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Chemical mechanical polishing compositions

09/985,870 | U.S. Patent Application

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Location ELECTRONIC
Filed Nov. 6, 2001
Examiner ANITA KAREN ALANKO
Class 438
Art Group 1765
Case Type Utility - 438/692000
Status Abandoned -- Failure to Respond to an Office Action
Parent 09/481,050 Patented
Parent 09/43,505 Patented
Parent PCT/US97/12220 Published
Parent 60/23,299 Expired
Child PCT/US02/35388 Published
Last Updated: 5 years, 4 months ago
Date # Transaction