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CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS

10/401,405 | U.S. Patent Application

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Location ELECTRONIC
Filed March 27, 2003
Examiner ANITA KAREN ALANKO
Class 252
Art Group 1765
Patent No. 7,276,180
Case Type Utility - 252/079100
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 09/226,996 Patented
Parent 09/43,505 Patented
Parent PCT/US97/12220 Published
Parent 60/23,299 Expired
Child 10/683,730 Patented
Child 11/194,467 Patented
Last Updated: 4 years, 6 months ago
Date # Transaction