloaded.

Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.

Your document is on its way!

If you do not receive the document in five minutes, contact support at support@docketalarm.com.

Sealed Document

We are unable to display this document, it may be under a court ordered seal.

If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.


Access Government Site

We are redirecting you
to a mobile optimized page.





Document Unreadable or Corrupt

Refresh this Document
Go to the Docket

We are unable to display this document.

Refresh this Document
Go to the Docket