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`Exhibit 9
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`Substrate Biasing
`Case 5:20-cv-05676-EJD Document 23-11 Filed 09/25/20 Page 2 of 5
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`Page 1 of 4
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`(https://angstromengineering.com)
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`SUBSTRATE BIASING
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`The ability to apply bias to a substrate provides a variety of
`benefits to a physical vapor deposition process. Applying a bias in
`the presence of a partial pressure of gas creates a localized
`plasma at the surface of the substrate. Prior to deposition, this
`plasma can be used to pre-clean, oxidize, or gently etch a
`substrate in preparation for the soon to be deposited film. During
`deposition, this plasma can provide gentle ion bombardment to
`improve film density, adhesion, and material reactivity.
`
`https://angstromengineering.com/tech/fixturing/substrate-biasing/
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`9/25/2020
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`
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`Substrate Biasing
`Case 5:20-cv-05676-EJD Document 23-11 Filed 09/25/20 Page 3 of 5
`Case 5:20-cv-05676-EJD Document 23-11 Filed 09/25/20 Page 3 of 5
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`Page 2 of 4
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`Depending on the substrate and deposition material, either DC or
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`RF power can be used to provide the bias. For non—conductive
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`substrates, we recommend an RF bias which is available as
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`standard on all of our deposition stages.
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`DISCOVER MORE...
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`Fixturin Overview tech fixturin|lMasking Shutter l[techlfixturingzmasking-shutter)
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`Variable Angle Stages l[techzfixturinglvariable—angle—stages)
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`Mask Handling & Transfer (/tech/automation)
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`tech fixturinPlaneta &Dome Fixtures laneta dome
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`Roll Coatin
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`tech fixturin
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`roll-coatin
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`Substrate Heatin &Coolin /tech/fixturin /heatin -and-coolin
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`Angstrom Engineering is as close to an ‘easy button’ for PVD as
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`one can get.
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`Tony Novembre — Associate Director of PRISM — Princeton
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`University
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`Does a biased stage make sense for you?
`
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`LET'S DISCUSS IT.
`
`Find answers quickly and efficiently by speaking to us.
`
`Speak to a Specialist
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`htlps://angstromengineering.com/tech/fixturing/substrate—biasing/
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`9/25/2020
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`Substrate Biasing
`Case 5:20-cv-05676-EJD Document 23-11 Filed 09/25/20 Page 4 of 5
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`Page 3 of 4
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`https://angstromengineering.com/tech/fixturing/substrate-biasing/
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`9/25/2020
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`Substrate Biasing
`Case 5:20-cv-05676-EJD Document 23-11 Filed 09/25/20 Page 5 of 5
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`Page 4 of 4
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