Case 5:20-cv-05676-EJD Document 23-10 Filed 09/25/20 Page 1 of 8
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`Exhibit 8
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`Exhibit 8
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`EvoVac Large Chamber Physical Vapor
`sition Platform
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`Case 5:20-cv-05676-EJD Document 23-10 Filed 09/25/20 Page 2 of 8
`Case 5:2 -cv-05676—EJD Document 23-10 Filed 09/25/20 Page 2 of 8
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`e—E
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`ANGSTROM
`ENGINEERING
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`EVOVAC PHYSICAL VAPOR DEPOSITION
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`PLATFORM
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`The EvoVac PVD platform can do, and be, anything you need. It has a large
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`chamber that can be outfitted with any source or process enhancement you
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`require. The EvoVac physical vapor deposition platform is our most
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`customizable single—chamber platform, so it can be outfitted with the tools for
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`specific applications, or can become the versatile multi-source deposition
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`With its 500mm x 700mm baseplate, your
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`EvoVac physical vapor deposition
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`platform can accommodate up to 14
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`sources and wide variety of PVD
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`processes. Your research goals,
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`production demands, and/or application
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`end—goals will inform how to outfit your
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`EvoVac. Let’s work together to design the
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`system that will be perfectly suited to
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`
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`We use cookies to ensure that we give you the best experience on our website. If you continue to use this site we will assume
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`that you are happy with it.
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`Ok
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`Privacy policy
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`https:Ifangstromengineering.com/products/cvovac/[9/25/2020 11:24:53 ANI]
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`EvoVac Large Chamber Physical Vapor
`sition Platform
`_
`Case 5:20-cv-05676-EJD Document 23-10 Filed 09/25/20 Page 3 of 8
`Case 5:2 -cv-05676-EJD Document 23-10 Filed 09/25/20 Page 3 of 8
`THIS PVD PLATFORM
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`DEPOSITION SOURCE OPTIONS
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`Spuflefing
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`RF, DC, pulsed DC, HIPIMS, and reactive. Circular, linear & cylindrical cathodes are
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`available.
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`Thermal Evaporation
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`You can utilize a wide range of boats, filaments & crucible heaters. Auto-tuning
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`ensures precise rate control.
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`Electron Beam Evaporation
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`A wide range of source power and power supply options are available. Programmable
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`sweep controller with recipe storage is controlled through Aeres software platform. A
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`torque sensing crucible indexer detects pocket jams. There is room for multiple e-beam
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`sources in the EvoVac chamber.
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`Plasma & Ion Beam Processing
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`We use a range of ion sources for cleaning and film enhancements, including glow
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`discharge plasma cleaning.
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`https:I/angslromcngincering.com/products/cvovacl[9/25/2020 11:24:53 AM]
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`EvoVac Large Chamber Physical Vapor
`sition Platform
`_
`Case 5:20-cv-05676-EJD Document 23-10 Filed 09/25/20 Page 4 of 8
`Case 5:2 -cv-05676-EJD Document 23-10 Filed 09/25/20 Page 4 of 8
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`SUBSTRATE FIXTURING ENHANCEMENTS
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`Stage
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`Variable
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`Roll to Roll
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`Masking
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`Planetary
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`Substrate
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`Heating &
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`Cooling
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`Angle
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`Stages
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`Coating
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`Shutter
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`& Dome
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`Fixtures
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`Biasing
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`AUTOMATION OPTIONS
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`Load Locks
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`Substrate Transfer
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`Mask Handling
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`AERES ADVANCED PROCESS CONTROL SOFTWARE
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`: Simple to use yet highly advanced
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`integrated software platform
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`https://angstromcnginccring.com/products/evovac/[9/25/2020 11:24:53 AM]
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`EvoVac Large Chamber Physical Vapor.1238wsition Platform
`Case 5:20-cv-05676-EJD Document 23-10 Filed 09/25/20 Page 5 of 8
`Case 5:2
`cv-05676- EJD Document 23- 10 Filed 09/25/20 Page 5 of 8
`PC/PLC controlled recipes for single,
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`I
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`l
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`batch, or automated processes
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`Advanced data logging and process
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`tracking ensure consistent and
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`repeatable processes
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`High resolution control provides
