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Abrasive-free chemical mechanical polishing composition and polishing process containing same

10/689,043 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 21, 2003
Examiner ANITA KAREN ALANKO
Class 252
Art Group 1792
Case Type Utility - 252/079100
Status Abandoned -- Failure to Respond to an Office Action
Parent 09/226,996 Patented
Parent 09/43,505 Patented
Parent PCT/US97/12220 Published
Parent 60/23,299 Expired
Child PCT/US04/34563 Published
Last Updated: 4 years, 6 months ago
Date # Transaction