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`impressive low rate stability and
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`consistent doping ratios
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`Central control station manages each
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`module and schedules the processes
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`in each chamber
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`Independent control of multiple
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`chambers (if applicable)
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`Complex recipes can be created and
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`modified easily
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`1
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`Automatic PID control loop tuning
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`significantly reduces process
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`development time
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`Click here for more information on Aeres
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`The EvoVac physical vapor deposition platform’s design is
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`tenific and the glovebox port is easy to work with. Last year,
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`it was used 2269 hours, averaging over 6 hours a day every
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`day of the year. It is the single most used piece of equipment
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`at our facility, and essential to numerous research projects. As
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`such, it is critical that downtime is minimized. The support
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`Angstrom Engineering provides for service issues is
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`exceptional, and unparalleled. My job would be significantly
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`easier if I received the customer support Angstrom offers for
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`httpsz/Iangstromcnginccring.com/products/evovac/[9/25/2020 11:24:53 AM]
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`EvoVac Large Chamber Physical VaporD sition Platform
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`Case 5:20-cv-05676-EJD Document 23-10 Filed 09/25/20 Page 6 of 8
`Case 5:2 -cv-05676—EJD Document 23-10 Filed 09/25/20 Page 6 of 8
`the other instmments in our facility.
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`Dr. Ina 1\Iartin — Case \Vestern Reserve I'niversity
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` This video shows an example of an
`AnytmgtpwebtwilWWW
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`EvoVac physical vapor deposition
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`platform outfitted with several process
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`enhancements, including Glovebox
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`integration.
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`EvoVac
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`ANGSTROM
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`e A
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`Click Here to Download the EvoVac PDF
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`Brochure
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`IS EVOVAC THE RIGHT SYSTEM FOR YOUR LAB?
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`Talk to us about it. You’ll get answers efficiently.
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`When we work together, amazing things can happen. Your brilliant ideas with our
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`innovative team will create the tool that will bring your research or production to the
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`next level. We‘re looking forward to hearing from you:
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`|Speak to a Specialist
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`
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`https:l‘i’angstromengineering.com/productsu“evovac/[WZ5““2020 11:24:53 AM]
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`
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`EvoVac Large Chamber Physical Vapor Deposition Platform
`Case 5:20-cv-05676-EJD Document 23-10 Filed 09/25/20 Page 7 of 8
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`WHERE WOULD YOU LIKE TO GO?
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`Systems
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`Magnetron Sputtering
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`E-Beam Evaporation
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`Thermal Evaporation
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`Ion Beam Processing
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`Fixturing
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`Applications
`About Us
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`Contact Us
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`News
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`Employment
`Testimonials
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`FOLLOWUS
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`C E E E E
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`RECENT TWE ETS
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`
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`%
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`Pablo, an electrical engineering technologist who recently joined the team, is earning his chops in the
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`guts of thi. .. https:l/t.co/uYnGjBZ1wF
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`"While mathematical encryption techniques are vulnerable to being cracked by powerful enough
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`computers, cracking qu... https:l/t.co/0GNquAfl8
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`Dr. Vohra is commissioning this Reticle, a PVD platform built around a particular process: Ion Beam
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`Sputter Deposit... https:l/t.co/tMJRathnE
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`LET'S TALK!
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`Name *
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`https:i’U‘angstromengineering.comr’productalevovac/[
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`0 11:24:53 AM]
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`EvoVac Large Chamber Physical Vapor D osition Platform
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`Case 5:28-cv-05676-EJD Document 23-10 Filed 09/25/20 Page 8 of 8
`Case 5:20-cv-05676-EJD Document 23-10 Filed 09/25/20 Page 8 of 8
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`Copyright © 2020 |Mb§i1e§gngflmm |W | Angstrom Engineering Inc. | 91 Trillium Drive, Kitchener
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`Ontario, N2E 1W8 | +1 519.894.4441
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`https:Hangstromengineen'ng.com/products/evovac/[9/25/2020 11:24:53 AM]
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